US4710732A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spatial light modulator and method
Assignee: Texas Instruments Inc
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Filing: 1984-07-31
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Granted: 1987-12-01
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Expires: 2004-07-31
Abstract
Abstract Spatial light modulators with deflectable metal flaps hinged to conducting posts on a substrate are disclosed. The metal flaps and conducting post may be a single piece, and connected to addressing circuitry in the substrate. Also, plasma etching to fabricate the flaps without breakage is disclosed.
Inventors
- 👤 Larry J. Hornbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 23:03
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
77 words
A method of fabricating a spatial light modulator with deflectable beams, comprising the steps of: (a) apply a spacer on a substrate including electronic addressing circuitry; (b) pattern said spacer to define post holes extending down to said subtrate; (c) deposit a layer of metal on said spacer and post holes; (d) define defectable beams in said metal so that each beam is hinged to the metal in one of said post holes; (e) remove said spacer.
Claim 2
Independent Claim
77 words
A method of fabricating a spatial light modulator with deflectable beams, comprising the steps of: (a) apply a spacer on a substrate including electronic addressing circuitry; (b) pattern said spacer to define post holes extending down to said subtrate; (c) deposit a layer of metal on said spacer and post holes; (d) define defectable beams in said metal so that each beam is hinged to the metal in one of said post holes; (e) remove said spacer.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein said removal is by a plasma etch.
Claim 4
Independent Claim
90 words
A method of fabricating a spatial light modulator with deflectable beams, comprising the steps of: (a) spin a spacer onto a substrate including electronic addressing circuitry; (b) pattern said spacer to define post holes extending down to said substrate; (c) deposit metal on said spacer and post holes; (d) remove said metal from said spacer except in the vicinity of said post holes; (e) apply a second layer of metal on said spacer and metallized post holes; (f) define deflectable beams in said second metal layer; (g) remove said spacer.
Claim 5
Independent Claim
90 words
A method of fabricating a spatial light modulator with deflectable beams, comprising the steps of: (a) spin a spacer onto a substrate including electronic addressing circuitry; (b) pattern said spacer to define post holes extending down to said substrate; (c) deposit metal on said spacer and post holes; (d) remove said metal from said spacer except in the vicinity of said post holes; (e) apply a second layer of metal on said spacer and metallized post holes; (f) define deflectable beams in said second metal layer; (g) remove said spacer.
Claim 6
Dependent Claim
62 words
A spatial light modulator, comprising: (a) a plurality of pixels on a substrate with electronic addressing circuitry; (b) each of said pixels including (i) an electrostatically deflectable reflecting element, (ii) a support holding said element spaced away from said substrate, and (iii) said element and support both electrical conductors and electrically connected, and said support connected electrically connected to said addressing circuitry.
Claim 7
Dependent Claim
62 words
A spatial light modulator, comprising: (a) a plurality of pixels on a substrate with electronic addressing circuitry; (b) each of said pixels including (i) an electrostatically deflectable reflecting element, (ii) a support holding said element spaced away from said substrate, and (iii) said element and support both electrical conductors and electrically connected, and said support connected electrically connected to said addressing circuitry.
Claim 8
Dependent Claim
82 words
A spatial light modulator, comprising: (a) a plurality of pixels on a substrate with electronic addressing circuitry; (b) each of said pixels including a single piece of metal with a support portion attached to said substrate, a hinge portion connected to said support portion, and a deflectable portion connected to said hinge portion and held spaced away from said substrate; (c) said support portion electrically connected to said addressing circuitry and said deflectable portion over an electrode connected to said addressing circuitry.
Claim 9
Dependent Claim
82 words
A spatial light modulator, comprising: (a) a plurality of pixels on a substrate with electronic addressing circuitry; (b) each of said pixels including a single piece of metal with a support portion attached to said substrate, a hinge portion connected to said support portion, and a deflectable portion connected to said hinge portion and held spaced away from said substrate; (c) said support portion electrically connected to said addressing circuitry and said deflectable portion over an electrode connected to said addressing circuitry.
Claim 10
Dependent Claim
33 words
The spatial light modulator of claim 5, wherein: (a) said single piece of metal is in the shape of four square flaps, with each flap connected at a corner to a central post.
Claim 11
Dependent Claim
23 words
The spatial light modulator of claim 5, wherein: (a) said electrode only extends beneath the portion of said deflectable portion near said support.
Claim 12
Dependent Claim
55 words
A spatial light modulator, comprising: (a) a plurality of pixels on a substrate with electronic addressing circuitry; (b) each of said pixels including a post and hinged electrically conductive flaps; (c) said post including a first electrically conducting portion attached to said substrate and circuitry and an overlying metal portion contiguous with said hinged flaps.
Claim 13
Dependent Claim
55 words
A spatial light modulator, comprising: (a) a plurality of pixels on a substrate with electronic addressing circuitry; (b) each of said pixels including a post and hinged electrically conductive flaps; (c) said post including a first electrically conducting portion attached to said substrate and circuitry and an overlying metal portion contiguous with said hinged flaps.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-11-30 | 1991-06-01 | 1991-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-11-30 | 1995-06-01 | 1995-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-11-30 | 1999-06-01 | 1999-12-01 | $7700.00 | Window Closed / Lapsed |