US5108570A
Expired / Lapsed
US
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Multistep sputtering process for forming aluminum layer over stepped semiconductor wafer
Assignee: Applied Materials Inc
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Filing: 1990-03-30
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Granted: 1992-04-28
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Expires: 2010-03-30
Abstract
Abstract A multistep aluminum sputtering process is disclosed wherein aluminum is sputtered onto the surface of a semiconductor wafer and low areas between closely spaced apart raised portions on the wafer, such as closely spaced apart steps, narrow trenches, or small diameter vias, are completely fulled in by the sputtered aluminum. This results in the formation of an aluminum layer which is not thinned out in such low areas, and which has a surface which ranges from substantially planar to a positive slope, such as shown at 24' and 26' in FIG. 2. The first step is carried out by sputtering from about 200 to about 2000 Angstroms of aluminum while the wafer temperature is within a range of from about 50° C. to about 250° C. and the sputtering plasma is at a power of from about 1 to about 16 kilowatts. The power level range is then changed to from about 14 to about 20 kilowatts, a DC or AC bias is applied to the wafer, and aluminum is then sputtered either for an additional time period of about 20 to about 40 seconds or until the wafer temperature reaches 500° C., whichever occurs first, in a second step. Then the back side of the wafer is contacted by a thermally conductive gas to control the wafer temperature while further aluminum is optionally sputtered onto the wafer for an additional 0 to 45 seconds in a third step.
Inventors
- 👤 Chien-Rhone Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:05
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/062; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/44; H10W20/056
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
152 words
A sputtering process for forming an aluminum layer over a stepped semiconductor wafer in a splattering chamber which comprises: (a) sputtering from about 200 to about 2000 Angstroms of aluminum from a target onto said wafer in a first deposition step while maintaining a power level on said target of from about 1 kilowatt to about 16 kilowatts; (b) providing a target power level of at least about 14 kilowatts and sputtering aluminum for an additional 25 to 45 seconds or until the wafer temperature reaches about 500° C., whichever occurs first, during a second deposition step, while applying a DC or AC bias to the wafer; and (c) then contacting the backside of the wafer with a thermally conductive gas to maintain said wafer at a temperature not exceeding about 500° C. while sputtering additional aluminum onto said wafer for an additional 0 to 45 seconds in a third deposition step.
Claim 2
Dependent Claim
152 words
A sputtering process for forming an aluminum layer over a stepped semiconductor wafer in a splattering chamber which comprises: (a) sputtering from about 200 to about 2000 Angstroms of aluminum from a target onto said wafer in a first deposition step while maintaining a power level on said target of from about 1 kilowatt to about 16 kilowatts; (b) providing a target power level of at least about 14 kilowatts and sputtering aluminum for an additional 25 to 45 seconds or until the wafer temperature reaches about 500° C., whichever occurs first, during a second deposition step, while applying a DC or AC bias to the wafer; and (c) then contacting the backside of the wafer with a thermally conductive gas to maintain said wafer at a temperature not exceeding about 500° C. while sputtering additional aluminum onto said wafer for an additional 0 to 45 seconds in a third deposition step.
Claim 3
Dependent Claim
21 words
The process of claim 1 wherein said bias is a DC bias which ranges from about -100 to about -150 volts.
Claim 4
Dependent Claim
21 words
The process of claim 2 wherein the power level of said DC bias ranges from about 400 to about 1000 watts.
Claim 5
Dependent Claim
24 words
The process of claim 1 wherein said bias is an AC bias which ranges from about 300 to about 500 volts peak to peak.
Claim 6
Dependent Claim
21 words
The process of claim 4 wherein the power level of said AC bias ranges from about 400 to about 1000 watts.
Claim 7
Dependent Claim
26 words
The process of claim 1 wherein said first step is carried out while maintaining a wafer temperature of from about 50° C. to about 250° C.
Claim 8
Dependent Claim
27 words
The process of claim 1 a voltage is maintained on said target within a range of from about -400 volts to about -600 volts throughout the process.
Claim 9
Dependent Claim
29 words
The process of claim 1 wherein said sputtering chamber is maintained at a pressure within a range of from about 1 milliTorr to about 8 milliTorr throughout the process.
Claim 10
Dependent Claim
21 words
The process of claim 1 wherein said wafer temperature is not allowed to exceed about 400° C. during said second step.
Claim 11
Dependent Claim
19 words
The process of claim 1 wherein said second step is terminated when said wafer temperature exceeds about 400° C.
Claim 12
Dependent Claim
42 words
The process of claim 1 wherein a heater is located in a wafer support platform and said heater and support platform are initially heated to a temperature of from about 250° C. to about 450° C. prior to said first sputtering step.
Claim 13
Dependent Claim
44 words
The process of claim 11 wherein said thermally conductive gas is admitted to a sealed region between the upper surface of said wafer support platform and the backside of said wafer after said second step to thermally couple said wafer to said support platform.
Claim 14
Dependent Claim
24 words
The process of claim 1 wherein said thermally conductive gas couples said wafer to a heater maintained at a temperature not exceeding 450° C.
Claim 15
Dependent Claim
219 words
A process for sputtering an aluminum layer having a substantially planar surface over a semiconductor wafer having closely spaced apart raised portions which comprises: (a) heating a wafer support platform in a sputtering chamber to a temperature of from about 250° C. to about 450° C.; (b) then raising said heated support platform to contact said wafer and move said wafer and said platform to a sputtering position in said chamber; (c) sputtering aluminum from a target onto said wafer for a period of time sufficient to deposit from about 200 to about 2000 Angstroms of aluminum on said wafer in a first deposition step while maintaining a power level on said target of from about 1 to about 16 kilowatts; (d) changing the power level to from about 14 to about 20 kilowatts and sputtering aluminum for an additional 25 to 45 seconds or until said wafer reaches a temperature not exceeding about 500° C., whichever occurs first, while applying a DC or AC bias on said wafer during a second deposition step; and (e) then contacting the backside of the wafer with a thermally conductive gas to control said wafer temperature while sputtering additional aluminum onto said wafer for an additional 0 to 45 seconds while maintaining said bias on said wafer in a third deposition step.
Claim 16
Dependent Claim
219 words
A process for sputtering an aluminum layer having a substantially planar surface over a semiconductor wafer having closely spaced apart raised portions which comprises: (a) heating a wafer support platform in a sputtering chamber to a temperature of from about 250° C. to about 450° C.; (b) then raising said heated support platform to contact said wafer and move said wafer and said platform to a sputtering position in said chamber; (c) sputtering aluminum from a target onto said wafer for a period of time sufficient to deposit from about 200 to about 2000 Angstroms of aluminum on said wafer in a first deposition step while maintaining a power level on said target of from about 1 to about 16 kilowatts; (d) changing the power level to from about 14 to about 20 kilowatts and sputtering aluminum for an additional 25 to 45 seconds or until said wafer reaches a temperature not exceeding about 500° C., whichever occurs first, while applying a DC or AC bias on said wafer during a second deposition step; and (e) then contacting the backside of the wafer with a thermally conductive gas to control said wafer temperature while sputtering additional aluminum onto said wafer for an additional 0 to 45 seconds while maintaining said bias on said wafer in a third deposition step.
Claim 17
Dependent Claim
31 words
The process of claim 14 wherein said bias on said wafer during said second and third deposition steps is a DC bias of from about -100 volts to -150 volts DC.
Claim 18
Dependent Claim
34 words
The process of claim 14 wherein said bias on said wafer during said second and third deposition steps is an Ac bias which ranges from about 300 to about 500 volts peak to peak.
Claim 19
Dependent Claim
44 words
The process of claim 14 wherein said thermally conductive gas is brought in contact with said wafer at the end of said second step to thermally couple said wafer to said wafer support platform to inhibit said wafer temperature from rising about 500° C.
Claim 20
Dependent Claim
26 words
The process of claim 14 wherein the voltage on said target is maintained throughout within a range of from about -400 volts to about -600 volts.
Claim 21
Dependent Claim
29 words
The process of claim 14 wherein said sputtering chamber is maintained throughout the process at a pressure within a range of from about 1 milliTorr to about 8 milliTorr.
Claim 22
Dependent Claim
233 words
A process for sputtering an aluminum layer having a substantially planar surface over a semiconductor wafer having closely spaced apart raised portions which comprises: (a) heating a wafer support platform in a sputtering chamber to a temperature of from about 250° C. to about 450° C.; (c) sputtering aluminum from a target onto said wafer until from about 200 to about 2000 Angstroms of aluminum has deposited on said wafer in a first deposition step while maintaining a power level on said target of from about 1 to about 16 kilowatts and while maintaining a target voltage of from about -400 to about -600 volts; (d) changing the target power level range to a range of from 14 to about 20 kilowatts and sputtering aluminum for an additional 25 to 45 seconds or until said wafer reaches a temperature of about 500° C., whichever occurs first, while applying either a DC bias voltage of from about -100 to about -150 volts DC, or an AC bias voltage of from about 300 to about 500 volts AC peak to peak, on said wafer during a second deposition step; and (e) then contacting the backside of the wafer with a thermally conductive gas to control said wafer temperature while sputtering additional aluminum onto said wafer for an additional 0 to 45 seconds while still maintaining said bias on said wafer in a third deposition step.
Claim 23
Dependent Claim
233 words
A process for sputtering an aluminum layer having a substantially planar surface over a semiconductor wafer having closely spaced apart raised portions which comprises: (a) heating a wafer support platform in a sputtering chamber to a temperature of from about 250° C. to about 450° C.; (c) sputtering aluminum from a target onto said wafer until from about 200 to about 2000 Angstroms of aluminum has deposited on said wafer in a first deposition step while maintaining a power level on said target of from about 1 to about 16 kilowatts and while maintaining a target voltage of from about -400 to about -600 volts; (d) changing the target power level range to a range of from 14 to about 20 kilowatts and sputtering aluminum for an additional 25 to 45 seconds or until said wafer reaches a temperature of about 500° C., whichever occurs first, while applying either a DC bias voltage of from about -100 to about -150 volts DC, or an AC bias voltage of from about 300 to about 500 volts AC peak to peak, on said wafer during a second deposition step; and (e) then contacting the backside of the wafer with a thermally conductive gas to control said wafer temperature while sputtering additional aluminum onto said wafer for an additional 0 to 45 seconds while still maintaining said bias on said wafer in a third deposition step.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-28 | 1995-10-28 | 1996-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-28 | 1999-10-28 | 2000-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-28 | 2003-10-28 | 2004-04-28 | $7700.00 | Window Closed / Lapsed |