US5695569A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Removal of metal contamination
Assignee: Texas Instruments Inc
•
Filing: 1994-02-04
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Granted: 1997-12-09
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Expires: 2014-02-04
Abstract
Abstract Generally, and in one form of the invention, a method is presented for the photo-stimulated removal of reacted metal contamination 16 from a surface 11, comprising the steps of: covering the surface with a liquid ambient 14; exciting the reacted metal contamination 16 and/or the liquid ambient 14 by photo-stimulation sufficiently to allow reaction of the reacted metal contaminantion 16 with the liquid ambient 14 to form metal products; and removing the liquid ambient 14 and the metal products from the surface 11. Other methods are also disclosed.
Inventors
- 👤 Monte A. Douglas
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:11
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; B; B08; B08B; B08B7/00; B08B7/0035; B08B7/0057; C; C23; C23F; C23F4/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
102 words
A method for the removal of metal contamination from a first surface of a semiconductor comprising the steps of: a. covering said first surface of said semiconductor with a liquid ambient; b. applying a bias to a second surface of said semiconductor wherein said bias is provided by a source external to said liquid ambient, said second surface being opposite said first surface to create a layer of charge on said first surface to allow reaction of said metal contamination with said liquid ambient to form metal products; and c. removing said liquid ambient and said metal products from said first surface.
Claim 2
Independent Claim
102 words
A method for the removal of metal contamination from a first surface of a semiconductor comprising the steps of: a. covering said first surface of said semiconductor with a liquid ambient; b. applying a bias to a second surface of said semiconductor wherein said bias is provided by a source external to said liquid ambient, said second surface being opposite said first surface to create a layer of charge on said first surface to allow reaction of said metal contamination with said liquid ambient to form metal products; and c. removing said liquid ambient and said metal products from said first surface.
Claim 3
Dependent Claim
20 words
The method of claim 1 further comprising the step of exciting said metal contamination and/or said liquid ambient by photo-stimulation.
Claim 4
Dependent Claim
15 words
The method of claim 2 wherein said excitation is provided by a Hg/Xe arc lamp.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein said covering step comprises condensing a vapor phase ambient species on said first surface.
Claim 6
Dependent Claim
17 words
The method of claim 1 further comprising causing said deionized water to flow over said first surface.
Claim 7
Dependent Claim
11 words
The method of claim 1 further comprising agitating said deionized water.
Claim 8
Dependent Claim
17 words
The method of claim 1 further comprising the step of drying said first surface with nitrogen gas.
Claim 9
Dependent Claim
16 words
The method of claim 1 further comprising the step of rinsing said first surface with water.
Claim 10
Dependent Claim
11 words
The method of claim 1, wherein said liquid ambient is water.
Claim 11
Independent Claim
45 words
A method for the photo-stimulated removal of metal contamination from a semiconductor surface, comprising the steps of: covering said semiconductor surface with a liquid ambient; irradiating said semiconductor surface and said liquid ambient with ultraviolet light; and removing said liquid ambient from said semiconductor surface.
Claim 12
Independent Claim
45 words
A method for the photo-stimulated removal of metal contamination from a semiconductor surface, comprising the steps of: covering said semiconductor surface with a liquid ambient; irradiating said semiconductor surface and said liquid ambient with ultraviolet light; and removing said liquid ambient from said semiconductor surface.
Claim 13
Dependent Claim
17 words
The method of claim 10 further comprising the step of drying said semiconductor surface with nitrogen gas.
Claim 14
Dependent Claim
16 words
The method of claim 10 further comprising the step of rinsing said semiconductor surface with water.
Claim 15
Dependent Claim
17 words
The method of claim 12 further comprising the step of drying said semiconductor surface with nitrogen gas.
Claim 16
Dependent Claim
16 words
The method of claim 10 further comprising causing said liquid ambient to flow over said surface.
Claim 17
Dependent Claim
11 words
The method of claim 10 further comprising agitating said liquid ambient.
Claim 18
Dependent Claim
16 words
The method of claim 10 wherein said irradiating step is provided by a Hg/Xe arc lamp.
Claim 19
Dependent Claim
12 words
The method of claim 10, wherein said metal contamination comprises trace metal.
Claim 20
Dependent Claim
12 words
The method of claim 10, wherein said metal contamination comprises reacted metal.
Claim 21
Dependent Claim
12 words
The method of claim 10 wherein said liquid ambient is deionized water.
Claim 22
Independent Claim
65 words
A method for the photo-stimulated removal of metal contamination from a surface of a semiconductor, comprising the steps of: placing said semiconductor into a vacuum environment; lowering a temperature of said semiconductor surface to the dew point; introducing a water vapor into said vacuum environment; irradiating said semiconductor surface and any condensed water with visible and/or ultraviolet light; and returning said environment to a vacuum.
Claim 23
Independent Claim
65 words
A method for the photo-stimulated removal of metal contamination from a surface of a semiconductor, comprising the steps of: placing said semiconductor into a vacuum environment; lowering a temperature of said semiconductor surface to the dew point; introducing a water vapor into said vacuum environment; irradiating said semiconductor surface and any condensed water with visible and/or ultraviolet light; and returning said environment to a vacuum.
Claim 24
Dependent Claim
17 words
The method of claim 20 further comprising the step of drying said semiconductor surface with nitrogen gas.
Claim 25
Dependent Claim
16 words
The method of claim 20 further comprising the step of rinsing said semiconductor surface with water.
Claim 26
Dependent Claim
17 words
The method of claim 22 further comprising the step of drying said semiconductor surface with nitrogen gas.
Claim 27
Dependent Claim
16 words
The method of claim 20 wherein said irradiating step is provided by a Hg/Xe arc lamp.
Claim 28
Dependent Claim
12 words
The method of claim 20, wherein said metal contamination comprises trace metal.
Claim 29
Dependent Claim
12 words
The method of claim 20, wherein said metal contamination comprises reacted metal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-08 | 2001-06-09 | 2001-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-08 | 2005-06-09 | 2005-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-08 | 2009-06-09 | 2009-12-09 | $7700.00 | Window Closed / Lapsed |