Microstructures and single mask, single-crystal process for fabrication thereof

Claim 2

A reactive ion etching process for fabricating high aspect ratio single crystal microelectromechanical structures independently of crystal structure, comprising: forming a mask layer on a top surface of a single crystal substrate; producing in said mask layer a mask pattern for a structure of arbitrary shape to be formed in said substrate, said shape being independent of crystal orientation in said substrate and including at least a beam portion to be released; etching said substrate through said mask pattern to produce a corresponding continuous trench in said substrate to form an island having said arbitrary shape and to separate said island from a mesa surrounding said island, said island having a top surface covered by said mask layer and having substantially vertical side walls, said trench completely surrounding said island and having a floor between a base portion of said island side walls and a base portion of said mesa; forming a protective layer on said mask layer, on said vertical side walls, and on said floor; exposing said substrate at said trench floor by removing said floor protective layer while leaving said protective layer substantially intact on said island side walls; further etching said exposed substrate to completely undercut a part of said island at said base portion of said vertical side walls to release at least a portion of said island to form a released beam portion movable with respect to said substrate, to partially undercut the remainder of said island to produce an island undercut region, and to partially undercut said mesa to produce a mesa undercut region, and; thereafter coating said island, said mesa, and said trench floor with an electrically conductive layer, said island undercut region and said mesa undercut region interrupting said conductive layer to electrically isolate the conductive coating on said island from the electrical coating on said mesa.

Claim 3

The process of claim 1, further including reducing a lateral spring constant of a released beam portion of said structure.

Claim 4

The process of claim 2, wherein the step of reducing a lateral spring constant includes removing said conductive layer and said sidewall protective layer from a selected portion of the sidewall of a beam.

Claim 5

The process of claim 1, further including increasing the mass of a selected released beam portion.

Claim 6

The process of claim 4, wherein the steps of increasing the mass of a selected released beam portion includes defining the shape of a segment of said beam portion to have increased dimensions.

Claim 7

The process of claim 5, wherein the step of increasing the mass of a selected released beam portion includes depositing a blanket of metal on said portion of increased dimensions.

Claim 8

The process of claim 1, wherein producing a mask pattern for a structure of arbitrary shape includes defining a beam portion, an interconnect portion and a contact pad portion for said structure wherein said etching and said further etching include producing an island having a released beam mechanically supported by said interconnect portion for motion with respect to said substrate and wherein said coating includes electrically interconnecting said beam to said contact pad portion.

Claim 9

The process of claim 7, further including electrically connecting said conductive layer on said contact pad portion to an electrical circuit element.

Claim 10

The process of claim 1, wherein forming a mask layer on a substrate includes providing a substrate wafer containing electrical components including at least a contact pad and covered by a passivation layer and treating said passivation layer on said wafer in a region adjacent said electrical components to produce a dielectric mask layer.

Claim 11

The method of claim 9, further including, before coating said island and mesa with a conductive layer, the step of opening a via window through said mask layer to said contact pad, whereby said conductive layer contacts said contact pad.

Claim 12

The method of claim 10, further including patterning and etching said conductive layer.

Claim 13

The method of claim 1, wherein producing said mask pattern includes defining a beam portion including a grid having axial arms, whereby said released beam portion incorporates a grid.

Claim 14

The method of claim 12, wherein the step of coating includes applying a conductive coating to a portion of said trench floor adjacent said released beam portion grid to provide capacitive coupling to said beam grid for producing torsional motion thereof.

Claim 15

The method of claim 13, further including depositing a blanket of material on said released beam portion grid.

Claim 16

The method of claim 13, further including depositing a blanket of tungsten on said released beam portion grid.

Claim 17

The method of claim 1, wherein producing said mask pattern includes defining an electrode adjacent said released beam portion; wherein etching said substrate through said mask pattern produces an electrode island completely surrounded by said continuous trench and having substantially vertical side walls adjacent but spaced from said released beam portion, and wherein coating includes providing electrically conductive layers on said vertical side walls of said released beam portion and of said adjacent electrode island to provide captive coupling therebetween.

Claim 18

The method of claim 16, wherein producing said mask pattern includes defining contact pad means and defining connector means in said substrate for interconnecting said released beam portion and said electrode island to corresponding contact pad means.

Claim 19

The process of claim 17, wherein said further etching includes partially undercutting said electrode island, contact pad means and connector means to provide undercut portions thereon, and wherein said coating includes providing electrically conductive layers on said electrode island, contact pad means and connector means, said undercut portions providing electrical isolation from the conductive layer on said mesa.

Claim 20

The process of claim 18, further including deepening said trenches prior to releasing said beam, the depending and releasing steps producing an enlarged trench in said substrate to reduce electric current leakage.

Claim 21

The process of claim 1, wherein said further etching includes isotrophically etching said exposed substrate in a high pressure, low pressure reactive ion etch to undercut said island and said mesa.

Claim 22

The process of claim 1, wherein coating with an electrically conductive layer includes depositing metal.

Claim 23

The process of claim 1, wherein said further etching includes etching at least a part of said beam portion within said side wall protective layer to reduce the size of said beam portion and etching behind the side wall protective layer on said mesa vertical walls to produce extended leakage paths.

Claim 24

The process of claim 22 wherein said further etching includes etching through said substrate to produce an aperture therethrough.

Claim 25

A single-mask, low temperature process for fabricating high aspect ratio released microelectromechanical structures comprising: forming mask dielectric mask layer on a substantially horizontal top surface of an etchable substrate; patterning producing in said mask layer to produce a single dielectric mask pattern defining a structure of arbitrary shape to be formed in said substate and including at least a of crystal orientation in said substrate and including at least a beam portion to be released for movement with respect to said substrates; etching said substrate through said dielectric mask pattern to produce a corresponding continuous trench having substantially vertical side walls and a substantially horizontal floor in said substrate to thereby produce said structure of arbitrary shape in said substrate, said structure being completely surrounded by said trench, having a top surface covered by said mask layer, and having vertical side walls produced by said trench, and said substrate having vertical side walls spaced from said structure by said trench; forming a second dielectric layer on said walls, on the floor of said trench, and on said dielectric mask layer; removing said second dielectric layer from the dielectric mask layer and from the floor of said trench to expose the substrate at said floor while leaving said dielectric mask layer and said side wall dielectric layers substantially intact; releasing at least said beam portion of said structure by etching said exposed substrate at the floor of said trench, the etching completely undercutting said beam portion to free it for motion with respect to said substrate and partially undercutting said structure and said substrate side walls; and thereafter coating said structure and said substrate with a metal an electrically conductive layer, the metal conductive layer on said structure being electrically isolated from the metal conductive layer on the substrate by said trench and by said undercutting of said structure and said substrate side walls.

Claim 26

A single-mask, low temperature process for fabricating high aspect ratio released microelectromechanical structures comprising: forming mask dielectric mask layer on a substantially horizontal top surface of an etchable substrate; patterning producing in said mask layer to produce a single dielectric mask pattern defining a structure of arbitrary shape to be formed in said substate and including at least a of crystal orientation in said substrate and including at least a beam portion to be released for movement with respect to said substrates; etching said substrate through said dielectric mask pattern to produce a corresponding continuous trench having substantially vertical side walls and a substantially horizontal floor in said substrate to thereby produce said structure of arbitrary shape in said substrate, said structure being completely surrounded by said trench, having a top surface covered by said mask layer, and having vertical side walls produced by said trench, and said substrate having vertical side walls spaced from said structure by said trench; forming a second dielectric layer on said walls, on the floor of said trench, and on said dielectric mask layer; removing said second dielectric layer from the dielectric mask layer and from the floor of said trench to expose the substrate at said floor while leaving said dielectric mask layer and said side wall dielectric layers substantially intact; releasing at least said beam portion of said structure by etching said exposed substrate at the floor of said trench, the etching completely undercutting said beam portion to free it for motion with respect to said substrate and partially undercutting said structure and said substrate side walls; and thereafter coating said structure and said substrate with a metal an electrically conductive layer, the metal conductive layer on said structure being electrically isolated from the metal conductive layer on the substrate by said trench and by said undercutting of said structure and said substrate side walls.

Claim 27

The process of claim 24, wherein the step of forming a layer on an etchable substrate includes forming an oxide mask on a silicon substrate.

Claim 28

The process of claim 24, further including the step of etching the floor of said trench to expose substrate beneath said sidewall dielectric layer prior to releasing said beam portion.

Claim 29

The process of claim 24, wherein the step of coating includes depositing a layer of metal on at least said mask layer and said side wall dielectric layer.

Claim 30

The process of claim 24, wherein the step of forming a mask layer on an etchable substrate includes depositing an oxide layer on a single crystal silicon substrate.

Claim 31

The process of claim 24, further including depositing a further layer on at least a part of said released beam structure to increase its mass.

Claim 32

The process of claim 24, wherein the step of patterning said mask layer further includes producing a pattern defining a structure of arbitrary shape having at least a beam portion, an electrical contact pad portion, and an interconnect therebetween.

Claim 33

The process of claim 30, further including selectively electrically connecting said conductive layer on said contact pad portion to said conductive layer on said substrate.