US4954789A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spatial light modulator
Assignee: Texas Instruments Inc
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Filing: 1989-09-28
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Granted: 1990-09-04
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Expires: 2009-09-28
Abstract
Abstract An electrostatically deflectable plate spatial light modulator with light reflecting plates (106) composed of aluminum alloy and with symmetrically located supporting hinges (108) connecting the plates (106) to support posts (104); this provides a thick stiff plate and a thin compliant hinges with deflection perpendicular to the plane of the plates.
Inventors
- 👤 Jeffrey B. Sampsell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 13:47
CPC Classifications
G; G02; G02F; G02F1/00; G02B; G02B26/00; G02B26/001; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
49 words
A spatial light modulator, comprising: (a) a plurality of pixels; (b) each of said pixels including i. an electrostatically deflectable reflecting element over an addressing electrode, and ii. a plurality of supports for said element, said supports constraining deflection of said element to positions parallel to an undeflected position.
Claim 2
Dependent Claim
49 words
A spatial light modulator, comprising: (a) a plurality of pixels; (b) each of said pixels including i. an electrostatically deflectable reflecting element over an addressing electrode, and ii. a plurality of supports for said element, said supports constraining deflection of said element to positions parallel to an undeflected position.
Claim 3
Dependent Claim
29 words
The spatial light modulator of claim 1, further comprising: (a) a plurality of posts with each of said supports connecting one of said elements to one of said posts.
Claim 4
Dependent Claim
30 words
The spatial light modulator of claim 2, wherein: (a) each of said elements is a roughly square plate; and (b) each of said plates corresponds to four of said supports.
Claim 5
Dependent Claim
17 words
The spatial light modulator of claim 2, wherein: (a) said elements are made of an aluminum alloy.
Claim 6
Dependent Claim
32 words
The spatial light modulator of claim 2, further comprising: (a) a semiconductor body containing addressing circuitry, said addressing electrodes over said addressing circuitry, said posts affixed to but insulated from said body.
Claim 7
Dependent Claim
23 words
The spatial light modulator of claim 5, further comprising: (a) interconnections on the same level as said addressing electrodes and interconnecting said posts.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-09-03 | 1994-03-05 | 1994-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-03 | 1998-03-05 | 1998-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-09-03 | 2002-03-05 | 2002-09-04 | $7700.00 | Window Closed / Lapsed |