US5639357A
Expired / Lapsed
US
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Synchronous modulation bias sputter method and apparatus for complete planarization of metal films
Assignee: Applied Materials Inc
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Filing: 1994-05-12
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Granted: 1997-06-17
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Expires: 2014-05-12
Abstract
Abstract A method for producing planarized metal films on a substrate which includes the steps of depositing a thin film of a metal onto the substrate; after the thin film is deposited, generating vacancies in the deposited thin film of metal to increase the mobility of the metal atoms of the deposited thin film; after generating vacancies within the deposited thin film of metal and before depositing any more metal, heating the surface of the deposited thin film to cause a reflow of the metal in the thin metal film; and repeating the above sequence of steps until a metal layer is formed having a predetermined thickness.
Inventors
- 👤 Zheng Xu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:13
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/58; C23C14/5806; H; H10; H10P; H10P95/00; H10P95/04; C23C14/22; C23C14/34; C23C14/54; C23C14/548; H10P14/00; H10P14/40; H10P14/42; H10P14/44; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/059; H10W20/062
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
81 words
A method for producing a planarized film on a substrate, said method comprising: depositing a film of a material onto the substrate; generating vacancies in the deposited film of material to increase the mobility of the atoms of the deposited film; heating the surface of the deposited film to a sufficient degree to cause a reflow of the material in the deposited film; and repeating the above sequence of steps until a layer of material is formed having a predetermined thickness.
Claim 2
Independent Claim
81 words
A method for producing a planarized film on a substrate, said method comprising: depositing a film of a material onto the substrate; generating vacancies in the deposited film of material to increase the mobility of the atoms of the deposited film; heating the surface of the deposited film to a sufficient degree to cause a reflow of the material in the deposited film; and repeating the above sequence of steps until a layer of material is formed having a predetermined thickness.
Claim 3
Dependent Claim
42 words
The method of claim 1 wherein within the sequence of steps, the vacancy generating step occurs after the film is deposited, and the surface heating step occurs after generating vacancies within the deposited film of material and before depositing any more material.
Claim 4
Dependent Claim
23 words
The method of claim 2 further comprising using a metal for said material so that the deposited film is a deposited metal film.
Claim 5
Dependent Claim
31 words
The method of claim 3 wherein the step of heating the surface of the deposited film is performed using a different mechanism from that used to perform the vacancy generating step.
Claim 6
Dependent Claim
29 words
The method of claim 4 wherein the step of depositing comprises using a plasma to sputter deposit metal from a target onto the substrate to produce the metal film.
Claim 7
Dependent Claim
22 words
The method of claim 5 wherein the step of depositing further comprises biasing the target to a negative voltage relative to ground.
Claim 8
Dependent Claim
22 words
The method of claim 4 wherein the step of generating vacancies comprises bombarding the deposited film with ions to produce the vacancies.
Claim 9
Dependent Claim
24 words
The method of claim 7 wherein the step of generating vacancies further comprises using a plasma to generate the ions that produce the vacancies.
Claim 10
Dependent Claim
23 words
The method of claim 8 wherein the step of generating vacancies further comprises biasing the wafer to a negative voltage relative to ground.
Claim 11
Dependent Claim
30 words
The method of claim 4 wherein the step of heating the surface of the deposited film of metal comprises bombarding the surface of the deposited film of metal with electrons.
Claim 12
Dependent Claim
36 words
The method of claim 10 wherein the step of heating the surface of the deposited film of metal comprises using a plasma to generate the electrons that bombard the surface of the deposited film of metal.
Claim 13
Dependent Claim
30 words
The method of claim 11 wherein the step of heating the surface of the deposited film of metal further comprises biasing the wafer to a positive voltage relative to ground.
Claim 14
Dependent Claim
18 words
The method of claim 3 further comprising performing the depositing, generating, and heating steps in a plasma chamber.
Claim 15
Dependent Claim
36 words
The method of claim 13 further comprising prior to performing the depositing, generating, and heating steps, evacuating the plasma chamber, introducing an inert gas into the plasma chamber, and generating a plasma in the plasma chamber.
Claim 16
Dependent Claim
11 words
The method of claim 14 wherein the inert gas is argon.
Claim 17
Dependent Claim
25 words
The method of claim 14 wherein the step of depositing comprises sputter depositing metal from a target onto the substrate to produce the metal film.
Claim 18
Dependent Claim
19 words
The method of claim 16 wherein the step of depositing further comprises negatively biasing the target relative to ground.
Claim 19
Dependent Claim
22 words
The method of claim 17 wherein the step of generating vacancies comprises bombarding the deposited film with ions to produce the vacancies.
Claim 20
Dependent Claim
24 words
The method of claim 18 wherein the step of generating vacancies further comprises using the plasma to generate the ions that produce the vacancies.
Claim 21
Dependent Claim
28 words
The method of claim 19 wherein the step of generating vacancies further comprises reducing the negative bias on the target and negatively biasing the wafer relative to ground.
Claim 22
Dependent Claim
30 words
The method of claim 20 wherein the step of heating the surface of the deposited film of metal comprises bombarding the surface of the deposited film of metal with electrons.
Claim 23
Dependent Claim
36 words
The method of claim 21 wherein the step of heating the surface of the deposited film of metal comprises using the plasma to generate the electrons that bombard the surface of the deposited film of metal.
Claim 24
Dependent Claim
27 words
The method of claim 22 wherein the step of heating the surface of the deposited film of metal further comprises positively biasing the wafer relative to ground.
Claim 25
Dependent Claim
24 words
The method of claim 14 wherein the metal is selected from a group of metals consisting of aluminum, copper, gold, tin and compounds thereof.
Claim 26
Dependent Claim
10 words
The method of claim 24 wherein the metal is aluminum.
Claim 27
Independent Claim
129 words
A method for producing a planarized metal film on a substrate, said method comprising: depositing a film of a metal onto the substrate at a first deposition rate; next, depositing the film of metal at a second deposition rate that is lower than the first rate while also commencing bombardment of the deposited film with ions having an energy that is less than the sputter threshold energy of the deposited film to produce vacancies in the deposited film of metal and to thereby increase the mobility of the metal atoms in the deposited film; and repeating the above-referenced sequence of depositing at a first deposition rate step followed by the depositing at a second rate while commencing bombardment step until a metal layer is formed having a predetermined thickness.
Claim 28
Independent Claim
129 words
A method for producing a planarized metal film on a substrate, said method comprising: depositing a film of a metal onto the substrate at a first deposition rate; next, depositing the film of metal at a second deposition rate that is lower than the first rate while also commencing bombardment of the deposited film with ions having an energy that is less than the sputter threshold energy of the deposited film to produce vacancies in the deposited film of metal and to thereby increase the mobility of the metal atoms in the deposited film; and repeating the above-referenced sequence of depositing at a first deposition rate step followed by the depositing at a second rate while commencing bombardment step until a metal layer is formed having a predetermined thickness.
Claim 29
Independent Claim
267 words
An apparatus for producing a planarized metal layer on a substrate using a metal target; said apparatus comprising: a sputter deposition chamber including a source assembly adapted to hold the target during processing; a platform within the chamber, said platform adapted to hold the substrate during processing; a first power supply generating a first voltage on the target, said first voltage varying as a function of time; a second power supply generating a second voltage on the platform, said second voltage varying as a function of time; and a control unit controlling both the first and second power supplies, said control unit programmed to cause the first and second voltages to have predetermined characteristics, said predetermined characteristics being that: during a first period, the first voltage is V 11 , said value V 11 being sufficiently negative to sputter the metal target; during a second period following the first period, the first voltage is V 12 and the second voltage is V 22 , wherein the magnitude of V 12 is substantially lower than the magnitude of V 11 so as to produce a significantly reduced target sputtering rate, and wherein V 22 is sufficiently negative to produce an ion bombardment of the substrate; and during a third period following the second period, the first voltage is V 13 and the second voltage is V 23 , wherein the magnitude of V 13 is substantially lower than the magnitude of V 11 so as to produce a significantly reduced target sputtering rate, and wherein V 23 is sufficiently positive to produce an electron bombardment of the substrate.
Claim 30
Independent Claim
267 words
An apparatus for producing a planarized metal layer on a substrate using a metal target; said apparatus comprising: a sputter deposition chamber including a source assembly adapted to hold the target during processing; a platform within the chamber, said platform adapted to hold the substrate during processing; a first power supply generating a first voltage on the target, said first voltage varying as a function of time; a second power supply generating a second voltage on the platform, said second voltage varying as a function of time; and a control unit controlling both the first and second power supplies, said control unit programmed to cause the first and second voltages to have predetermined characteristics, said predetermined characteristics being that: during a first period, the first voltage is V 11 , said value V 11 being sufficiently negative to sputter the metal target; during a second period following the first period, the first voltage is V 12 and the second voltage is V 22 , wherein the magnitude of V 12 is substantially lower than the magnitude of V 11 so as to produce a significantly reduced target sputtering rate, and wherein V 22 is sufficiently negative to produce an ion bombardment of the substrate; and during a third period following the second period, the first voltage is V 13 and the second voltage is V 23 , wherein the magnitude of V 13 is substantially lower than the magnitude of V 11 so as to produce a significantly reduced target sputtering rate, and wherein V 23 is sufficiently positive to produce an electron bombardment of the substrate.
Claim 31
Dependent Claim
39 words
The apparatus of claim 27 wherein one cycle of operation is defined as a sequence made up of the first, second and third periods, and wherein the control unit is programmed to repeat said cycle of operation many times.
Claim 32
Independent Claim
117 words
A method for producing a planarized metal film on a substrate, said method comprising: heating the substrate to a predetermined temperature; depositing a film of a metal onto the substrate, wherein the depositing step is performed on a heated substrate; after the film is deposited, bombarding the deposited film with ions to produce vacancies in the deposited film of metal and to thereby increase the mobility of the metal atoms in the deposited film, wherein the bombarding ions have an energy that is less than the sputter threshold energy of the deposited film; and repeating the above-referenced sequence of the depositing step followed by the bombarding step until a metal layer is formed having a predetermined thickness.
Claim 33
Independent Claim
117 words
A method for producing a planarized metal film on a substrate, said method comprising: heating the substrate to a predetermined temperature; depositing a film of a metal onto the substrate, wherein the depositing step is performed on a heated substrate; after the film is deposited, bombarding the deposited film with ions to produce vacancies in the deposited film of metal and to thereby increase the mobility of the metal atoms in the deposited film, wherein the bombarding ions have an energy that is less than the sputter threshold energy of the deposited film; and repeating the above-referenced sequence of the depositing step followed by the bombarding step until a metal layer is formed having a predetermined thickness.
Claim 34
Dependent Claim
40 words
The apparatus of claim 27 further comprising: an RF antenna within said chamber located between the source assembly and the platform; and an RF power supply connected to the RF antenna and for providing RF power to the RF antenna.
Claim 35
Dependent Claim
18 words
The method of claim 26, wherein the second deposition rate is substantially less than the first deposition rate.
Claim 36
Dependent Claim
20 words
The method of claim 31, wherein the second deposition rate is less than about 5% of the first deposition rate.
Claim 37
Dependent Claim
20 words
The apparatus of claim 27, wherein the electron bombardment heats the substrate sufficiently to enhance reflow of the metal layer.
Claim 38
Dependent Claim
27 words
The apparatus of claim 27, wherein the bombarding ions have an energy that is less than the sputter threshold energy of the metal in the metal layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-16 | 2000-12-16 | 2001-06-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-16 | 2004-12-16 | 2005-06-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-16 | 2008-12-16 | 2009-06-17 | $7700.00 | Window Closed / Lapsed |