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Field emission device having nanostructured emitters

Assignee: 3M Co
•
Filing: 1996-05-31
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Granted: 1998-03-10
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Expires: 2016-05-31
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Abstract

Abstract An electric field emission device includes an electrode that includes a layer having a dense array of discrete, solid microstructures disposed on at least a portion of one or more surfaces of a substrate, the microstructures having an areal number density of greater than 10 7 /cm 2 , the microstructures being individually conformally overcoated with one or more layers of an electron emitting material, the overcoated electron emitting material being disposed on at least a portion of the microstructures and have a surface morphology which is nanoscopically rough. A method for preparing the electrode used in the invention is discussed.

Inventors

  • 👤 Mark K. Debe

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:36
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042; C; C01; C01B; C01B32/00; C01B32/05; H01J9/00; H01J9/02

Claims Analysis

Total Claims: 38
Claim 1
Independent Claim 106 words
An electron field emission display comprising an electrode including as cathode a layer comprising a dense array of discrete solid microstructures disposed on at least a portion of one or more surfaces of a substrate, said microstructures having an areal number density of greater than 10 7 /cm 2 , at least a portion of said microstructures being conformally overcoated with one or more layers of an electron emitting material, said overcoated electron emitting material being disposed on at least a portion of each of said microstructures and having a surface morphology that is nanoscopically rough and that provides multiple potential field emission sites per microstructure.
Claim 2
Dependent Claim 106 words
An electron field emission display comprising an electrode including as cathode a layer comprising a dense array of discrete solid microstructures disposed on at least a portion of one or more surfaces of a substrate, said microstructures having an areal number density of greater than 10 7 /cm 2 , at least a portion of said microstructures being conformally overcoated with one or more layers of an electron emitting material, said overcoated electron emitting material being disposed on at least a portion of each of said microstructures and having a surface morphology that is nanoscopically rough and that provides multiple potential field emission sites per microstructure.
Claim 3
Dependent Claim 20 words
The display according to claim 1 wherein said microstructures have an areal density greater than 10 8 /cm 2 .
Claim 4
Dependent Claim 19 words
The display according to claim 1 wherein said dense array of said microstructures of said electrode are randomly oriented.
Claim 5
Dependent Claim 21 words
The display according to claim 1 wherein said microstructures of said electrode are at least one of regularly and randomly arrayed.
Claim 6
Dependent Claim 29 words
The display according to claim 1 wherein said dense array of said micro structures of said electrode are oriented such that their major axes are parallel to each other.
Claim 7
Dependent Claim 19 words
The display according to claim 1 wherein said microstructures of said electrode are essentially non-uniform in size and shape.
Claim 8
Dependent Claim 19 words
The display according to claim 1 wherein said microstructures of said electrode are essentially uniform in size and shape.
Claim 9
Dependent Claim 25 words
The display according to claim 1 wherein said microstructures of said electrode have an average cross-sectional dimension in the range of 0.01 to 0.5 micrometer.
Claim 10
Dependent Claim 20 words
The display according to claim 1 wherein said microstructures of said electrode have average lengths of 0.1 to 5 micrometers.
Claim 11
Dependent Claim 24 words
The display according to claim 1 wherein said microstructures of said electrode have an aspect ratio which ranges from about 1:1 to about 100:1.
Claim 12
Dependent Claim 29 words
The display according to claim 1 wherein said microstructures of said electrode comprise an organic material comprising planar molecules and chains or rings over which π-electron density is delocalized.
Claim 13
Dependent Claim 26 words
The display according to claim 1 wherein said microstructures comprise an organic material selected from the group consisting of polynuclear aromatic hydrocarbons and heterocyclic aromatic compounds.
Claim 14
Dependent Claim 25 words
The display according to claim 12 wherein said polynuclear aromatic hydrocarbons are selected from the group consisting of naphthalenes, phenanthrenes, perylenes, anthracenes, coronenes, and pyrenes.
Claim 15
Dependent Claim 24 words
The display according to claim 12 wherein said heterocyclic aromatic compounds are selected from the group consisting of phthalocyanines, porphyrins, carbazoles, purines, and pterins.
Claim 16
Dependent Claim 12 words
The display according to claim 11 wherein said organic material is N,N'-di(3,5-xylyl)perylene-3,4,9,10-bis(dicarboximide).
Claim 17
Dependent Claim 52 words
The display according to claim 1 wherein said microstructures are semiconductors made from a material selected from the group consisting of diamond, germanium, selenium, arsenic, silicon, tellurium, gallium arsenide, gallium antimonide, gallium phosphide, aluminum antimonide, indium antimonide, indium tin oxide, zinc antimonide, indium phosphide, aluminum gallium arsenide, zinc telluride, and combinations thereof.
Claim 18
Dependent Claim 16 words
The display according to claim 1 wherein said microstructures of said electrode comprise a polymeric material.
Claim 19
Dependent Claim 22 words
The display according to claim 1 wherein said microstructures of said electrode form at least one of a repeating or nonrepeating pattern.
Claim 20
Dependent Claim 21 words
The display according to claim 1 wherein said microstructures are uniformly oriented and are perpendicular to said surface of said substrate.
Claim 21
Dependent Claim 11 words
The display according to claim 1 wherein said microstructures are patterned.
Claim 22
Dependent Claim 32 words
The display according to claim 20 which is patterned by means selected from the group consisting of radiation ablation, photolithography, mechanical process, vacuum process, chemical process, and gas pressure or fluid process.
Claim 23
Dependent Claim 32 words
The display according to claim 1 wherein said conformal coating of said microstructures of said electrode comprises a material selected from the group consisting of an organic material and an inorganic material.
Claim 24
Dependent Claim 34 words
The display according to claim 22 wherein said inorganic material is selected from the group consisting of metals, carbon, metal oxides, metal sulfides, metal chlorides, metal carbides, metal borides, metal nitrides, and metal silicides.
Claim 25
Dependent Claim 13 words
The display according to claim 23 wherein said inorganic material is diamond-like carbon.
Claim 26
Dependent Claim 13 words
The display according to claim 23 wherein said inorganic material is a metal.
Claim 27
Dependent Claim 16 words
The display according to claim 22 wherein said inorganic conformal coating is a vacuum gettering material.
Claim 28
Dependent Claim 27 words
The display according to claim 1 wherein said overcoated microstructures have low electronic work functions in the range of greater than zero and up to 6 eV.
Claim 29
Dependent Claim 20 words
The display according to claim 1 wherein said substrate is selected from the group consisting of organic and inorganic materials.
Claim 30
Dependent Claim 13 words
The display according to claim 28 wherein said organic material is a polymer.
Claim 31
Dependent Claim 21 words
The display according to claim 28 wherein said substrate is selected from the group consisting of glasses, ceramics, metals, and semi-conductors.
Claim 32
Dependent Claim 13 words
The display according to claim 30 wherein said substrate is glass or metal.
Claim 33
Independent Claim 93 words
A method of preparing an electrode for a field emission display comprising the steps of: providing a substrate bearing on one or more surfaces thereof a microlayer comprising a dense array of discrete, solid microstructures, said microstructures having an areal number density of greater than 10 7 /cm 2 , and individually conformally overcoating at least a portion of said microstructures with one or more electron emissive materials in an amount in the range of 10 to 1000 nm planar equivalent thickness, said overcoating layer having a surface morphology that is nanoscopically rough.
Claim 34
Independent Claim 93 words
A method of preparing an electrode for a field emission display comprising the steps of: providing a substrate bearing on one or more surfaces thereof a microlayer comprising a dense array of discrete, solid microstructures, said microstructures having an areal number density of greater than 10 7 /cm 2 , and individually conformally overcoating at least a portion of said microstructures with one or more electron emissive materials in an amount in the range of 10 to 1000 nm planar equivalent thickness, said overcoating layer having a surface morphology that is nanoscopically rough.
Claim 35
Dependent Claim 31 words
The method according to claim 32 further comprising the step of conditioning the electrode by subjecting it to elevated pressure for a time sufficient to produce a uniform electron emitting surface.
Claim 36
Dependent Claim 104 words
An electric field producing structure comprises first and second conductive electrodes insulatingly spaced from and substantially parallel to each other, the first conductive electrode comprising a layer having a dense array of discrete solid microstructures disposed on at least a portion of one or more surfaces of a substrate, the microstructures having an areal number density of greater than 10 7 /cm 2 , the microstructures individually being conformally overcoated with one or more nanolayers of an electron emitting material, the overcoated electron emitting material being disposed on at least a portion of the microstructures and having a surface morphology that is nanoscopically rough.
Claim 37
Dependent Claim 104 words
An electric field producing structure comprises first and second conductive electrodes insulatingly spaced from and substantially parallel to each other, the first conductive electrode comprising a layer having a dense array of discrete solid microstructures disposed on at least a portion of one or more surfaces of a substrate, the microstructures having an areal number density of greater than 10 7 /cm 2 , the microstructures individually being conformally overcoated with one or more nanolayers of an electron emitting material, the overcoated electron emitting material being disposed on at least a portion of the microstructures and having a surface morphology that is nanoscopically rough.
Claim 38
Dependent Claim 16 words
The electric field producing structure according to claim 34 which is useful in a microwave device.

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3.5 Years (Year 4) 2001-03-09 2001-09-08 2002-03-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2005-03-09 2005-09-08 2006-03-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2009-03-09 2009-09-08 2010-03-10 $7700.00 Window Closed / Lapsed

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