Bonding pad structures for semiconductor integrated circuits

Claim 2

A bonding pad structure for receiving and electrically connecting an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer having a substantially uniform, predetermined thickness; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer said soft metal conductive layer having a relative thickness at least 1.5 times greater than the predetermined thickness of said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 3

The bonding pad structure of claim 1, wherein said soft metal conductive layer comprises an aluminum film having a thickness ranging from approximately 5000 to 15,000 Angstroms; and wherein said hard metal conductive layer has a thickness ranging from approximately 100 to 3000 Angstroms.

Claim 4

The bonding pad structure of claim 1, wherein said soft metal conductive layer comprises an aluminum film.

Claim 5

The bonding pad structure of claim 1, wherein said soft metal conductive layer comprises an aluminum alloy film.

Claim 6

The bonding pad structure of claim 1, wherein said hard metal layer comprises a refractory film selected from the group consisting of Mo, W, Cu, Ti, Ta, Pt, MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN.

Claim 7

A bonding pad structure for receiving and electrically connecting an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer comprising: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 8

A bonding pad structure for receiving and electrically connecting an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer comprising: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 9

The bonding pad structure of claim 2, wherein said hard metal layer comprises: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN.

Claim 10

A bonding pad structure for receiving and electrically connecting an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; a second soft metal conductive layer contiguously interposing said hard metal conductive layer and said first insulating layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 11

A bonding pad structure for receiving and electrically connecting an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; a second soft metal conductive layer contiguously interposing said hard metal conductive layer and said first insulating layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 12

The bonding pad structure of claim 8, wherein said second soft metal conductive layer has a thickness ranging approximately from 1000 to 8000 Angstroms; wherein said hard metal conductive layer has a thickness ranging approximately from 100 to 3000 Angstroms; and wherein said first soft metal conductive layer has a thickness ranging approximately from 4000 to 12,000 Angstroms.

Claim 13

A bonding pad structure for sequentially receiving and electrically connecting a test probe and an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer having a substantially uniform, predetermined thickness; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer, said soft metal conductive layer having a relative thickness at least 1.5 times greater than the predetermined thickness of said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving one of the test probe and the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when the test probe has previously damaged said soft metal conductive layer during testing.

Claim 14

A bonding pad structure for sequentially receiving and electrically connecting a test probe and an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer having a substantially uniform, predetermined thickness; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer, said soft metal conductive layer having a relative thickness at least 1.5 times greater than the predetermined thickness of said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving one of the test probe and the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when the test probe has previously damaged said soft metal conductive layer during testing.

Claim 15

The bonding pad structure of claim 10, wherein said soft metal conductive layer comprises an aluminum film having a thickness ranging from approximately 5000 to 15,000 Angstroms; and wherein said hard metal conductive layer has a thickness ranging from approximately 100 to 3000 Angstroms.

Claim 16

The bonding pad structure of claim 10, wherein said soft metal conductive layer comprises an aluminum film.

Claim 17

The bonding pad structure of claim 10, wherein said soft metal conductive layer comprises an aluminum alloy film.

Claim 18

The bonding pad structure of claim 10, wherein said hard metal layer comprises a refractory film selected from the group consisting of Mo, W, Cu, Ti, Ta, Pt, MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN.

Claim 19

A bonding pad structure for sequentially receiving and electrically connecting a test probe and an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer comprising: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving one of the test probe and the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when the test probe has previously damaged said soft metal conductive layer during testing.

Claim 20

A bonding pad structure for sequentially receiving and electrically connecting a test probe and an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area, said hard metal layer comprising: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving one of the test probe and the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when the test probe has previously damaged said soft metal conductive layer during testing.

Claim 21

The bonding pad structure of claim 11, wherein said hard metal layer comprises: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN.

Claim 22

A bonding pad structure for sequentially receiving and electrically connecting a test probe and an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; a second soft metal conductive layer contiguously interposing said hard metal conductive layer and said first insulating layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving one of the test probe and the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when the test probe has previously damaged said soft metal conductive layer during testing.

Claim 23

A bonding pad structure for sequentially receiving and electrically connecting a test probe and an external bonding conductor to a contact area of a circuit element formed on a substrate of a semiconductor integrated circuit, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding the circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to the circuit element contact area; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to the circuit element contact area via said hard metal conductive layer; a second soft metal conductive layer contiguously interposing said hard metal conductive layer and said first insulating layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving one of the test probe and the external bonding conductor, wherein the external bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects with the circuit element contact area even when the test probe has previously damaged said soft metal conductive layer during testing.

Claim 24

The bonding pad structure of claim 17, wherein said second soft metal conductive layer has a thickness ranging approximately from 1000 to 8000 Angstroms; wherein said hard metal conductive layer has a thickness ranging approximately from 100 to 3000 Angstroms; and wherein said first soft metal conductive layer has a thickness ranging approximately from 4000 to 12,000 Angstroms.

Claim 25

A semiconductor, comprising: a substrate; a circuit element formed on said substrate, said circuit element including an electrical contact area disposed on an upper surface thereof; a bonding conductor; and a bonding pad structure receiving said bonding conductor and electrically connecting said bonding conductor to said circuit element contact area, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding said circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to said circuit element contact area, said hard metal layer having a substantially uniform, predetermined thickness; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to said circuit element contact area via said hard metal conductive layer, said soft metal conductive layer having a relative thickness at least 1.5 times greater than the predetermined thickness of said hard metal conductive layer, and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving said bonding conductor, wherein said bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects to said circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 26

A semiconductor, comprising: a substrate; a circuit element formed on said substrate, said circuit element including an electrical contact area disposed on an upper surface thereof; a bonding conductor; and a bonding pad structure receiving said bonding conductor and electrically connecting said bonding conductor to said circuit element contact area, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding said circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to said circuit element contact area, said hard metal layer having a substantially uniform, predetermined thickness; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to said circuit element contact area via said hard metal conductive layer, said soft metal conductive layer having a relative thickness at least 1.5 times greater than the predetermined thickness of said hard metal conductive layer, and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving said bonding conductor, wherein said bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects to said circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 27

The semiconductor of claim 19, wherein said soft metal conductive layer comprises an aluminum film having a thickness ranging from approximately 5000 to 15,000 Angstroms; and wherein said hard metal conductive layer has a thickness ranging from approximately 100 to 3000 Angstroms.

Claim 28

The semiconductor of claim 19, wherein said soft metal conductive layer comprises an aluminum film.

Claim 29

The semiconductor of claim 19, wherein said soft metal conductive layer comprises an aluminum alloy film.

Claim 30

The semiconductor of claim 19, wherein said hard metal layer comprises a refractory film selected from the group consisting of Mo, W, Cu, Ti, Ta, Pt, MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN.

Claim 31

A semiconductor, comprising: a substrate; a circuit element formed on said substrate, said circuit element including an electrical contact area disposed on an upper surface thereof; a bonding conductor; and a bonding pad structure receiving said bonding conductor and electrically connecting said bonding conductor to said circuit element contact area, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding said circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to said circuit element contact area, said hard metal layer comprising: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TIN; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to said circuit element contact area via said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving said bonding conductor, wherein said bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects to said circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 32

A semiconductor, comprising: a substrate; a circuit element formed on said substrate, said circuit element including an electrical contact area disposed on an upper surface thereof; a bonding conductor; and a bonding pad structure receiving said bonding conductor and electrically connecting said bonding conductor to said circuit element contact area, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding said circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to said circuit element contact area, said hard metal layer comprising: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TIN; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to said circuit element contact area via said hard metal conductive layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving said bonding conductor, wherein said bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects to said circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 33

The bonding pad structure of claim 20, wherein said hard metal layer comprises: a refractory metal film selected from the group consisting of Mo, W, Cu, Ti, Ta, and Pt; and a refractory metal compound film selected from the group consisting of MoSi 2 , WSi 2 , CuSi, TiSi, PtSi, and TiN.

Claim 34

A semiconductor, comprising: a substrate; a circuit element formed on said substrate, said circuit element including an electrical contact area disposed on an upper surface thereof; a bonding conductor; and a bonding pad structure receiving said bonding conductor and electrically connecting said bonding conductor to said circuit element contact area, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding said circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to said circuit element contact area; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to said circuit element contact area via said hard metal conductive layer; a second soft metal conductive layer contiguously interposing said hard metal conductive layer and said first insulating layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving said bonding conductor, wherein said bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects to said circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 35

A semiconductor, comprising: a substrate; a circuit element formed on said substrate, said circuit element including an electrical contact area disposed on an upper surface thereof; a bonding conductor; and a bonding pad structure receiving said bonding conductor and electrically connecting said bonding conductor to said circuit element contact area, comprising: a first insulating layer patterned over the semiconductor integrated circuit substrate surrounding said circuit element contact area; a hard metal conductive layer formed directly on said first insulating layer and electrically connected to said circuit element contact area; a soft metal conductive layer formed on and extending contiguously with said hard metal conductive layer and electrically connected to said circuit element contact area via said hard metal conductive layer; a second soft metal conductive layer contiguously interposing said hard metal conductive layer and said first insulating layer; and a second insulating layer patterned over said soft metal conductive layer, said second insulating layer defining an opening terminating at an upper surface of said soft metal conductive layer for receiving said bonding conductor, wherein said bonding conductor directly bonds to at least one of said hard metal and soft metal conductive layers and electrically connects to said circuit element contact area even when said soft metal conductive layer has been deformed during testing.

Claim 36

The semiconductor of claim 26, wherein said second soft metal conductive layer has a thickness ranging approximately from 1000 to 8000 Angstroms; wherein said hard metal conductive layer has a thickness ranging approximately from 100 to 3000 Angstroms; and wherein said first soft metal conductive layer has a thickness ranging approximately from 4000 to 12,000 Angsrtoms.