US5611946A — Multi-wavelength laser system, probe station and …

Claim 1

Independent Claim 171 words

A probe station, comprising: a base, a chuck mounted on the base to hold a device to be analyzed or tested; a probe platen mounted on the base on which to mount probes for the device; a laser supplying an output beam at a fundamental wavelength; an optical system coupled with the laser having a single beam path on which the optical system receives the laser output beam, transforms the output beam into a plurality of wavelengths and selectively transmits one or more of the wavelengths along a single line, the optical system including a mechanism having at least two settings, each setting causing a different subset of the plurality of wavelengths to be transmitted along the single beam line; and a microscope mounted on the base, having a field of view of the device on the chuck, the microscope being positioned to receive the one or more wavelengths transmitted by the optical system and transmit the one or more wavelengths into the field of view along the single beam line.

Claim 2

Dependent Claim 171 words

A probe station, comprising: a base, a chuck mounted on the base to hold a device to be analyzed or tested; a probe platen mounted on the base on which to mount probes for the device; a laser supplying an output beam at a fundamental wavelength; an optical system coupled with the laser having a single beam path on which the optical system receives the laser output beam, transforms the output beam into a plurality of wavelengths and selectively transmits one or more of the wavelengths along a single line, the optical system including a mechanism having at least two settings, each setting causing a different subset of the plurality of wavelengths to be transmitted along the single beam line; and a microscope mounted on the base, having a field of view of the device on the chuck, the microscope being positioned to receive the one or more wavelengths transmitted by the optical system and transmit the one or more wavelengths into the field of view along the single beam line.

Claim 3

Dependent Claim 16 words

The probe station of claim 1, wherein the plurality of wavelengths includes at least three wavelengths.

Claim 4

Dependent Claim 40 words

The probe station of claim 1, wherein the optical system includes switchable optics which receive the plurality of wavelengths along the single beam path and selectively transmit at least one of the plurality of wavelengths along the single beam path.

Claim 5

Dependent Claim 16 words

The probe station of claim 1, further including a variable attenuator for the plurality of wavelengths.

Claim 6

Dependent Claim 67 words

The probe station of claim 1, wherein the laser is a solid state laser; and the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into at least one harmonic of the fundamental wavelength, and switchable optics to select the wavelength transmitted from among the at least one harmonic and the fundamental wavelength.

Claim 7

Dependent Claim 54 words

The probe station of claim 5, wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 8

Dependent Claim 62 words

The probe station of claim 1, wherein the laser is a solid state laser; and the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into a plurality of harmonics of the fundamental wavelength, and switchable optics to select the wavelength transmitted from among the plurality of harmonics.

Claim 9

Dependent Claim 54 words

The probe station of claim 7, wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 10

Dependent Claim 79 words

The probe station of claim 1, wherein the laser is a solid state laser; and the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into a plurality of harmonics of the fundamental wavelength; a variable attenuator in the single beam path for the plurality of wavelengths; and switchable optics to select the wavelength transmitted from among the plurality of harmonics and the fundamental wavelength.

Claim 11

Dependent Claim 54 words

The probe station of claim 9, wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 12

Dependent Claim 17 words

The probe station of claim 1, wherein the laser comprises a passively air cooled solid state laser.

Claim 13

Dependent Claim 18 words

The probe station of claim 1, wherein the laser comprises a passively air cooled, electro-optically Q-switched, Nd:YAG laser.

Claim 14

Dependent Claim 37 words

The probe station of claim 1, wherein the plurality of wavelengths includes at least one wavelength in the infrared range, at least one wavelength in the visible range, and at least one wavelength in the ultraviolet range.

Claim 15

Dependent Claim 152 words

A laser cutter comprising: a base; a stage mounted on the base to hold a subject; a laser supplying an output beam at a fundamental wavelength; an optical system coupled with the laser having a single beam path on which the optical system receives the laser output beam, transforms the output beam into a plurality of wavelengths and selectively transmits one or more of the wavelengths along a single beam line, the optical system including a mechanism having at least two settings, each setting causing a different subset of the plurality of wavelengths to be transmitted along the single beam line; and a microscope mounted on the base, having a field of view of the subject on the stage, the microscope being positioned to receive the one or more wavelengths transmitted by the optical system and transmit the one or more wavelengths into the field of view along the single beam line.

Claim 16

Dependent Claim 152 words

A laser cutter comprising: a base; a stage mounted on the base to hold a subject; a laser supplying an output beam at a fundamental wavelength; an optical system coupled with the laser having a single beam path on which the optical system receives the laser output beam, transforms the output beam into a plurality of wavelengths and selectively transmits one or more of the wavelengths along a single beam line, the optical system including a mechanism having at least two settings, each setting causing a different subset of the plurality of wavelengths to be transmitted along the single beam line; and a microscope mounted on the base, having a field of view of the subject on the stage, the microscope being positioned to receive the one or more wavelengths transmitted by the optical system and transmit the one or more wavelengths into the field of view along the single beam line.

Claim 17

Dependent Claim 16 words

The laser cutter of claim 14, wherein the plurality of wavelengths includes at least three wavelengths.

Claim 18

Dependent Claim 66 words

The laser cutter of claim 15, wherein the laser is a solid state laser; and the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into a plurality of harmonics of the fundamental wavelength, and switchable optics to select the wavelength transmitted from among the plurality of harmonics end the fundamental wavelength.

Claim 19

Dependent Claim 54 words

The laser cutter of claim 16, wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 20

Dependent Claim 67 words

The laser cutter of claim 14, wherein the laser is a solid state laser; and the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into at least one harmonic of the fundamental wavelength, and switchable optics to select the wavelength transmitted from among the at least one harmonic and the fundamental wavelength.

Claim 21

Dependent Claim 54 words

The laser cutter of claim 18, wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 22

Dependent Claim 40 words

The laser cutter of claim 14, wherein the optical system includes switchable optics which receive the plurality of wavelengths along the single beam path and selectively transmit at least one of the plurality of wavelengths along the single beam path.

Claim 23

Dependent Claim 16 words

The laser cutter of claim 14, further including a variable attenuator for the plurality of wavelengths.

Claim 24

Dependent Claim 79 words

The laser cutter of claim 14, wherein the laser is a solid state laser; and the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into a plurality of harmonics of the fundamental wavelength; a variable attenuator in the single beam path for the plurality of wavelengths; and switchable optics to select the wavelength transmitted from among the plurality of harmonics and the fundamental wavelength.

Claim 25

Dependent Claim 54 words

The laser cutter of claim 22, wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 26

Dependent Claim 17 words

The laser cutter of claim 14, wherein the laser comprises a passively air cooled solid state laser.

Claim 27

Dependent Claim 18 words

The laser cutter of claim 14, wherein the laser comprises a passively air cooled, electro-optically Q-switched, Nd:YAG laser.

Claim 28

Dependent Claim 106 words

A laser system for selectively supplying one or more of a plurality of wavelengths along a single beam line comprising: a laser supplying an output beam at a fundamental wavelength; and an optical system coupled with the laser having a single beam path on which the optical system receives the laser output beam transforms the output beam into a plurality of wavelengths and selectively transmits one or more of the wavelengths along a single beam line, the optical system including a mechanism having at least two settings, each setting causing a different subset of the plurality of wavelengths to be transmitted along the single beam line.

Claim 29

Dependent Claim 106 words

A laser system for selectively supplying one or more of a plurality of wavelengths along a single beam line comprising: a laser supplying an output beam at a fundamental wavelength; and an optical system coupled with the laser having a single beam path on which the optical system receives the laser output beam transforms the output beam into a plurality of wavelengths and selectively transmits one or more of the wavelengths along a single beam line, the optical system including a mechanism having at least two settings, each setting causing a different subset of the plurality of wavelengths to be transmitted along the single beam line.

Claim 30

Dependent Claim 40 words

The laser system of claim 26, wherein the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into at least one harmonic of the fundamental wavelength.

Claim 31

Dependent Claim 57 words

The laser system of claim 27, wherein the one or more non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 32

Dependent Claim 29 words

The laser system of claim 28, wherein the switchable optics selectively transmit at least one of the at least one harmonic of the fundamental wavelength and the fundamental wavelength.

Claim 33

Dependent Claim 53 words

The laser system of claim 27, Wherein the variable attenuator comprises: a half-wave plate in the single beam line tuned to the at least one harmonic and the fundamental wavelength; a polarizer; and a mechanism which controls relative angular position of the wave plate and the polarizer to attenuate the plurality of wavelengths.

Claim 34

Dependent Claim 30 words

The laser system of claim 30, wherein the plurality of wavelengths includes the fundamental wavelength, a second harmonic of the fundamental wavelength and a third harmonic of the fundamental wavelength.

Claim 35

Dependent Claim 30 words

The laser system of claim 30, wherein the plurality of wavelengths includes the fundamental wavelength, a second harmonic of the fundamental wavelength and a fourth harmonic of the fundamental wavelength.

Claim 36

Dependent Claim 48 words

The laser system of claim 27, wherein the variable attenuator comprises: a half-wave plate in the single beam line tuned to a plurality of harmonics; a polarizer; and a mechanism which controls relative angular position of the wave plate and the polarizer to attenuate the plurality of harmonics.

Claim 37

Dependent Claim 27 words

The laser system of claim 33, wherein the plurality of wavelengths includes a second harmonic of the fundamental wavelength and a third harmonic of the fundamental wavelength.

Claim 38

Dependent Claim 27 words

The laser system of claim 33, wherein the plurality of wavelengths includes a second harmonic of the fundamental wavelength and a fourth harmonic of the fundamental wavelength.

Claim 39

Dependent Claim 34 words

The laser system of claim 27, wherein the plurality of wavelengths include an infrared, fundamental wavelength, a visible second harmonic, and at least one of an ultraviolet third harmonic and an ultraviolet fourth harmonic.

Claim 40

Dependent Claim 40 words

The laser system of claim 26 wherein the optical system includes switchable optics which receive the plurality of wavelengths along the single beam path and selectively transmit at least one of the plurality of wavelengths along the single beam path.

Claim 41

Dependent Claim 40 words

The laser system of claim 37, wherein the optical system includes one or more non-linear optics in the single beam path which transform at least a portion of the output beam into at least one harmonic of the fundamental wavelength.

Claim 42

Dependent Claim 57 words

The laser system of claim 38, wherein the one or more non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 43

Dependent Claim 33 words

The laser system of claim 37, wherein the switchable optics include a plurality of filters, and a mechanism for switching a selected one of the plurality of filters into the single beam path.

Claim 44

Dependent Claim 82 words

The laser system of claim 37, wherein the switchable optics include a plurality of filters, and a mechanism for switching a selected one of the plurality of filters into the single beam path and wherein the non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 45

Dependent Claim 37 words

The laser system of claim 41, wherein at least one of the plurality of filters is the realigning optic and is mounted at a predetermined angle relative to the single beam path to compensate for the misalignment.

Claim 46

Dependent Claim 57 words

The laser system of claim 42, wherein the switchable optics include a plurality of filters and a mechanism for switching a selected one of the plurality of filters into the single beam path, and wherein the realigning optic includes at least one of the plurality of filters mounted at an angle relative to the single beam line.

Claim 47

Dependent Claim 21 words

The laser system of claim 41, wherein the realigning optic is one or more of the filters of the switchable optics.

Claim 48

Dependent Claim 17 words

The laser system of claim 26, wherein the laser comprises a passively air cooled solid state laser.

Claim 49

Dependent Claim 18 words

The laser system of claim 26, wherein the laser comprises a passively air cooled, electro-optically Q-switched, Nd:YAG laser.

Claim 50

Dependent Claim 139 words

A laser system for selectively supplying a plurality of wavelengths along a single beam line comprising: a solid state laser generating a beam at a fundamental wavelength; and an optical system coupled with the laser having a single beam path which receives the laser beam and produces an output beam along a single beam line, the optical system including one or more non-linear optics in the single beam path which generate at least one harmonic of the fundamental wavelength, a variable attenuator in the single beam path for the fundamental wavelength and the harmonic, the variable attenuator providing controlled attenuation outputs on the single beam line, and switchable optics in the single beam path for selecting one or more wavelengths of the output beam from among the fundamental wavelength and the at least one harmonic of the fundamental wavelength.

Claim 51

Dependent Claim 139 words

A laser system for selectively supplying a plurality of wavelengths along a single beam line comprising: a solid state laser generating a beam at a fundamental wavelength; and an optical system coupled with the laser having a single beam path which receives the laser beam and produces an output beam along a single beam line, the optical system including one or more non-linear optics in the single beam path which generate at least one harmonic of the fundamental wavelength, a variable attenuator in the single beam path for the fundamental wavelength and the harmonic, the variable attenuator providing controlled attenuation outputs on the single beam line, and switchable optics in the single beam path for selecting one or more wavelengths of the output beam from among the fundamental wavelength and the at least one harmonic of the fundamental wavelength.

Claim 52

Dependent Claim 33 words

The laser system of claim 47, wherein the switchable optics include a plurality of filters, and a mechanism for switching a selected one of the plurality of filters into the single beam path.

Claim 53

Dependent Claim 26 words

The laser system of claim 47, wherein the plurality of wavelengths include the fundamental wavelength, and a second and a third harmonic of the fundamental wavelength.

Claim 54

Dependent Claim 22 words

The laser system of claim 47, wherein the plurality of wavelengths include the fundamental wavelength, and a second and a fourth harmonic.

Claim 55

Dependent Claim 24 words

The laser system of claim 47, wherein the plurality of wavelengths include the fundamental wavelength, and a second, a third and a fourth harmonic.

Claim 56

Dependent Claim 34 words

The laser system of claim 47, wherein the plurality of wavelengths include an infrared, fundamental wavelength, a visible second harmonic, and at least one of an ultraviolet third harmonic and an ultraviolet fourth harmonic.

Claim 57

Dependent Claim 58 words

The laser system according to claim 47, wherein the one or more non-linear optics cause at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 58

Dependent Claim 149 words

A laser system for selectively supplying one or more of a plurality of wavelengths along a single beam line comprising: a passively air cooled, electro-optically Q-switched, Nd:YAG laser, generating a beam at a fundamental wavelength; and an optical system having a single beam path including a first non-linear crystal in the single beam path to generate a second harmonic of the fundamental wavelength; a second non-linear crystal in the single beam path to generate at least one of a third or a fourth harmonic of the fundamental wavelength; a variable attenuator in the single beam path for the fundamental wavelength and the harmonic, the variable attenuator providing controlled attenuation of light transmitted by the non-linear crystals, and switchable optics in the single beam path for selectively transmitting one or more wavelengths from among the fundamental wavelength, the second harmonic and at least one of the third and fourth harmonics.

Claim 59

Dependent Claim 149 words

A laser system for selectively supplying one or more of a plurality of wavelengths along a single beam line comprising: a passively air cooled, electro-optically Q-switched, Nd:YAG laser, generating a beam at a fundamental wavelength; and an optical system having a single beam path including a first non-linear crystal in the single beam path to generate a second harmonic of the fundamental wavelength; a second non-linear crystal in the single beam path to generate at least one of a third or a fourth harmonic of the fundamental wavelength; a variable attenuator in the single beam path for the fundamental wavelength and the harmonic, the variable attenuator providing controlled attenuation of light transmitted by the non-linear crystals, and switchable optics in the single beam path for selectively transmitting one or more wavelengths from among the fundamental wavelength, the second harmonic and at least one of the third and fourth harmonics.

Claim 60

Dependent Claim 72 words

The laser system of claim 51, wherein the variable attenuator comprises: a half-wave plate in the single beam path tuned to the fundamental wavelength, the second harmonic and at least one of the third and fourth harmonics; a polarizer; and a mechanism which controls relative angular position of the wave plate and the polarizer to attenuate the fundamental wavelength, the second harmonic and at least one of the third and fourth harmonics.

Claim 61

Dependent Claim 33 words

The laser system of claim 54, wherein the switchable optics include a plurality of filters, and a mechanism for switching a selected one of the plurality of filters into the single beam path.

Claim 62

Dependent Claim 61 words

The laser system of claim 54, wherein at least one of the first and second non-linear crystals causes at least one harmonic to be misaligned with the single beam line, the optical system further including a realigning optic which realigns any misaligned harmonic with the single beam line so that any harmonic, when selected, is aligned with the single beam line.

Claim 63

Dependent Claim 47 words

The laser system of claim 44, wherein the switchable optics include a plurality of filters, and a mechanism for switching a selected one of the plurality of filters into the single beam path and wherein at least one of the plurality of filters is the realigning optic.

Claim 64

Dependent Claim 65 words

The laser system of claim 44, wherein the switchable optics include a plurality of filters, and a mechanism for switching a selected one of the plurality of filters into the single beam path, and wherein at least one of the plurality of filters is the realigning optic and is mounted at a predetermined angle relative to the single beam line to compensate for the misalignment.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-03-17	2000-09-16	2001-03-18	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-03-17	2004-09-16	2005-03-18	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-03-17	2008-09-16	2009-03-18	$7700.00	Window Closed / Lapsed

Multi-wavelength laser system, probe station and laser cutter system using the same

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