Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
184 words
A process for manufacturing a semiconductor device, comprising the steps of: a) forming, on a single-crystalline semiconductor region of a substrate, a first insulating film having a first opening portion with a first lateral dimension for exposing the single-crystalline semiconductor region therethrough; b) forming, on the first insulating film, a second insulating film having a second opening portion with a second lateral dimension larger than the first lateral dimension, the second opening portion overlying the first opening portion for exposing the single-crystalline semiconductor region therethrough; c) applying a non-single-crystalline material on a sidewall inside of the second opening portion; d) growing a single-crystalline semiconductor body in the first and the second opening portions to have a portion on the first insulating film; e) introducing a dopant into the portion of the single-crystalline semiconductor body which is on the first insulating film to form spaced source and drain regions having a conductivity type opposite to a conductivity type of the single-crystalline semiconductor body; and f) forming a gate insulating film and a gate electrode on the single-crystalline semiconductor body between the source and drain regions.
Claim 2
Dependent Claim
184 words
A process for manufacturing a semiconductor device, comprising the steps of: a) forming, on a single-crystalline semiconductor region of a substrate, a first insulating film having a first opening portion with a first lateral dimension for exposing the single-crystalline semiconductor region therethrough; b) forming, on the first insulating film, a second insulating film having a second opening portion with a second lateral dimension larger than the first lateral dimension, the second opening portion overlying the first opening portion for exposing the single-crystalline semiconductor region therethrough; c) applying a non-single-crystalline material on a sidewall inside of the second opening portion; d) growing a single-crystalline semiconductor body in the first and the second opening portions to have a portion on the first insulating film; e) introducing a dopant into the portion of the single-crystalline semiconductor body which is on the first insulating film to form spaced source and drain regions having a conductivity type opposite to a conductivity type of the single-crystalline semiconductor body; and f) forming a gate insulating film and a gate electrode on the single-crystalline semiconductor body between the source and drain regions.
Claim 3
Dependent Claim
13 words
Said process according to claim 1, wherein the non-single-crystalline material is amorphous silicon.
Claim 4
Dependent Claim
13 words
Said process according to claim 1, wherein the non-single-crystalline material is polycrystalline silicon.
Claim 5
Dependent Claim
22 words
Said process according to claim 1, wherein the non-single-crystalline material is further applied on a sidewall inside of the first opening portion.
Claim 6
Dependent Claim
23 words
Said process according to claim 1, wherein the non-single-crystalline material is further applied on the first insulating film within the second opening portion.
Claim 7
Dependent Claim
19 words
Said process according to claim 1, wherein after forming the single-crystalline semiconductor body, the second insulating film is removed.
Claim 8
Dependent Claim
22 words
Said process according to claim 1, wherein after forming the gate electrode, the source and drain regions are formed by ion implantation.
Claim 9
Dependent Claim
18 words
Said process according to claim 1, wherein the single-crystalline semiconductor body is formed by vapor phase epitaxial growth.
Claim 10
Dependent Claim
30 words
Said process according to claim 1, wherein after depositing amorphous silicon as the non-single-crystalline material in said step (c), the single-crystalline semiconductor body is formed by solid phase epitaxial growth.
Claim 11
Dependent Claim
33 words
Said process according to claim 1, wherein the substrate is a single-crystalline substrate and the single-crystalline semiconductor region of the substrate is formed by implanting ions into a surface of the single-crystalline substrate.