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US5672903A Expired / Lapsed US ⏱️ 0.0 years remaining

Uncooled ybacuo thin film infrared detector

Assignee: Research Corp Technologies Inc
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Filing: 1996-02-26
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Granted: 1997-09-30
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Expires: 2016-02-26
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Abstract

Abstract A thermal detector includes a transducer layer of semiconducting yttrium barium copper oxide which is sensitive at room temperature to radiation and provides detection of infrared radiation. In a gate-insulated transistor embodiment, a layer of ferroelectric semiconducting yttrium barium copper oxide forms a gate insulator layer and increases capacitance of the transistor or latches the transistor according to the polarization direction of the ferroelectric layer.

Inventors

  • 👤 Donald P. Butler
  • 👤 Zeynep Celik-Butler
  • 👤 Pao-Chuan Shan

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 11:34
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/12; G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; G01J5/34; H10F30/00; H10F30/10; H10F30/15; H10N; H10N19/00

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 194 words
A pyroelectric detector, comprising: an integral transducer structure for absorbing infrared radiation, comprising (1) an electrically conducting supporting layer having a supporting layer lower surface and a supporting layer upper surface, (2) a semiconducting transducing layer of crystalline or polycrystalline oxide formed from (1) at least one member selected from the group consisting of barium, strontium, and calcium, (2) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (3) copper, and (4) oxygen, having a transducing layer lower surface, a transducing layer upper surface, a resistance of greater than 0.1 Ω-cm at twenty degrees centigrade, a change in dielectric constant with change in temperature of at least 0.2 per degree centigrade at 20 degrees centigrade, and the transducing layer lower surface opposing said supporting layer upper surface, and (3) a first electrode layer having a first electrode layer lower surface, a first electrode layer upper surface, and the first electrode layer lower surface opposing a first region of the supporting layer upper surface across the transducing layer; means, electrically coupled via said first electrode layer, for measuring pyroelectric current generated by changes in temperature of said transducing layer.
Claim 2
Dependent Claim 194 words
A pyroelectric detector, comprising: an integral transducer structure for absorbing infrared radiation, comprising (1) an electrically conducting supporting layer having a supporting layer lower surface and a supporting layer upper surface, (2) a semiconducting transducing layer of crystalline or polycrystalline oxide formed from (1) at least one member selected from the group consisting of barium, strontium, and calcium, (2) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (3) copper, and (4) oxygen, having a transducing layer lower surface, a transducing layer upper surface, a resistance of greater than 0.1 Ω-cm at twenty degrees centigrade, a change in dielectric constant with change in temperature of at least 0.2 per degree centigrade at 20 degrees centigrade, and the transducing layer lower surface opposing said supporting layer upper surface, and (3) a first electrode layer having a first electrode layer lower surface, a first electrode layer upper surface, and the first electrode layer lower surface opposing a first region of the supporting layer upper surface across the transducing layer; means, electrically coupled via said first electrode layer, for measuring pyroelectric current generated by changes in temperature of said transducing layer.
Claim 3
Dependent Claim 36 words
The pyroelectric detector according to claim 1, wherein: a thickness of said integral transducer structure between said supporting layer lower surface and said first electrode layer upper surface is equal to or less than ten microns.
Claim 4
Dependent Claim 103 words
The pyroelectric detector according to claim 1, further comprising: a substrate having a substrate lower surface and a substrate upper surface; means for suspending said integral transducer structure above said substrate upper surface to provide thermal isolation of said integral transducer structure from said substrate; and wherein said means for suspending said integral transducer structure suspends said integral transducer structure so that said supporting layer lower surface opposes said substrate upper surface, said supporting layer lower surface is not in contact with said substrate upper surface, and said supporting layer lower surface is spaced from said substrate upper surface by an air gap.
Claim 5
Dependent Claim 140 words
The pyroelectric detector according to claim 1, further comprising: a substrate having a substrate lower surface and a substrate upper surface; means for suspending said integral transducer structure above said substrate upper surface to provide thermal isolation of said integral transducer structure from said substrate; wherein said means for suspending said integral transducer structure suspends said integral transducer structure so that said supporting layer lower surface opposes said substrate upper surface, said supporting layer lower surface is not in contact with said substrate upper surface, and said supporting layer lower surface is spaced from said substrate upper surface by an air gap; and wherein said means for suspending said integral transducer comprises a pillar having a pillar upper surface, said pillar projecting up from said substrate upper surface so that said pillar upper surface is above said substrate upper surface.
Claim 6
Dependent Claim 30 words
The pyroelectric detector according to claim 1, further comprising chopper means positioned opposing said transducing layer upper surface for alternately blocking said transducing layer upper surface from said infrared radiation.
Claim 7
Dependent Claim 23 words
The pyroelectric detector according to claim 1, wherein said resistivity of said transducing layer is at least one Ω-cm at twenty degrees centigrade.
Claim 8
Dependent Claim 31 words
The pyroelectric detector according to claim 1, wherein said change in dielectric constant with change in temperature of said transducing layer is about 0.27 per degree centigrade at twenty degrees centigrade.
Claim 9
Dependent Claim 24 words
The pyroelectric detector according to claim 1, wherein said resistivity of said transducing layer is between 1.4 and 15 Ω-cm at twenty degrees centigrade.
Claim 10
Dependent Claim 36 words
The pyroelectric detector according to claim 1, wherein said transducing layer has a stoichiometry of yttrium and lanthanum and rare earths to barium and strontium and calcium to copper of substantially 1 to 2 to 3.
Claim 11
Dependent Claim 55 words
The pyroelectric detector according to claim 1, wherein said transducing layer essentially consists of quaternary semiconducting crystalline phases of (1) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (2) at least one member selected from the group consisting of barium, strontium, and calcium, (3) copper, and (4) oxygen.
Claim 12
Dependent Claim 63 words
The pyroelectric detector according to claim 1, wherein at least 80 percent of the volume of said transducing layer consists of semiconducting crystalline quaternary oxide phases of (1) at least one member selected from the group consisting of yttrium, lanthanum, and rare earths, (2) at least one member selected from the group consisting of barium, strontium, and calcium, (3) copper, and (4) oxygen.

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3.5 Years (Year 4) 2000-09-29 2001-03-31 2001-09-30 $2000.00 Window Closed / Lapsed
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