US5485304A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Support posts for micro-mechanical devices
Assignee: Texas Instruments Inc
•
Filing: 1994-07-29
•
Granted: 1996-01-16
•
Expires: 2014-07-29
Abstract
Abstract An improved support post (16, 23, 25) for micro-mechanical devices (10). A via (34a) that defines the outer surface of the support post (16) is etched into a spacer layer (34). An oxide layer (41) is conformally deposited over the spacer layer (34) and into the via (34a), and then etched back to the top surface of the spacer layer (34), leaving a sidewall ring (23a) on the inner surface of the via (34a). Next, a metal layer (61) is deposited over the spacer layer (34) and into the via (34a) so as to cover the sidewall ring (23a). This metal layer (61) is then etched to form a support post stem (23) inside the via (34a). The spacer layer (34) is removed, leaving the support post stem (23) and a sidewall ring (23a) around the stem (23).
Inventors
- 👤 Toshiyuki Kaeriyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 20:23
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
103 words
An improved micro-mechanical device of a type having support posts for mechanical elements, wherein the improvement comprises a support post having: a hollow support post stem, said stem made by depositing a stem material into a via in a spacer layer that is subsequently removed, said hollow support post stem being filled with material from another layer of said micro-mechanical device; and a sidewall ring around the outer circumference of said stem, said sidewall ring made by depositing an oxide layer over said spacer layer and into said vias prior to the deposition of said stem material and etching back said oxide layer.
Claim 2
Dependent Claim
103 words
An improved micro-mechanical device of a type having support posts for mechanical elements, wherein the improvement comprises a support post having: a hollow support post stem, said stem made by depositing a stem material into a via in a spacer layer that is subsequently removed, said hollow support post stem being filled with material from another layer of said micro-mechanical device; and a sidewall ring around the outer circumference of said stem, said sidewall ring made by depositing an oxide layer over said spacer layer and into said vias prior to the deposition of said stem material and etching back said oxide layer.
Claim 3
Dependent Claim
22 words
The device of claim 1, wherein the inner profile of said support post is rounded at the top edge of said via.
Claim 4
Dependent Claim
16 words
The device of claim 1, wherein the inner profile of said support post is slightly convex.
Claim 5
Dependent Claim
23 words
The device of claim 1, wherein the inner profile of said support post has an angle greater than 90 degrees at the bottom.
Claim 6
Dependent Claim
99 words
A digital micro-mirror device, comprising: a substrate upon which the following elements are fabricated: at least one address electrode, a support post, a hinge extending from said support post, a mirror attached to said hinge, wherein said mirror is deflectable so as to tilt upon being subjected to an applied force; and wherein said support post is comprised of a hollow stem and a sidewall ring, both formed by depositing material into a via etched into a spacer layer that is subsequently removed, wherein said hollow stem is filled with a material from another layer of said micro-mirror device.
Claim 7
Dependent Claim
99 words
A digital micro-mirror device, comprising: a substrate upon which the following elements are fabricated: at least one address electrode, a support post, a hinge extending from said support post, a mirror attached to said hinge, wherein said mirror is deflectable so as to tilt upon being subjected to an applied force; and wherein said support post is comprised of a hollow stem and a sidewall ring, both formed by depositing material into a via etched into a spacer layer that is subsequently removed, wherein said hollow stem is filled with a material from another layer of said micro-mirror device.
Claim 8
Dependent Claim
20 words
The digital micro-mirror device of claim 5, wherein said sidewall ring is at the outer surface of said support post.
Claim 9
Dependent Claim
17 words
The digital micro-mirror device of claim 5, wherein said sidewall ring is formed from an oxide material.
Claim 10
Dependent Claim
24 words
The digital micro-mirror device of claim 5, wherein the inner profile of said support post is rounded at the top edge of said via.
Claim 11
Dependent Claim
18 words
The digital micro-mirror device of claim 5, wherein the inner profile of said support post is slightly convex.
Claim 12
Dependent Claim
25 words
The digital micro-mirror device of claim 5, wherein the inner profile of said support post has an angle greater than 90 degrees at the bottom.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-15 | 1999-07-17 | 2000-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-15 | 2003-07-17 | 2004-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-15 | 2007-07-17 | 2008-01-16 | $7700.00 | Window Closed / Lapsed |