US5459547A
Expired / Lapsed
US
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Illumination device
Assignee: Canon Inc
•
Filing: 1993-06-25
•
Granted: 1995-10-17
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Expires: 2013-06-25
Abstract
Abstract An illumination device includes first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction intersecting the optical axis; a condensing optical system for collecting light passed through the first and second optical integrators, to form a secondary light source; and a mechanism for relatively shifting the second optical integrator relative to the first optical integrator, in a direction intersecting the optical axis.
Inventors
- 👤 Takahisa Shiozawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 10:50
CPC Classifications
G; G02; G02B; G02B3/00; G02B3/0006; G02B3/0037; G02B3/0056; G02B3/0062; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70075; G03F7/70091; G03F7/701; G03F7/70108
Claims Analysis
Total Claims: 57
Claim 1
Independent Claim
72 words
An illumination device, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis; an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
Claim 2
Dependent Claim
72 words
An illumination device, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis; an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
Claim 3
Dependent Claim
78 words
A device according to claim 1, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein said shifting means shifts said second optical integrator selectively between a first state in which said lens elements of said first and second optical integrators are placed coaxially and a second state in which said lens elements of said first and second optical integrators are relatively deviated by a half of said pitch.
Claim 4
Dependent Claim
23 words
A device according to claim 1 or 2, wherein said optical system includes prism means demountably insertable into a path of the light.
Claim 5
Dependent Claim
17 words
A device according to claim 1 or 2, wherein said optical system includes a variable-magnification optical system.
Claim 6
Dependent Claim
28 words
A device according to claim 1 or 2, wherein each of said lens elements of each of said first and second optical integrators has a square sectional shape.
Claim 7
Dependent Claim
31 words
A device according to claim 1 or 2, wherein said shifting means includes means for relatively shifting said second optical integrator relative to said first optical integrator along the optical axis.
Claim 8
Dependent Claim
118 words
An illumination device, comprising: light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source of said third optical integrator; a second optical system for directing light from said secondary light source to a surface to be illuminated; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
Claim 9
Dependent Claim
118 words
An illumination device, comprising: light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source of said third optical integrator; a second optical system for directing light from said secondary light source to a surface to be illuminated; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
Claim 10
Dependent Claim
78 words
A device according to claim 7, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein said shifting means shifts said second optical integrator selectively between a first state in which said lens elements of said first and second optical integrators are placed coaxially and a second state in which said lens elements of said first and second optical integrators are relatively deviated by a half of said pitch.
Claim 11
Dependent Claim
22 words
A device according to claim 8, wherein said first optical system includes prism means demountably insertable into a path of the light.
Claim 12
Dependent Claim
16 words
A device according to claim 8, wherein said first optical system includes a variable-magnification optical system.
Claim 13
Dependent Claim
26 words
A device according to claim 8, wherein each of said lens elements of each of said first, and second optical integrators has a square sectional shape.
Claim 14
Dependent Claim
29 words
A device according to claim 8, wherein said shifting means includes means for relatively shifting said second optical integrator relative to said first optical integrator along the optical axis.
Claim 15
Dependent Claim
64 words
A device according to claim 8, wherein said light source means includes a light emitting portion, an elliptical mirror for collecting light from said light emitting portion, and an imaging lens system for directing light collectively reflected by said elliptical mirror to said first optical integrator, and wherein said imaging lens system serves to image said light emitting portion on said first optical integrator.
Claim 16
Dependent Claim
69 words
A device according to claim 8, wherein said light source means includes a light emitting portion, an elliptical mirror with an opening, for collecting light from said light emitting portion, and an imaging lens system for directing light collectively reflected by said elliptical mirror to said first optical integrator, and wherein said imaging lens system serves to image said opening of said elliptical mirror on said first optical integrator.
Claim 17
Dependent Claim
31 words
A device according to claim 8, further comprising a stop disposed adjacent to a light exit surface of said third optical integrator, for adjusting the shape of said secondary light source.
Claim 18
Dependent Claim
84 words
An exposure apparatus for exposing a substrate to a mask, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis; an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source for illumination of the mask; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
Claim 19
Dependent Claim
84 words
An exposure apparatus for exposing a substrate to a mask, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis; an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source for illumination of the mask; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
Claim 20
Dependent Claim
78 words
An apparatus according to claim 16, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein said shifting means shifts said second optical integrator selectively between a first state in which said lens elements of said first and second optical integrators are placed coaxially and a second state in which said lens elements of said first and second optical integrators are relatively deviated by a half of said pitch.
Claim 21
Dependent Claim
23 words
An apparatus according to claim 16 or 17, wherein said optical system includes prism means demountably insertable into a path of the light.
Claim 22
Dependent Claim
17 words
An apparatus according to claim 16 or 17, wherein said optical system includes a variable-magnification optical system.
Claim 23
Dependent Claim
28 words
An apparatus according to claim 16 or 17, wherein each of said lens elements of each of said first and second optical integrators has a square sectional shape.
Claim 24
Dependent Claim
31 words
An apparatus according to claim 16 or 17, wherein said shifting means includes means for relatively shifting said second optical integrator relative to said first optical integrator along the optical axis.
Claim 25
Dependent Claim
68 words
An illumination device, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having a relative eccentricity in their optical axes; and an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source.
Claim 26
Dependent Claim
68 words
An illumination device, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having a relative eccentricity in their optical axes; and an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source.
Claim 27
Dependent Claim
44 words
A device according to claim 22, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein said lens elements of said first and second optical integrators are relatively deviated by a half of said pitch.
Claim 28
Dependent Claim
21 words
A device according to claim 22, wherein said optical system includes prism means demountably insertable into a path of the light.
Claim 29
Dependent Claim
15 words
A device according to claim 22, wherein said optical system includes a variable-magnification optical system.
Claim 30
Dependent Claim
26 words
A device according to claim 22, wherein each of said lens elements of each of said first and second optical integrators has a square sectional shape.
Claim 31
Dependent Claim
113 words
An illumination device, comprising: light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having relative eccentricity in their optical axes; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source through said third optical integrator; and a second optical system for directing light from said secondary light source to a surface to be illuminated.
Claim 32
Dependent Claim
113 words
An illumination device, comprising: light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having relative eccentricity in their optical axes; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source through said third optical integrator; and a second optical system for directing light from said secondary light source to a surface to be illuminated.
Claim 33
Dependent Claim
49 words
A device according to claim 27, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein the optical axes of said lens elements of said first, second and third optical integrators are relatively deviated by a half of said pitch.
Claim 34
Dependent Claim
22 words
A device according to claim 28, wherein said first optical system includes prism means demountably insertable into a path of the light.
Claim 35
Dependent Claim
16 words
A device according to claim 28, wherein said first optical system includes a variable-magnification optical system.
Claim 36
Dependent Claim
26 words
A device according to claim 28, wherein each of said lens elements of each of said first and second optical integrators has a square sectional shape.
Claim 37
Dependent Claim
64 words
A device according to claim 28, wherein said light source means includes a light emitting portion, an elliptical mirror for collecting light from said light emitting portion, and an imaging lens system for directing light collectively reflected by said elliptical mirror to said first optical integrator, and wherein said imaging lens system serves to image said light emitting portion on said first optical integrator.
Claim 38
Dependent Claim
69 words
A device according to claim 28, wherein said light source means includes a light emitting portion, an elliptical mirror with an opening, for collecting light from said light emitting portion, and an imaging lens system for directing light collectively reflected by said elliptical mirror to said first optical integrator, and wherein said imaging lens system serves to image said opening of said elliptical mirror on said first optical integrator.
Claim 39
Dependent Claim
31 words
A device according to claim 28, further comprising a stop disposed adjacent to a light exit surface of said third optical integrator, for adjusting the shape of said secondary light source.
Claim 40
Dependent Claim
75 words
An exposure apparatus for exposing a substrate to a mask, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having a relative eccentricity in their optical axes; and an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source.
Claim 41
Dependent Claim
75 words
An exposure apparatus for exposing a substrate to a mask, comprising: first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having a relative eccentricity in their optical axes; and an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source.
Claim 42
Dependent Claim
44 words
An apparatus according to claim 35, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein said lens elements of said first and second optical integrators are relatively deviated by a half of said pitch.
Claim 43
Dependent Claim
21 words
An apparatus according to claim 36, wherein said optical system includes prism means demountably insertable into a path of the light.
Claim 44
Dependent Claim
15 words
An apparatus according to claim 36, wherein said optical system includes a variable-magnification optical system.
Claim 45
Dependent Claim
26 words
An apparatus according to claim 36, wherein each of said lens elements of each of said first and second optical integrators has a square sectional shape.
Claim 46
Dependent Claim
143 words
An exposure apparatus for exposing a substrate to a mask, comprising: light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having relative eccentricity in their optical axes; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source through said third optical integrator; a second optical system for directing light from said secondary light source to a surface to be illuminated; and a projection optical system for projecting an image of a pattern of the mask, irradiated with said secondary light source, to the substrate.
Claim 47
Dependent Claim
143 words
An exposure apparatus for exposing a substrate to a mask, comprising: light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having relative eccentricity in their optical axes; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source through said third optical integrator; a second optical system for directing light from said secondary light source to a surface to be illuminated; and a projection optical system for projecting an image of a pattern of the mask, irradiated with said secondary light source, to the substrate.
Claim 48
Dependent Claim
49 words
An apparatus according to claim 40, wherein said lens elements of said first and second optical integrators are arrayed at the same pitch, and wherein the optical axes of said lens elements of said first, second and third optical integrators are relatively deviated by a half of said pitch.
Claim 49
Dependent Claim
22 words
An apparatus according to claim 40, wherein said condensing optical system includes prism means demountably insertable into a path of the light.
Claim 50
Dependent Claim
16 words
An apparatus according to claim 40, wherein said condensing optical system includes a variable-magnification optical system.
Claim 51
Dependent Claim
26 words
An apparatus according to claim 40, wherein each of said lens elements of each of said first and second optical integrators has a square sectional shape.
Claim 52
Dependent Claim
29 words
A device according to claim 1, wherein a light entrance surface of said first optical integrator is optically conjugate with a light exit surface of said second optical integrator.
Claim 53
Dependent Claim
36 words
A device according to claim 7, wherein a light entrance surface of said first optical integrator is optically conjugate with a light exit surface of said second optical integrator, and wherein a light entrance surface of
Claim 54
Dependent Claim
29 words
A device according to claim 22, wherein a light entrance surface of said first optical integrator is optically conjugate with a light exit surface of said second optical integrator.
Claim 55
Dependent Claim
52 words
A device according to claim 27, wherein a light entrance surface of said first optical integrator is optically conjugate with a light exit surface of said second optical integrator, and wherein a light entrance of said second optical integrator is optically conjugate with a light entrance surface of said third optical integrator.
Claim 56
Dependent Claim
29 words
An apparatus according to claim 35, wherein a light entrance surface of said first optical integrator is optically conjugate with a light exit surface of said second optical integrator.
Claim 57
Dependent Claim
52 words
An apparatus according to claim 40, wherein a light entrance surface of said first optical integrator is optically conjugate with a light exit surface of said second optical integrator, and a light entrance surface of said second optical integrator is optically conjugate with a light entrance surface of said third optical integrator.
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