US5369280A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor film bolometer thermal infrared detector
Assignee: Department of Defence
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Filing: 1991-04-24
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Granted: 1994-11-29
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Expires: 2011-04-24
Abstract
Abstract A thermal infrared detector comprising a dielectric pellicle suspended over a cavity in a substrate, the pellicle supporting a detector element comprising a heat sensitive semiconductor layer between a pair of thin fim metallic contracts, these being deposited on the pellicle, the cavity being formed by etching and removal of the substrate material through holes or slots in the surface of the substrate.
Inventors
- 👤 Kevin C. Liddiard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 03:20
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/20; G01J2005/202; G01J2005/204
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
39 words
A thermal infrared detector, comprising: a heat-sensitive semiconductor layer and a plurality of thin film metallic contacts therefor, deposited onto a dielectric pellicle of low thermal conductivity material suspended over a cavity of a supporting substrate for said pellicle.
Claim 2
Dependent Claim
39 words
A thermal infrared detector, comprising: a heat-sensitive semiconductor layer and a plurality of thin film metallic contacts therefor, deposited onto a dielectric pellicle of low thermal conductivity material suspended over a cavity of a supporting substrate for said pellicle.
Claim 3
Dependent Claim
37 words
The thermal infrared detector of claim 1, wherein: said pellicle is supported on a surface of said substrate; said substrate is a monocrystalline silicon wafer; and said cavity is an anisotropically etched cavity opening through said surface.
Claim 4
Dependent Claim
19 words
The thermal infrared detector of claim 1, wherein: said heat-sensitive semiconductor layer is a sputter-deposited layer of semiconductivity silicon.
Claim 5
Dependent Claim
20 words
The thermal infrared detector of claim 1, wherein: said heat-sensitive semiconductor layer is a chemical vapour-deposited layer of semiconducting silicon.
Claim 6
Dependent Claim
41 words
The thermal infrared detector of claim 1, wherein: said thin film metallic contacts are each made of at least one thin layer of a metallic material selected from the group consisting of nickel, nickel-chromium, platinum, platinum silicide, tantalum and tantalum silicide.
Claim 7
Dependent Claim
30 words
The thermal infrared detector of claim 1, wherein: said pellicle is made of an inorganic dielectric material selected from the group consisting of aluminum oxide, silicon nitride, and silicon oxynitride.
Claim 8
Dependent Claim
15 words
The thermal infrared detector of claim 1, wherein: said pellicle is a layer of polyamide.
Claim 9
Dependent Claim
40 words
The thermal infrared detector of claim 1, further including: a signal amplifier, a voltage bias, a sample and hold circuit, and a multiplexing electronic circuit, all operatively associated with one another and with said detector and supported on said substrate.
Claim 10
Dependent Claim
60 words
A two-dimensional array of thermal infrared detectors, each comprising: a heat-sensitive semiconductor layer and a plurality of thin film metallic contacts therefor, deposited onto a dielectric pellicle of low thermal conductivity material suspended over a cavity of a supporting substrate for said pellicle; said substrate for each said detector being a corresponding portion of an integral wafer of substrate material.
Claim 11
Dependent Claim
60 words
A two-dimensional array of thermal infrared detectors, each comprising: a heat-sensitive semiconductor layer and a plurality of thin film metallic contacts therefor, deposited onto a dielectric pellicle of low thermal conductivity material suspended over a cavity of a supporting substrate for said pellicle; said substrate for each said detector being a corresponding portion of an integral wafer of substrate material.
Claim 12
Dependent Claim
42 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein: each said pellicle is supported on a surface of said wafer; said wafer is a monocrystalline silicon wafer; and each said cavity is an anisotropically etched cavity opening through said surface.
Claim 13
Dependent Claim
23 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein: each said heat-sensitive semiconductor layer is a sputter-deposited layer of semiconductivity silicon.
Claim 14
Dependent Claim
24 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein: each said heat-sensitive semiconductor layer is a chemical vapour-deposited layer of semiconducting silicon.
Claim 15
Dependent Claim
45 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein: each said thin film metallic contacts are each made of at least one thin layer of a metallic material selected from the group consisting of nickel, nickel-chromium, platinum, platinum silicide, tantalum and tantalum silicide.
Claim 16
Dependent Claim
34 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein: each said pellicle is made of an inorganic dielectric material selected from the group consisting of aluminum oxide, silicon nitride, and silicon oxynitride.
Claim 17
Dependent Claim
19 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein: each said pellicle is a layer of polyamide.
Claim 18
Dependent Claim
58 words
The two-dimensional array of thermal infrared detectors of claim 9, wherein each said detector further includes: a signal amplifier, a voltage bias, a sample and hold circuit, and a multiplexing electronic circuit, all operatively associated with one another and with the respective said detector and supported on the respective corresponding portion of said integral wafer of substrate material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |