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US5777739A
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US
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Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers
Assignee: Micron Technology Inc
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Filing: 1996-02-16
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Granted: 1998-07-07
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Expires: 2016-02-16
Abstract
Abstract The present invention is an endpoint detector and a method for quickly and accurately measuring the change in thickness of a wafer in chemical-mechanical polishing processes. The endpoint detector has a reference platform, a measuring face, and a distance measuring device. The reference platform is positioned proximate to the wafer carrier, and the reference platform and measuring device are positioned apart from one another by a known, constant distance. The measuring face is fixedly positioned with respect to the wafer carrier at a location that allows the measuring device to engage the measuring face when the wafer is positioned on the reference platform. Each time the measuring device engages the measuring surface, it measures the displacement of the measuring face with respect to the measuring device. The displacement of the measuring face is proportional to the change in thickness of the wafer between measurements.
Inventors
- 👤 Gurtej Singh Sandhu
- 👤 Trung Tri Doan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 07:05
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/12; G; G01; G01B; G01B11/00; G01B11/02; G01B11/026; G01B11/06; G01B11/0608; G01B11/0616; G01B11/0683; H; H10; H10P; H10P52/00; H10P52/40; H10P52/402; H10P74/00; H10P74/23; H10P74/238
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
121 words
An endpoint detector for measuring a change in wafer thickness of a semiconductor wafer that is attached to a wafer carrier of a polishing machine during chemical-mechanical polishing of the wafer, comprising: a reference platform positioned proximate to the wafer carrier, the wafer being engageable with the reference platform; a measuring face fixedly positioned with respect to the wafer carrier; and a distance measuring device engageable with the measuring face when the wafer is engaged with the reference platform, wherein the measuring device and the reference platform are positioned apart from each other by a constant distance for all measurements of the wafer, and wherein the measuring device measures the displacement of the measuring face with respect to the measuring device.
Claim 2
Dependent Claim
121 words
An endpoint detector for measuring a change in wafer thickness of a semiconductor wafer that is attached to a wafer carrier of a polishing machine during chemical-mechanical polishing of the wafer, comprising: a reference platform positioned proximate to the wafer carrier, the wafer being engageable with the reference platform; a measuring face fixedly positioned with respect to the wafer carrier; and a distance measuring device engageable with the measuring face when the wafer is engaged with the reference platform, wherein the measuring device and the reference platform are positioned apart from each other by a constant distance for all measurements of the wafer, and wherein the measuring device measures the displacement of the measuring face with respect to the measuring device.
Claim 3
Dependent Claim
22 words
The endpoint detector of claim 1 wherein the reference platform is a polishing pad mounted on a platen of the polishing machine.
Claim 4
Dependent Claim
22 words
The endpoint detector of claim 1 wherein the reference platform is a separate plate attached to a wall of the polishing machine.
Claim 5
Dependent Claim
26 words
The endpoint detector of claim 1 wherein the reference platform is a separate plate mounted on an upper surface of a platen of the polishing machine.
Claim 6
Dependent Claim
18 words
The endpoint detector of claim 1 wherein the reference platform is a separate plate mounted on a pedestal.
Claim 7
Dependent Claim
18 words
The endpoint detector of claim 1 wherein the measuring face is an upper face of the wafer carrier.
Claim 8
Dependent Claim
21 words
The endpoint detector of claim 1 wherein the measuring device is an interferometer that directs a beam onto the measuring surface.
Claim 9
Dependent Claim
113 words
A polishing machine for chemical-mechanical polishing of a semiconductor wafer, comprising: a moveable platen; a reference platform positioned proximate to the platen; a wafer carrier for holding a wafer, the wafer carrier being positionable opposite the platen and the reference platform; a measuring face fixedly positioned with respect to the wafer carrier; and a distance measuring device engageable with the measuring face when the wafer is engaged with the reference platform, wherein the measuring device and the reference platform are positioned apart from each other by a constant distance for all measurements of the wafer, and wherein the measuring device measures the displacement of the measuring face with respect to the measuring device.
Claim 10
Dependent Claim
113 words
A polishing machine for chemical-mechanical polishing of a semiconductor wafer, comprising: a moveable platen; a reference platform positioned proximate to the platen; a wafer carrier for holding a wafer, the wafer carrier being positionable opposite the platen and the reference platform; a measuring face fixedly positioned with respect to the wafer carrier; and a distance measuring device engageable with the measuring face when the wafer is engaged with the reference platform, wherein the measuring device and the reference platform are positioned apart from each other by a constant distance for all measurements of the wafer, and wherein the measuring device measures the displacement of the measuring face with respect to the measuring device.
Claim 11
Dependent Claim
21 words
The polishing machine of claim 8 wherein the platform is a separate plate attached to a wall of the polishing machine.
Claim 12
Dependent Claim
21 words
The polishing machine of claim 8 wherein the platform is a separate plate attached to an upper surface of the platen.
Claim 13
Dependent Claim
17 words
The polishing machine of claim 8 wherein the platform is a separate plate mounted on a pedestal.
Claim 14
Dependent Claim
17 words
The polishing machine of claim 8 wherein the platform is a polishing pad positioned on the platen.
Claim 15
Dependent Claim
18 words
The polishing machine of claim 8 wherein the measuring face is an upper face of the wafer carrier.
Claim 16
Dependent Claim
21 words
The polishing machine of claim 8 wherein the measuring device is an interferometer that directs a beam onto the measuring surface.
Claim 17
Dependent Claim
154 words
In chemical-mechanical polishing of semiconductor wafers, a method for measuring a change in thickness of a wafer that is attached to a wafer carrier of a polishing machine during polishing of the wafer, comprising the steps of: placing the wafer on a reference platform; engaging a measuring face on the wafer carrier with a measuring device as the wafer is placed on the reference platform to determine a baseline measurement of the position of the measuring face with respect to the measuring device; re-placing the wafer on the reference platform after the wafer is at least partially polished; and re-engaging the measurement face with the measuring device as the wafer is re-placed against the reference platform to determine a subsequent measurement of the position of the measuring face with respect to the measuring device, wherein the change in thickness of the wafer proportionate to the difference between the baseline measurement and the subsequent measurement.
Claim 18
Dependent Claim
154 words
In chemical-mechanical polishing of semiconductor wafers, a method for measuring a change in thickness of a wafer that is attached to a wafer carrier of a polishing machine during polishing of the wafer, comprising the steps of: placing the wafer on a reference platform; engaging a measuring face on the wafer carrier with a measuring device as the wafer is placed on the reference platform to determine a baseline measurement of the position of the measuring face with respect to the measuring device; re-placing the wafer on the reference platform after the wafer is at least partially polished; and re-engaging the measurement face with the measuring device as the wafer is re-placed against the reference platform to determine a subsequent measurement of the position of the measuring face with respect to the measuring device, wherein the change in thickness of the wafer proportionate to the difference between the baseline measurement and the subsequent measurement.
Claim 19
Dependent Claim
42 words
The method of claim 15 wherein the measuring device is an interferometer and the engaging and re-engaging steps comprise impinging a beam onto the measuring face and detecting a phase change in a reflection of the beam off of the measuring face.
Claim 20
Dependent Claim
31 words
The method of claim 15 wherein the placing and re-placing steps comprise exerting a constant force between the wafer and the platform for all measurements of the change in wafer thickness.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-07-06 | 2002-01-05 | 2002-07-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-07-06 | 2006-01-05 | 2006-07-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-07-06 | 2010-01-05 | 2010-07-07 | $7700.00 | Window Closed / Lapsed |