US5631782A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Support post architecture for micromechanical devices
Assignee: Texas Instruments Inc
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Filing: 1995-06-07
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Granted: 1997-05-20
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Expires: 2015-06-07
Abstract
Abstract Support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
Inventors
- 👤 Gregory C. Smith
- 👤 Robert M. Boysel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 08:38
CPC Classifications
H; H04; H04N; H04N5/00; H04N5/74; G; G06; G06K; G06K15/00; G06K15/02; G06K15/12; G06K15/1238; G06K15/1242; G06K15/1252; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; Y; Y10; Y10S; Y10S359/00; Y10S359/904
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
89 words
A micromirror device comprising: a substrate; at least one hinge support pillar supported by said substrate, said hinge support pillar comprised of a first pillar material enclosed by a first metal sheath and said substrate; at least one hinge connected to said hinge support pillar; at least one mirror support pillar connected to said hinge, said mirror support pillar comprised of a second pillar material enclosed by a second metal sheath and a layer forming said hinge; and at least one mirror element supported by said mirror support pillar.
Claim 2
Dependent Claim
89 words
A micromirror device comprising: a substrate; at least one hinge support pillar supported by said substrate, said hinge support pillar comprised of a first pillar material enclosed by a first metal sheath and said substrate; at least one hinge connected to said hinge support pillar; at least one mirror support pillar connected to said hinge, said mirror support pillar comprised of a second pillar material enclosed by a second metal sheath and a layer forming said hinge; and at least one mirror element supported by said mirror support pillar.
Claim 3
Dependent Claim
33 words
The micromirror device of claim 1 wherein said first pillar material and said second pillar material are selected from the group consisting of a photoresist, polysilicon, an oxide, a nitride, and an oxynitride.
Claim 4
Dependent Claim
15 words
The micromirror device of claim 1 wherein said first metal sheath is an aluminum alloy.
Claim 5
Dependent Claim
15 words
The micromirror device of claim 1 wherein said second metal sheath is an aluminum alloy.
Claim 6
Dependent Claim
16 words
The micromirror device of claim 1 wherein said at least one hinge is an aluminum alloy.
Claim 7
Dependent Claim
18 words
The micromirror device of claim 1 wherein said at least one hinge is an aluminum alloy containing titanium.
Claim 8
Dependent Claim
18 words
The micromirror device of claim 1 wherein said at least one hinge is an aluminum alloy containing silicon.
Claim 9
Dependent Claim
22 words
The micromirror device of claim 1 wherein said at least one hinge is an aluminum alloy containing 1% silicon and 0.2% titanium.
Claim 10
Dependent Claim
15 words
The micromirror device of claim 1 wherein said first pillar material is 1.0 μm thick.
Claim 11
Dependent Claim
15 words
The micromirror device of claim 1 wherein said second pillar material is 2.2 μm thick.
Claim 12
Dependent Claim
55 words
A micromirror device comprising: a substrate; at least one hinge support pillar supported by said substrate, said hinge support pillar comprising a pillar material enclosed by a metal sheath and said substrate; at least one hinge connected to said hinge support pillar; and at least one mirror element supported by said at least one hinge.
Claim 13
Dependent Claim
55 words
A micromirror device comprising: a substrate; at least one hinge support pillar supported by said substrate, said hinge support pillar comprising a pillar material enclosed by a metal sheath and said substrate; at least one hinge connected to said hinge support pillar; and at least one mirror element supported by said at least one hinge.
Claim 14
Dependent Claim
14 words
The micromirror device of claim 11 wherein said metal sheath is an aluminum alloy.
Claim 15
Dependent Claim
27 words
The micromirror device of claim 11 wherein said pillar material is selected from the group consisting of a photoresist, polysilicon, an oxide, a nitride, and an oxynitride.
Claim 16
Dependent Claim
16 words
The micromirror device of claim 11 wherein said at least one hinge is an aluminum alloy.
Claim 17
Dependent Claim
18 words
The micromirror device of claim 11 wherein said at least one hinge is an aluminum alloy containing titanium.
Claim 18
Dependent Claim
18 words
The micromirror device of claim 11 wherein said at least one hinge is an aluminum alloy containing silicon.
Claim 19
Dependent Claim
22 words
The micromirror device of claim 11 wherein said at least one hinge is an aluminum alloy containing 1% silicon and 0.2% titanium.
Claim 20
Dependent Claim
54 words
A support pillar for a micromechanical device comprising: a substrate; a pillar material supported by said substrate, said pillar material formed in the shape of the desired support pillar; and a metal layer at least partially supported by said substrate, wherein said metal layer is formed over said pillar material enclosing said pillar material.
Claim 21
Dependent Claim
54 words
A support pillar for a micromechanical device comprising: a substrate; a pillar material supported by said substrate, said pillar material formed in the shape of the desired support pillar; and a metal layer at least partially supported by said substrate, wherein said metal layer is formed over said pillar material enclosing said pillar material.
Claim 22
Dependent Claim
27 words
The support pillar of claim 18 wherein said pillar material is selected from the group consisting of a photoresist, polysilicon, an oxide, a nitride, and an oxynitride.
Claim 23
Dependent Claim
14 words
The support pillar of claim 18 wherein said metal layer is an aluminum alloy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-19 | 2000-11-18 | 2001-05-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-19 | 2004-11-18 | 2005-05-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-19 | 2008-11-18 | 2009-05-20 | $7700.00 | Window Closed / Lapsed |