US5202785A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and device for steering light
Assignee: Texas Instruments Inc
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Filing: 1991-12-20
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Granted: 1993-04-13
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Expires: 2011-12-20
Abstract
Abstract A method for periodically steering a beam of light is disclosed comprising the steps of reflecting a beam of light off of a mirror suspended by at least two supporting elements. At least one of the supporting elements is displaced from an edge of the mirror. A periodic voltage is applied to an electrode displaced from the mirror to cause the mirror to rotate about an axis.
Inventors
- 👤 William E. Nelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:21
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0841
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
105 words
A method for periodically steering a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror only comprised of reflective material fabricated monolithically so as to be suspended by at least two supporting elements, at least one of the supporting elements being displaced from an edge of the mirror, the elements forming an axis of rotation; and periodically applying a voltage to a first electrode fabricated monolithically with said mirror to cause the mirror to rotate about the axis of rotation, the first electrode being displaced outwardly from the axis of rotation in a first direction.
Claim 2
Independent Claim
105 words
A method for periodically steering a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror only comprised of reflective material fabricated monolithically so as to be suspended by at least two supporting elements, at least one of the supporting elements being displaced from an edge of the mirror, the elements forming an axis of rotation; and periodically applying a voltage to a first electrode fabricated monolithically with said mirror to cause the mirror to rotate about the axis of rotation, the first electrode being displaced outwardly from the axis of rotation in a first direction.
Claim 3
Dependent Claim
38 words
The method of claim 1 further comprising the step of periodically applying a voltage to a second electrode displaced outwardly from the axis of rotation in a second direction, the first direction generally opposite to the second direction.
Claim 4
Dependent Claim
38 words
The method of claim 2 wherein the steps of periodically applying voltage to the first and second electrodes further comprise the steps of periodically applying a voltage with a frequency equal to the resonant frequency of the mirror.
Claim 5
Dependent Claim
37 words
The method of claim 1 wherein the step of periodically applying a voltage to the first electrode further comprises the step of periodically applying the voltage with a frequency equal to the resonant frequency of the mirror.
Claim 6
Independent Claim
114 words
A method for periodically steering a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror monolithically fabricated over addressing circuitry, the mirror being suspended by at least two supporting elements, at least one of the supporting elements being displaced from an edge of the mirror, the elements forming an axis of rotation; and periodically applying a voltage to a first electrode of said addressing circuitry to cause the mirror to rotate about the axis of rotation, the first electrode being displaced outwardly from the axis of rotation in a first direction, the voltage having a frequency equal to the resonant frequency of the mirror.
Claim 7
Independent Claim
114 words
A method for periodically steering a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror monolithically fabricated over addressing circuitry, the mirror being suspended by at least two supporting elements, at least one of the supporting elements being displaced from an edge of the mirror, the elements forming an axis of rotation; and periodically applying a voltage to a first electrode of said addressing circuitry to cause the mirror to rotate about the axis of rotation, the first electrode being displaced outwardly from the axis of rotation in a first direction, the voltage having a frequency equal to the resonant frequency of the mirror.
Claim 8
Independent Claim
156 words
A method for periodically steering a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror monolithically fabricated over addressing circuitry, the mirror being suspended by at least two supporting elements, at least one of the supporting elements being displaced from an edge of the mirror, the elements forming an axis of rotation; periodically applying a voltage to a first electrode of said addressing circuitry to cause the mirror to rotate about the axis of rotation, the first electrode being displaced outwardly from the axis of rotation in a first direction, the voltage having a frequency equal to the resonant frequency of the mirror; and periodically applying a voltage to a second electrode displaced outwardly from the axis of rotation in a second direction, the first direction being generally opposite to the second direction, the voltage having a frequency equal to the resonant frequency of the mirror.
Claim 9
Independent Claim
156 words
A method for periodically steering a beam of incident light through an angle comprising the steps of: reflecting a beam of light off a mirror monolithically fabricated over addressing circuitry, the mirror being suspended by at least two supporting elements, at least one of the supporting elements being displaced from an edge of the mirror, the elements forming an axis of rotation; periodically applying a voltage to a first electrode of said addressing circuitry to cause the mirror to rotate about the axis of rotation, the first electrode being displaced outwardly from the axis of rotation in a first direction, the voltage having a frequency equal to the resonant frequency of the mirror; and periodically applying a voltage to a second electrode displaced outwardly from the axis of rotation in a second direction, the first direction being generally opposite to the second direction, the voltage having a frequency equal to the resonant frequency of the mirror.
Claim 10
Dependent Claim
144 words
A light steering device comprising: a substrate having a top surface; a deflectable mirror element generally planar with the top surface; at least two supporting elements for suspending the mirror element above the substrate, the supporting elements defining an axis of rotation, at least one of the supporting elements being displaced from an edge of the mirror; at least one electrode being displaced outwardly in a first direction from the axis of rotation for periodically causing the mirror to rotate about the axis of rotation when the first electrode is electrically connected to a first voltage source and the mirror is electrically connected to a second voltage source, and a stop at the same electrical potential as the mirror element, the stop being displaced outwardly from the first electrode whereby said mirror element lands on the stop prior to landing on the first electrode.
Claim 11
Dependent Claim
144 words
A light steering device comprising: a substrate having a top surface; a deflectable mirror element generally planar with the top surface; at least two supporting elements for suspending the mirror element above the substrate, the supporting elements defining an axis of rotation, at least one of the supporting elements being displaced from an edge of the mirror; at least one electrode being displaced outwardly in a first direction from the axis of rotation for periodically causing the mirror to rotate about the axis of rotation when the first electrode is electrically connected to a first voltage source and the mirror is electrically connected to a second voltage source, and a stop at the same electrical potential as the mirror element, the stop being displaced outwardly from the first electrode whereby said mirror element lands on the stop prior to landing on the first electrode.
Claim 12
Dependent Claim
159 words
A light steering device comprising: a substrate having a top surface; a deflectable mirror element generally planar with the top surface; at least two supporting elements for suspending the mirror element above the substrate, the supporting elements defining an axis of rotation, at least one of the supporting elements being displaced from an edge of the mirror; at least one electrode being displaced outwardly in a first direction from the axis of rotation for periodically causing the mirror to rotate about the axis of rotation when the first electrode is electrically connected to a first voltage source and the mirror is electrically connected to a second voltage source; and a second electrode being displaced outwardly from the axis of rotation in a second direction, the second direction being generally opposite to the first direction, the second electrode periodically causing the mirror to rotate about the axis of rotation when the second electrode is connected to a third voltage source.
Claim 13
Dependent Claim
159 words
A light steering device comprising: a substrate having a top surface; a deflectable mirror element generally planar with the top surface; at least two supporting elements for suspending the mirror element above the substrate, the supporting elements defining an axis of rotation, at least one of the supporting elements being displaced from an edge of the mirror; at least one electrode being displaced outwardly in a first direction from the axis of rotation for periodically causing the mirror to rotate about the axis of rotation when the first electrode is electrically connected to a first voltage source and the mirror is electrically connected to a second voltage source; and a second electrode being displaced outwardly from the axis of rotation in a second direction, the second direction being generally opposite to the first direction, the second electrode periodically causing the mirror to rotate about the axis of rotation when the second electrode is connected to a third voltage source.
Claim 14
Dependent Claim
142 words
A light steering device comprising: a substrate having a top surface; an electrostatically deflectable mirror element; at least two supporting elements for suspending the mirror element above the surface, the supporting elements defining an axis of rotation, at least one of the supporting elements being displaced from an edge of the mirror; at least two electrodes being displaced outwardly from the axis of rotation for rotating the mirror element about the axis of rotation according to input signals, the first electrode being displaced in a first direction, the second electrode being displaced in a second direction, the first and second directions being generally opposite from each other; and at least two stops being displaced outwardly of the first and second electrodes whereby the mirror element is made to land on the stops prior to landing on either the first or second electrode.
Claim 15
Dependent Claim
142 words
A light steering device comprising: a substrate having a top surface; an electrostatically deflectable mirror element; at least two supporting elements for suspending the mirror element above the surface, the supporting elements defining an axis of rotation, at least one of the supporting elements being displaced from an edge of the mirror; at least two electrodes being displaced outwardly from the axis of rotation for rotating the mirror element about the axis of rotation according to input signals, the first electrode being displaced in a first direction, the second electrode being displaced in a second direction, the first and second directions being generally opposite from each other; and at least two stops being displaced outwardly of the first and second electrodes whereby the mirror element is made to land on the stops prior to landing on either the first or second electrode.
References Cited (Backward Citations)
US3799644A
Cited
US4368489A
Cited
US4302709A
Cited
US4421381A
Cited
US4317611A
Cited
US5061049A
Cited
US4662746A
Cited
US5142405A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-12 | 1996-10-12 | 1997-04-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-12 | 2000-10-12 | 2001-04-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-12 | 2004-10-12 | 2005-04-13 | $7700.00 | Window Closed / Lapsed |