US5677237A — Process for removing seams in tungsten plugs

Claim 1

Independent Claim 329 words

A method for fabricating a MOSFET device, on a semiconductor substrate, using a tungsten filled contact hole, to provide electrical contact between an underlying conductive region, in said semiconductor substrate, and an overlying interconnect metallization structure, comprising the steps of: providing said underlying conductive region, comprised of a source and drain region in said semiconductor substrate; depositing a dielectric layer on said semiconductor substrate, including deposition on said source and drain region; applying a photoresist layer; photolithographically processing to create an opening in said photoresist layer, exposing said dielectric layer, directly over a portion of said source and drain region: anisotropically etching said dielectric layer, in said opening in said photoresist layer, to create a contact hole to said source and drain region; removing said photoresist layer; surface cleaning said source and drain region; depositing an adhesive layer on a top surface said dielectric layer, on sides of said contact hole, and on said source and drain region; depositing a barrier layer on said adhesive layer; depositing a first metal layer, on said barrier layer, filling said contact hole; removing said first metal layer, removing said barrier layer, and removing said adhesive layer, from said top surface of said dielectric layer, forming a metal plug of said first metal layer, of said barrier layer, and of said adhesive layer, in said contact hole; surface cleaning said metal plug; selectively depositing a second metal layer, comprised of the same type as said first metal layer, only on the surface of said metal plug, in said contact hole, including the selective deposition, of said second metal layer, filling any voids that may exist in said metal plug after said first metal layer, said barrier layer and said adhesive layer have been removed from said top surface of said dielectric layer; depositing a interconnect metallization layer on said dielectric layer, and on said second metal layer, in said contact hole; and patterning said interconnect metallization layer, to form a metal interconnect structure.

Claim 2

Independent Claim 329 words

A method for fabricating a MOSFET device, on a semiconductor substrate, using a tungsten filled contact hole, to provide electrical contact between an underlying conductive region, in said semiconductor substrate, and an overlying interconnect metallization structure, comprising the steps of: providing said underlying conductive region, comprised of a source and drain region in said semiconductor substrate; depositing a dielectric layer on said semiconductor substrate, including deposition on said source and drain region; applying a photoresist layer; photolithographically processing to create an opening in said photoresist layer, exposing said dielectric layer, directly over a portion of said source and drain region: anisotropically etching said dielectric layer, in said opening in said photoresist layer, to create a contact hole to said source and drain region; removing said photoresist layer; surface cleaning said source and drain region; depositing an adhesive layer on a top surface said dielectric layer, on sides of said contact hole, and on said source and drain region; depositing a barrier layer on said adhesive layer; depositing a first metal layer, on said barrier layer, filling said contact hole; removing said first metal layer, removing said barrier layer, and removing said adhesive layer, from said top surface of said dielectric layer, forming a metal plug of said first metal layer, of said barrier layer, and of said adhesive layer, in said contact hole; surface cleaning said metal plug; selectively depositing a second metal layer, comprised of the same type as said first metal layer, only on the surface of said metal plug, in said contact hole, including the selective deposition, of said second metal layer, filling any voids that may exist in said metal plug after said first metal layer, said barrier layer and said adhesive layer have been removed from said top surface of said dielectric layer; depositing a interconnect metallization layer on said dielectric layer, and on said second metal layer, in said contact hole; and patterning said interconnect metallization layer, to form a metal interconnect structure.

Claim 3

Dependent Claim 29 words

The method of claim 1, wherein said underlying conductive region, in said semiconductor substrate, can be an N type, heavily doped source and drain region, of a MOSFET device.

Claim 4

Dependent Claim 20 words

The method of claim 1, wherein said underlying conductive region, in said semiconductor substrate, can be a metal interconnect structure.

Claim 5

Dependent Claim 37 words

The method of claim 1, wherein said dielectric layer is silicon oxide, deposited using LPCVD or PECVD processing, at a temperature between about 500° to 800° C., to a thickness between about 3000 to 8000 Å Angstroms.

Claim 6

Dependent Claim 46 words

The method of claim 1, wherein said contact hole is formed via anisotropic, RIE processing, using CHF 3 as an etchant, with said contact hole having an opening with a diameter between about 0.3 to 0.7 μM, resulting in aspect ratios between about 1 to 3.

Claim 7

Dependent Claim 25 words

The method of claim 1, wherein said adhesive layer is titanium, deposited using r.f. sputtering, to a thickness between about 200 to 500 Å Agstroms.

Claim 8

Dependent Claim 26 words

The method of claim 1, wherein said barrier layer is titanium nitride, deposited using r.f. sputtering, to a thickness between about 500 to 1000 Å Angstroms.

Claim 9

Dependent Claim 35 words

The method of claim 1, wherein said first metal layer is tungsten, deposited using LPCVD processing, at a temperature between about 400° to 500° C., to a thickness between about 4000 to 10000 Å Angstroms.

Claim 10

Dependent Claim 69 words

The method of claim 1, wherein removal of said first metal layer, said barrier layer, and said adhesive layer, from said top surface of said dielectric layer, forming said metal plug, in said contact hole, is performed using RIE processing, using SF 6 --Ar--O 2 as an etchant for said first metal layer, and Cl 2 --BCl 3 as an etchant for said barrier layer and said adhesive layer.

Claim 11

Dependent Claim 30 words

The method of claim 1, wherein said surface cleaning of said metal plug is performed using a buffered hydrofluoric acid solution, at a temperature between about 20° to 25° C.

Claim 12

Dependent Claim 69 words

The method of claim 1, wherein said second metal layer is tungsten, deposited selectively on the surface of said metal plug, via LPCVD processing, at a temperature between about 280° to 400° C., to a thickness between about 500 to 1000 Å Angstroms, using a cold wall apparatus with a tungsten hexafluoride flow between about 0.05 to 0.15 liters/min., and a hydrogen flow between about 1 to 3 liters/min.

Claim 13

Dependent Claim 61 words

The method of claim 1, wherein said second metal layer is tungsten, deposited selectively on said surface of said metal plug, via LPCVD processing, at a temperature between about 300° to 400° C., to a thickness between about 500 to 1000 Å Angstroms, using a hot wall apparatus with an ambient flow ratio of hydrogen to tungsten hexafluoride, of about 100.

Claim 14

Dependent Claim 33 words

The method of claim 1, wherein said interconnect metallization layer is aluminum, containing between about 0.5 to 3% copper, deposited using r.f. sputtering, to a thickness between about 4000 to 6000 Å Angstroms.

Claim 15

Independent Claim 329 words

A method for fabricating a MOSFET device, on a semiconductor substrate, using two layers of tungsten to fill a contact hole, used to provide electrical contact between an underlying conductive region, in said semiconductor substrate, and an overlying interconnect metallization structure, comprising the steps of: providing said underlying conductive region, comprised of a source and drain region, in said semiconductor substrate; depositing a dielectric layer on said semiconductor substrate, including deposition on said source and drain region; applying a photoresist layer; photolithographically processing to open a region in said photoresist layer, exposing a portion of said dielectric layer, directly over said source and drain region; anisotropically etching said dielectric layer, in said, opened region, in said photoresist layer, to create a contact hole, to said source and drain region: removing said photoresist layer; surface cleaning said source and drain region; depositing a titanium layer on a top surface said dielectric layer, on sides of said contact hole, and on said source and drain region; depositing a titanium nitride layer on said titanium layer; depositing a first tungsten layer, on said barrier layer, filling said contact hole; removing said first tungsten layer, removing said titanium nitride layer, and removing said titanium layer, from said top surface of said dielectric layer, forming a tungsten plug in said contact hole, consisting of said first tungsten layer, of said titanium nitride layer, and of said titanium layer; surface cleaning said tungsten plug; selectively depositing a second tungsten layer only on the surface of said tungsten plug, in said contact hole, including selective deposition of said second tungsten layer, in regions of said tungsten plug where voids may exist after said first tungsten layer, said titanium nitride layer and said titanium layer have been removed from said top surface of said dielectric layer; depositing an interconnect metallization layer on said dielectric layer, and on said second tungsten layer, in said contact hole; and patterning said interconnect metallization layer, to form a metal interconnect structure.

Claim 16

Independent Claim 329 words

A method for fabricating a MOSFET device, on a semiconductor substrate, using two layers of tungsten to fill a contact hole, used to provide electrical contact between an underlying conductive region, in said semiconductor substrate, and an overlying interconnect metallization structure, comprising the steps of: providing said underlying conductive region, comprised of a source and drain region, in said semiconductor substrate; depositing a dielectric layer on said semiconductor substrate, including deposition on said source and drain region; applying a photoresist layer; photolithographically processing to open a region in said photoresist layer, exposing a portion of said dielectric layer, directly over said source and drain region; anisotropically etching said dielectric layer, in said, opened region, in said photoresist layer, to create a contact hole, to said source and drain region: removing said photoresist layer; surface cleaning said source and drain region; depositing a titanium layer on a top surface said dielectric layer, on sides of said contact hole, and on said source and drain region; depositing a titanium nitride layer on said titanium layer; depositing a first tungsten layer, on said barrier layer, filling said contact hole; removing said first tungsten layer, removing said titanium nitride layer, and removing said titanium layer, from said top surface of said dielectric layer, forming a tungsten plug in said contact hole, consisting of said first tungsten layer, of said titanium nitride layer, and of said titanium layer; surface cleaning said tungsten plug; selectively depositing a second tungsten layer only on the surface of said tungsten plug, in said contact hole, including selective deposition of said second tungsten layer, in regions of said tungsten plug where voids may exist after said first tungsten layer, said titanium nitride layer and said titanium layer have been removed from said top surface of said dielectric layer; depositing an interconnect metallization layer on said dielectric layer, and on said second tungsten layer, in said contact hole; and patterning said interconnect metallization layer, to form a metal interconnect structure.

Claim 17

Dependent Claim 29 words

The method of claim 14, wherein said underlying conductive region, in said semiconductor substrate, can be an N type, heavily doped source and drain region, of a MOSFET device.

Claim 18

Dependent Claim 20 words

The method of claim 14, wherein said underlying conductive region, in said semiconductor substrate, can be a metal interconnect structure.

Claim 19

Dependent Claim 38 words

The method of claim 14, wherein said dielectric layer is silicon oxide, deposited using either LPCVD or PECVD processing, at a temperature between about 500° to 800° C., to a thickness between about 3000 to 8000 Å Angstroms.

Claim 20

Dependent Claim 45 words

The method of claim 14, wherein said contact hole is formed via anisotropic, RIE processing, using CHF 3 as an etchant, with said contact hole having a small diameter opening between about 0.3 to 0.7 μM, resulting in aspect ratios between about 1 to 3.

Claim 21

Dependent Claim 24 words

The method of claim 14, wherein said titanium layer is deposited using r.f. sputtering, to a thickness between about 200 to 500 Å Angstroms.

Claim 22

Dependent Claim 24 words

The method of claim 14, wherein said titanium nitride is deposited using r.f. sputtering, to a thickness between about 500 to 1000 Å Angstroms.

Claim 23

Dependent Claim 34 words

The method of claim 14, wherein said first tungsten layer is deposited using LPCVD processing, at a temperature between about 400° to 500° C., to a thickness between about 4000 to 10000 Å Angstroms.

Claim 24

Dependent Claim 76 words

The method of claim 14, wherein removal of said first tungsten layer, of said titanium nitride layer, and of said titanium layer, from said top surface of said dielectric layer, used to form said tungsten plug, in said contact hole, is accomplished using RIE processing, using SF 6 --Ar--O 2 as an etchant for said first tungsten layer, and BCl 3 --Cl 2 as an etchant for said titanium nitride layer, and for said titanium layer.

Claim 25

Dependent Claim 30 words

The method of claim 14, wherein said surface cleaning of said tungsten plug is performed using a buffered hydrofluoric acid solution, at a temperature between about 20° to 25° C.

Claim 26

Dependent Claim 68 words

The method of claim 14, wherein said second tungsten layer is deposited selectively on the surface of said tungsten plug, via LPCVD processing, at a temperature between about 280° to 400° C., to a thickness between about 500 to 1000 Å Angstroms, using a cold wall apparatus with a tungsten hexafluoride flow between about 0.05 to 0.15 liters/min., and a hydrogen flow between about 1 to 3 liters/min.

Claim 27

Dependent Claim 60 words

The method of claim 14, wherein said second tungsten layer is deposited selectively on the surface of said tungsten plug, via LPCVD processing, at a temperature between about 300° to 400° C., to a thickness between about 500 to 1000 Å Angstroms, using a hot wall apparatus with a ambient flow ratio of hydrogen to tungsten hexafluoride, of about 100.

Claim 28

Dependent Claim 33 words

The method of claim 14, wherein said interconnect metallization layer is aluminum, containing between about 0.5 to 3% copper, deposited using r.f. sputtering, to a thickness between about 4000 to 6000 Å Angstroms.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-10-13	2001-04-14	2001-10-14	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-10-13	2005-04-14	2005-10-14	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-10-13	2009-04-14	2009-10-14	$7700.00	Window Closed / Lapsed

Process for removing seams in tungsten plugs

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