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US5661092A
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US
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Ultra thin silicon oxide and metal oxide films and a method for the preparation thereof
Assignee: CONNECTICUT THE, University of
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Filing: 1995-09-01
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Granted: 1997-08-26
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Expires: 2015-09-01
Abstract
Abstract Ultra thin organo-ceramic and metal oxide films are prepared under room temperature and atmospheric conditions by exposing α,ω-functional siloxane oligomers and fatty acid metal soaps, respectively, to a combination of ultraviolet light (UV) and ozone (O 3 ). The process includes the steps of preparing ultra thin α,ω-functional polysiloxane and fatty acid metal soap films using, but not limited to, the Langmuir-Blodgett (LB) technique. The LB technique permits construction of molecular monolayer or multilayer films on a variety of substrates. By using carboxylic acid end groups on the siloxane oligomers, metal ions can be incorporated into the SiOx film after UV-ozone exposure. This technique can be used to make electronically, optically, and chemically important organo-ceramic and metal oxide films on temperature sensitive substrates.
Inventors
- 👤 Jeffrey T. Koberstein
- 👤 Christopher L. Mirley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:55
CPC Classifications
B; B05; B05D; B05D3/00; B05D3/06; B05D3/061; B05D3/065; B05D3/067; B05D1/00; B05D1/18; B05D1/20; B05D1/202; B05D1/208; B05D3/04; B05D3/0433; B05D3/0453; B05D3/046; B82; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; Y; Y10; Y10S; Y10S438/00; Y10S438/939
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
49 words
A method for producing ultra thin film silicon oxide comprising the steps of: a) preparing a preceramic siloxane containing thin film; and b) exposing said film to ultraviolet light and ozone for a period of time sufficient to oxidize hydrocarbon groups and create bridging oxygen groups within said film.
Claim 2
Independent Claim
49 words
A method for producing ultra thin film silicon oxide comprising the steps of: a) preparing a preceramic siloxane containing thin film; and b) exposing said film to ultraviolet light and ozone for a period of time sufficient to oxidize hydrocarbon groups and create bridging oxygen groups within said film.
Claim 3
Dependent Claim
22 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said siloxane containing film is a polysiloxane.
Claim 4
Dependent Claim
20 words
A method for producing ultra thin film silicon oxide as claimed in claim 2 wherein said polysiloxane is α,ω-functional polydimethylsiloxane.
Claim 5
Dependent Claim
81 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein the step of preparing includes: a) dissolving an α,ω-functional polysiloxane in a volatile solvent; b) adding a sufficient amount of the dissolved elements to the surface of the water in a trough said addition being conducted dropwise; c) evaporating the solvent; d) compressing a polysiloxane coating left on the water after evaporation of the solvent; and e) passing a vertical substrate through the monolayer water interface.
Claim 6
Dependent Claim
45 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein the step of preparing includes: a) blending polysiloxanes with an effective amount of one or more of the group consisting of polymers and block copolymers of siloxanes; and b) spin-coating.
Claim 7
Dependent Claim
46 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein the step of preparing includes: a) blending polysiloxanes with an effective amount of one or more of the group consisting of polymers and block copolymers of siloxanes; and b) spray coating.
Claim 8
Dependent Claim
46 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein the step of preparing includes: a) blending polysiloxanes with an effective amount of one or more oft he group consisting of polymers and block copolymers of siloxanes; and b) dip coating.
Claim 9
Dependent Claim
46 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein the step of preparing includes: a) blending polysiloxanes with an effective amount of one or more of the group consisting of polymers and block copolymers of siloxanes; and b) flow coating.
Claim 10
Dependent Claim
29 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said ultraviolet light is in the range of from 185 nm to 254 nm.
Claim 11
Dependent Claim
33 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said UV light includes at least two peak eV energies at about 185 nm and about 254 nm.
Claim 12
Dependent Claim
33 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said ozone is supplied by pre-creating the same and dispersing said ozone in the vicinity of the film.
Claim 13
Dependent Claim
30 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said ozone is created as a reaction product between ambient air and the UV light.
Claim 14
Dependent Claim
29 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said exposing step is for the period of about 5 to about 30 minutes.
Claim 15
Dependent Claim
30 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said exposing step is carded out at about atmospheric pressure and at about room temperature.
Claim 16
Dependent Claim
40 words
A method for producing ultra thin film silicon oxide as claimed in claim 1 wherein said hydrocarbon groups and bridging oxygen groups are oxidized to CO 2 and H 2 O by the exposing step, simultaneously producing bridging oxygen species.
Claim 17
Dependent Claim
43 words
A method for producing ultra thin film silicon oxide as claimed in claim 12 wherein said CO 2 and H 2 O are vaporized and said siloxane containing film is thereby converted to an ultra thin layer of about 75% SiO 2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-25 | 2001-02-24 | 2001-08-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-25 | 2005-02-24 | 2005-08-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-25 | 2009-02-24 | 2009-08-26 | $7700.00 | Window Closed / Lapsed |