US5639692A — Non-etch back SOG process using a metal via stud

Claim 1

Independent Claim 420 words

A method for fabricating a MOSFET device on a semiconductor substrate, using a spin on glass insulator, as part of a composite insulator, to fill the space between metal via stud structures, comprising the steps of: providing the elements of said MOSFET device; depositing a first insulator layer on said semiconductor substrate, including on said elements of said MOSFET device; opening via holes in said first insulator layer, to expose top surfaces of said elements of said MOSFET device; depositing a first metallization layer, in said via holes, including depositing on the exposed top surface, of said element of said MOSFET device, and on a surface of said first insulator layer; patterning said first metallization layer to form first level metal structures, and providing contact to said elements of said MOSFET device; a second depositing a second metallization layer on said first level metal structures, and on a top surface of said first insulator layer, not covered by said first level metal structures; patterning said second metallization layer to form metal via stud structures on a top surface of said first level metal structures, said first level metal structures underlying said metal via stud structures; depositing a first interlevel dielectric layer on exposed surfaces of said metal via stud structures, as well as on exposed surfaces of said first level metal structures, and on said first insulator layer, not covered by said first level metal structures; applying a spin on glass layer on said first interlevel dielectric layer, partially filling spaces between said metal via stud structures; heat treating said spin on glass layer; curing said spin on glass layer; depositing a second interlevel dielectric layer on said spin on glass layer, completely filling spaces between said metal via stud structures; chemical mechanical polishing to expose a top surface of said metal via stud structures, and planarizing, an exposed surface of said first interlevel dielectric layer, an exposed surface of said spin on glass layer, and an exposed surface of said second interlevel dielectric layer, in spaces between said metal via stud structures; depositing a third metallization layer, on the exposed top surface of said metal via structures, on the exposed surface of said first interlevel dielectric layer, on the exposed surface of said spin on glass layer, and on the exposed surface of said second interlevel dielectric layer; depositing a anti-reflective layer on said third metallization layer; and patterning said anti-reflective layer, and said third metallization layer, to form second level metal structures, overlying said metal via stud structure.

Claim 2

Independent Claim 420 words

A method for fabricating a MOSFET device on a semiconductor substrate, using a spin on glass insulator, as part of a composite insulator, to fill the space between metal via stud structures, comprising the steps of: providing the elements of said MOSFET device; depositing a first insulator layer on said semiconductor substrate, including on said elements of said MOSFET device; opening via holes in said first insulator layer, to expose top surfaces of said elements of said MOSFET device; depositing a first metallization layer, in said via holes, including depositing on the exposed top surface, of said element of said MOSFET device, and on a surface of said first insulator layer; patterning said first metallization layer to form first level metal structures, and providing contact to said elements of said MOSFET device; a second depositing a second metallization layer on said first level metal structures, and on a top surface of said first insulator layer, not covered by said first level metal structures; patterning said second metallization layer to form metal via stud structures on a top surface of said first level metal structures, said first level metal structures underlying said metal via stud structures; depositing a first interlevel dielectric layer on exposed surfaces of said metal via stud structures, as well as on exposed surfaces of said first level metal structures, and on said first insulator layer, not covered by said first level metal structures; applying a spin on glass layer on said first interlevel dielectric layer, partially filling spaces between said metal via stud structures; heat treating said spin on glass layer; curing said spin on glass layer; depositing a second interlevel dielectric layer on said spin on glass layer, completely filling spaces between said metal via stud structures; chemical mechanical polishing to expose a top surface of said metal via stud structures, and planarizing, an exposed surface of said first interlevel dielectric layer, an exposed surface of said spin on glass layer, and an exposed surface of said second interlevel dielectric layer, in spaces between said metal via stud structures; depositing a third metallization layer, on the exposed top surface of said metal via structures, on the exposed surface of said first interlevel dielectric layer, on the exposed surface of said spin on glass layer, and on the exposed surface of said second interlevel dielectric layer; depositing a anti-reflective layer on said third metallization layer; and patterning said anti-reflective layer, and said third metallization layer, to form second level metal structures, overlying said metal via stud structure.

Claim 3

Dependent Claim 39 words

The method of claim 1, wherein said first metallization layer is aluminum, containing between about 0.5 to 2.0% copper, and between about 0.5 to 1% silicon, deposited using r.f. sputtering, to a thickness between about 4000 to 10000 Angstroms.

Claim 4

Dependent Claim 34 words

The method of claim 1, wherein said second metallization layer is tungsten, deposited using LPCVD processing, at a temperature between about 400° to 600° C., to a thickness between about 4000 to 12000 Angstroms.

Claim 5

Dependent Claim 49 words

The method of claim 1, wherein said metal via stud structures are formed via reactive ion etching, using Cl 2 as an etchant, wherein each of said metal via stud structures has a diameter between about 0.4 to 3.0 uM, and a height between about 4000 to 12000 Angstroms.

Claim 6

Dependent Claim 36 words

The method of claim 1, wherein said first interlevel dielectric layer is silicon oxide, deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 500 to 3000 Angstroms.

Claim 7

Dependent Claim 31 words

The method of claim 1, wherein said spin on glass layer is applied at a temperature between about 20° to 25° C., to a thickness between about 3000 to 7000 Angstroms.

Claim 8

Dependent Claim 47 words

The method of claim 1, wherein said spin on glass is heat-treated at a temperature between about 100° to 200° C., for a time between about 10 to 50 min., using hot plates, and cured using conventional ovens, at a temperature between about 250° to 450° C.

Claim 9

Dependent Claim 36 words

The method of claim 1, wherein said second interlevel dielectric layer is silicon oxide, deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 6000 to 12000 Angstroms.

Claim 10

Dependent Claim 16 words

The method of claim 1, wherein said chemical mechanical polishing is performed using a silica slurry.

Claim 11

Independent Claim 423 words

A method for fabricating a MOSFET device, on a semiconductor substrate, with a planarized topography, by using a spin on glass, as part of a composite insulator, to fill spaces between metal via stud structures, comprising the steps of: providing polysilicon gate structures, of said MOSFET device; depositing a first insulator layer on said semiconductor substrate, including depositing on said polysilicon gate structure; opening via holes in said first insulator layer to expose top surfaces of said polysilicon gate structures; depositing an aluminum based, first metallization layer, in said via holes, including depositing on an exposed top surface of said polysilicon gate structure, and on a surface of said first insulator layer; patterning said aluminum based, first metallization layer to form first level, aluminum based metal structures; depositing a second metallization layer on said first level, aluminum based metal structure, and on said first insulator layer, not covered by said first level, aluminum based metal structures; patterning said second metallization layer to form a metal via stud structures on a top surface of said first level, aluminum based metal structures; depositing a first silicon oxide interlevel layer on exposed surfaces of said metal via stud structures, as well as on exposed surfaces of said first level, aluminum based metal structures, and on said first insulator layer, not covered by said first level, aluminum based metal structures; applying said spin on glass layer on said first silicon oxide interlevel layer, partially filling spaces between said metal via stud structures; heat treating said spin on glass layer; curing said spin on glass layer; depositing of a second silicon oxide interlevel layer on said spin on glass layer, completely filling spaces between said metal via stud structures; chemical mechanical polishing to expose a top surface of said metal via stud structures, while planarizing a surface of exposed said first silicon oxide interlevel layer, a surface of exposed said spin on glass layer, and a surface of exposed said second silicon oxide interlevel layer, in spaces between said metal via stud structures; depositing an aluminum based, third metallization layer on the top surface of said metal via stud structure, and on the exposed top surface of said first silicon oxide interlevel layer, on the exposed top surface of the spin on glass layer, and on the exposed top surface of said second silicon oxide interlevel layer; depositing an anti-reflective layer on said aluminum based, third metallization layer; and patterning said anti-reflective layer, and said aluminum based, third metallization layer, to form second level aluminum based metal structures.

Claim 12

Independent Claim 423 words

A method for fabricating a MOSFET device, on a semiconductor substrate, with a planarized topography, by using a spin on glass, as part of a composite insulator, to fill spaces between metal via stud structures, comprising the steps of: providing polysilicon gate structures, of said MOSFET device; depositing a first insulator layer on said semiconductor substrate, including depositing on said polysilicon gate structure; opening via holes in said first insulator layer to expose top surfaces of said polysilicon gate structures; depositing an aluminum based, first metallization layer, in said via holes, including depositing on an exposed top surface of said polysilicon gate structure, and on a surface of said first insulator layer; patterning said aluminum based, first metallization layer to form first level, aluminum based metal structures; depositing a second metallization layer on said first level, aluminum based metal structure, and on said first insulator layer, not covered by said first level, aluminum based metal structures; patterning said second metallization layer to form a metal via stud structures on a top surface of said first level, aluminum based metal structures; depositing a first silicon oxide interlevel layer on exposed surfaces of said metal via stud structures, as well as on exposed surfaces of said first level, aluminum based metal structures, and on said first insulator layer, not covered by said first level, aluminum based metal structures; applying said spin on glass layer on said first silicon oxide interlevel layer, partially filling spaces between said metal via stud structures; heat treating said spin on glass layer; curing said spin on glass layer; depositing of a second silicon oxide interlevel layer on said spin on glass layer, completely filling spaces between said metal via stud structures; chemical mechanical polishing to expose a top surface of said metal via stud structures, while planarizing a surface of exposed said first silicon oxide interlevel layer, a surface of exposed said spin on glass layer, and a surface of exposed said second silicon oxide interlevel layer, in spaces between said metal via stud structures; depositing an aluminum based, third metallization layer on the top surface of said metal via stud structure, and on the exposed top surface of said first silicon oxide interlevel layer, on the exposed top surface of the spin on glass layer, and on the exposed top surface of said second silicon oxide interlevel layer; depositing an anti-reflective layer on said aluminum based, third metallization layer; and patterning said anti-reflective layer, and said aluminum based, third metallization layer, to form second level aluminum based metal structures.

Claim 13

Dependent Claim 40 words

The method of claim 10, wherein said aluminum based, first metallization layer, is deposited using r.f. sputtering, to a thickness between about 6000 to 10000 Angstroms, containing between about 0.5 to 2% copper, and between about 0.5 to 1% silicon.

Claim 14

Dependent Claim 34 words

The method of claim 10, wherein said second metallization layer is tungsten, deposited using LPCVD processing, at a temperature between about 400° to 600° C., to a thickness between about 4000 to 12000 Angstroms.

Claim 15

Dependent Claim 49 words

The method of claim 10, wherein said metal via stud structures are formed using reactive ion etching, using Cl 2 as an etchant, wherein each of said metal via stud structures has a diameter between about 0.4 to 3.0 uM, and a height between about 4000 to 12000 Angstroms.

Claim 16

Dependent Claim 35 words

The method of claim 10, wherein said first silicon oxide interlevel layer is deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 500 to 3000 Angstroms.

Claim 17

Dependent Claim 30 words

The method of claim 10, wherein said spin on glass layer is applied at a temperature between about 20° to 25° C., to a thickness between 3000 to 7000 Angstroms.

Claim 18

Dependent Claim 48 words

The method of claim 10, wherein said spin on glass layer is heat-treated at a temperature between 100° to 200° C., for a time between about 10 to 50 mins., using hot plates, and cured using conventional oven processing, at a temperature between about 250° to 450° C.

Claim 19

Dependent Claim 35 words

The method of claim 10, wherein said second silicon oxide interlevel layer is deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 6000 to 12000 Angstroms.

Claim 20

Dependent Claim 16 words

The method of claim 10, wherein said chemical mechanical polishing is performed using a silica slurry.

Claim 21

Dependent Claim 42 words

The method of claim 10, wherein said aluminum based, third metallization layer, is deposited using r.f. sputtering, at a temperature between about 22° to 550° C., to a thickness between about 4000 to 10000 Angstroms, containing between about 0.5 to 2.0% copper.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-06-16	2000-12-16	2001-06-17	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-06-16	2004-12-16	2005-06-17	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-06-16	2008-12-16	2009-06-17	$7700.00	Window Closed / Lapsed

Non-etch back SOG process using a metal via stud

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