Illuminating optical apparatus

Claim 2

An illuminating optical apparatus comprising: a light source providing a light beam; a rotationally symmetrical mirror having first and second openings which are spaced along an optical axis of said illuminating optical apparatus, and a reflecting surface which extends between said first and second openings symmetrically about said optical axis and which condenses said light beam; a collimating optical system which converts the condensed light beam into a substantially parallel light beam and which also forms an image of the entire reflecting surface substantially on a predetermined plane; and a multiple light source forming device which receives said parallel light beam and which has a predetermined surface substantially coincident with said predetermined plane, said multiple light source forming device forming plural secondary light sources from said substantially parallel light beam and from said image of the entire reflecting surface.

Claim 3

An illuminating optical apparatus according to claim 1, wherein said predetermined surface is the entrance surface of said multiple light source forming device.

Claim 4

An illuminating optical apparatus according to claim 2, wherein said multiple light source forming device includes an optical integrator.

Claim 5

An illuminating optical apparatus according to claim 3, wherein said optical integrator includes plural lens elements.

Claim 6

An illuminating optical apparatus according to claim 2, wherein said plural secondary light sources formed by said multiple light source forming device constitute an annularly shaped light intensity distribution.

Claim 7

An illuminating optical apparatus according to claim 5, wherein said multiple light source forming device includes an optical integrator that forms said secondary light sources, and further comprising a diaphragm having an aperture of a predetermined shape and positioned at the exit side of said optical integrator.

Claim 8

An illuminating optical apparatus according to claim 6, wherein said aperture is of annular shape.

Claim 9

An illuminating optical apparatus according to claim 6, wherein said diaphragm has at least two said apertures of predetermined shapes provided at positions deviated from the center of said diaphragm.

Claim 10

An illuminating optical apparatus comprising; a light source providing a light beam; a rotationally symmetrical mirror having first and second openings which are spaced along an optical axis of said illuminating optical apparatus, and a reflecting surface which extends between said first and second openings symmetrically about said optical axis and which condenses said light beam; a re-imaging optical system which re-images an image of the light source formed by the condensed light beam at a predetermined position and which also forms an image of the entire reflecting surface substantially on a predetermined plane; a multiple light source forming device which has an entrance surface substantially at said predetermined position, which also has a surface substantially coincident with said predetermined plane, and which forms plural secondary light sources; an imaging optical system which focuses light beams from said multiple light source forming device; and a condenser optical system which condenses light beams from said imaging optical system for uniformly illuminating an object of illumination.

Claim 11

An illuminating optical apparatus comprising; a light source providing a light beam; a rotationally symmetrical mirror having first and second openings which are spaced along an optical axis of said illuminating optical apparatus, and a reflecting surface which extends between said first and second openings symmetrically about said optical axis and which condenses said light beam; a re-imaging optical system which re-images an image of the light source formed by the condensed light beam at a predetermined position and which also forms an image of the entire reflecting surface substantially on a predetermined plane; a multiple light source forming device which has an entrance surface substantially at said predetermined position, which also has a surface substantially coincident with said predetermined plane, and which forms plural secondary light sources; an imaging optical system which focuses light beams from said multiple light source forming device; and a condenser optical system which condenses light beams from said imaging optical system for uniformly illuminating an object of illumination.

Claim 12

An illuminating optical apparatus according to claim 9, wherein said predetermined surface of said multiple light source forming device is the exit surface thereof.

Claim 13

An illuminating optical apparatus according to claim 10, wherein said multiple light source forming device includes an optical integrator.

Claim 14

An illuminating optical apparatus according to claim 11, wherein said optical integrator includes a rod-shaped optical member.

Claim 15

An illuminating optical apparatus according to claim 12, wherein plural secondary light sources formed by said optical integrator constitute an annularly shaped light intensity distribution.

Claim 16

An illuminating optical apparatus according to claim 13, further comprising a diaphragm provided at a position where said plural secondary light sources are formed.

Claim 17

An illuminating optical apparatus according to claim 14, wherein said diaphragm has an aperture of annular shape.

Claim 18

An illuminating optical apparatus according to claim 14, wherein said diaphragm has at least two apertures of predetermined shapes, provided at positions deviated from the center of said diaphragm.

Claim 19

An illuminating optical apparatus comprising: a light source providing a light beam; a rotationally symmetrical mirror having a non-reflecting area and a light passing area which are spaced along an optical axis of said illuminating optical apparatus, and a reflecting area which extends between said non-reflecting area and said light passing area symmetrically about said optical axis and which reflects said light beam; a light source image forming device which forms light source images based on the reflected light beam; and a condensing optical system which condenses light beams from said light source images for uniformly illuminating an object of illumination; wherein said light source image forming device includes an imaging optical system which forms an image of a portion of said reflecting area which is the closest to said non-reflecting area and an image of a portion of said reflecting area which is closest to said light passing area substantially on a predetermined plane at a surface of said light source image forming device.

Claim 20

An illuminating optical apparatus comprising: a light source providing a light beam; a rotationally symmetrical mirror having a non-reflecting area and a light passing area which are spaced along an optical axis of said illuminating optical apparatus, and a reflecting area which extends between said non-reflecting area and said light passing area symmetrically about said optical axis and which reflects said light beam; a light source image forming device which forms light source images based on the reflected light beam; and a condensing optical system which condenses light beams from said light source images for uniformly illuminating an object of illumination; wherein said light source image forming device includes an imaging optical system which forms an image of a portion of said reflecting area which is the closest to said non-reflecting area and an image of a portion of said reflecting area which is closest to said light passing area substantially on a predetermined plane at a surface of said light source image forming device.

Claim 21

An illuminating optical apparatus according to claim 17, wherein said light source image forming device includes an optical integrator which forms plural secondary light sources.

Claim 22

An illuminating optical apparatus according to claim 18, wherein said predetermined surface is the entrance surface of said optical integrator.

Claim 23

An illuminating optical apparatus according to claim 18, wherein said predetermined surface is the exit surface of said optical integrator.

Claim 24

An illuminating optical apparatus according to claim 17, wherein said non-reflecting area is an opening of said mirror.

Claim 25

An illuminating optical apparatus comprising: a light source providing a light beam; a rotationally symmetrical reflector having a non-reflecting area and a reflecting area which in symmetric about an optical axis and which is illuminated by said light beam; an imaging optical system which forms an image of said non-reflecting area and an image of said reflecting area substantially on a predetermined plane; a light source image forming device which forms light source images from the images of said non-reflecting area and said reflecting area; and a condensing optical system which condenses light beams from said light source images for uniformly illuminating an object of illumination, wherein said imaging optical system changes positions of said predetermined plane along the optical axis.

Claim 26

An illuminating optical apparatus comprising: a light source providing a light beam; a rotationally symmetrical reflector having a non-reflecting area and a reflecting area which in symmetric about an optical axis and which is illuminated by said light beam; an imaging optical system which forms an image of said non-reflecting area and an image of said reflecting area substantially on a predetermined plane; a light source image forming device which forms light source images from the images of said non-reflecting area and said reflecting area; and a condensing optical system which condenses light beams from said light source images for uniformly illuminating an object of illumination, wherein said imaging optical system changes positions of said predetermined plane along the optical axis.

Claim 27

An illuminating optical apparatus according to claim 22, wherein said imaging optical system changes said positions between a first position substantially on a surface of said light source imaging forming device and a second position distant from said first position.

Claim 28

An illuminating optical apparatus according to claim 23, wherein said light source image forming device includes an optical integrator which forms plural secondary light sources.

Claim 29

An illuminating optical apparatus according to claim 24, wherein said predetermined plane is the entrance surface of said optical integrator.

Claim 30

An illuminating optical apparatus according to claim 24, wherein said predetermined plane is the exit surface of said optical integrator.

Claim 31

An illuminating optical apparatus according to claim 24, further comprising a diaphragm located at a position where said secondary light sources are formed and which has an aperture.

Claim 32

An illuminating optical apparatus according to claim 27, wherein said diaphragm transforms the shape of said aperture.

Claim 33

An illuminating optical apparatus according to claim 28, wherein said diaphragm transforms the shape of said aperture, according to the positions of said predetermined plane.

Claim 34

An illuminating optical apparatus according to claim 22, wherein said reflector forms an image of said light source and said imaging optical system converts the image of said light source into a substantially parallel light beam, and wherein said light source image forming device forms plural secondary light sources from said substantially parallel light beam.

Claim 35

An illuminating optical apparatus according to claim 22, wherein said imaging optical system includes a pair of exchangeable optical devices, one of which places said predetermined plane at a first position and the other of which places said predetermined plane at a second position distant from said first position.

Claim 36

An illuminating optical apparatus according to claim 22, further comprising a diaphragm located at a position where said light source images are formed and which has an aperture; an input device for entering information concerning a type of illumination to illuminate said object; and a control device which controls said imaging optical system to select the position of said predetermined plane and which controls said diaphragm to change the shape of said aperture, depending upon the input information.