US4778263A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Variable laser attenuator
Assignee: United States Department of Energy
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Filing: 1987-05-29
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Granted: 1988-10-18
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Expires: 2007-05-29
Abstract
Abstract The disclosure relates to low loss, high power variable attenuators comprng one or more transmissive and/or reflective multilayer dielectric filters. The attenuator is particularly suitable to use with unpolarized lasers such as excimer lasers. Beam attenuation is a function of beam polarization and the angle of incidence between the beam and the filter and is controlled by adjusting the angle of incidence the beam makes to the filter or filters. Filters are selected in accordance with beam wavelength.
Inventors
- 👤 Stephen R. Foltyn
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:45
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/20; G02B5/28; G02B5/285; G02B26/00; G02B26/02; G02B26/023; G02B27/00; G02B27/28; G02B27/281; H; H01; H01S; H01S3/00; H01S3/005
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
76 words
An apparatus for attenuating a laser beam having a selected wavelength comprising: at least one rotatably positionable transmissive interference filter having a transmission response edge functionally related to said selected wavelength; and means for positioning said filter within the path of said laser beam at a selectable angle of incidence thereto, said filter being positioned to intercept and partially transmit said beam, to thereby attenuate said beam an amount functionally related to said angle of incidence.
Claim 2
Independent Claim
76 words
An apparatus for attenuating a laser beam having a selected wavelength comprising: at least one rotatably positionable transmissive interference filter having a transmission response edge functionally related to said selected wavelength; and means for positioning said filter within the path of said laser beam at a selectable angle of incidence thereto, said filter being positioned to intercept and partially transmit said beam, to thereby attenuate said beam an amount functionally related to said angle of incidence.
Claim 3
Dependent Claim
19 words
The invention of claim 1 wherein said filter comprises multilayered dielectric material on one side of a transmissive element.
Claim 4
Dependent Claim
19 words
The invention of claim 1 wherein said filter comprises multilayered dielectric material on both sides of a transmissive element.
Claim 5
Dependent Claim
15 words
The invention of claim 1 further comprising a beam refractor for axially aligning said beam.
Claim 6
Dependent Claim
12 words
The invention of claim 1 wherein said laser beam is essentially unpolarized.
Claim 7
Dependent Claim
14 words
The invention of claim 5 wherein said laser beam is from an excimer laser.
Claim 8
Dependent Claim
14 words
The invention of claim 1 wherein each said filter comprises a nonpolarizing edge filter.
Claim 9
Dependent Claim
11 words
The invention of claim 1 wherein said laser beam is polarized.
Claim 10
Dependent Claim
20 words
The invention of claim 1 wherein each said filter comprises a multilayer dielectric filter comprising quarter-wave layers of dielectric material.
Claim 11
Dependent Claim
14 words
The invention of claim 1 wherein each said filter comprises a band pass filter.
Claim 12
Independent Claim
81 words
An apparatus for attenuating a laser beam having a selected wavelength comprising: a plurality of selectively spaceable and rotatably positionable reflective multilayer dielectric interference filters having corresponding reflection response edges functionally related to said selected wavelength; means for positioning each of said filters within the path of an input laser beam at a selectable angle of incidence thereto, said filters being positioned to consecutively intercept said beam, to thereby attenuate said beam an amount functionally related to said angle of incidence.
Claim 13
Independent Claim
81 words
An apparatus for attenuating a laser beam having a selected wavelength comprising: a plurality of selectively spaceable and rotatably positionable reflective multilayer dielectric interference filters having corresponding reflection response edges functionally related to said selected wavelength; means for positioning each of said filters within the path of an input laser beam at a selectable angle of incidence thereto, said filters being positioned to consecutively intercept said beam, to thereby attenuate said beam an amount functionally related to said angle of incidence.
Claim 14
Dependent Claim
12 words
The invention of claim 11 wherein said laser beam is essentially unpolarized.
Claim 15
Dependent Claim
14 words
The invention of claim 12 wherein said laser beam is from an excimer laser.
Claim 16
Dependent Claim
18 words
The invention of claim 11 wherein at least one of said dielectric filters comprises a nonpolarizing edge filter.
Claim 17
Dependent Claim
11 words
The invention of claim 11 wherein said laser beam is polarized.
Claim 18
Dependent Claim
13 words
The invention of claim 11 wherein said dielectric filters comprise quarter-wave dielectric reflectors.
Claim 19
Dependent Claim
13 words
The invention of claim 11 wherein said dielectric filters comprise long pass filters.
Claim 20
Dependent Claim
13 words
The invention of claim 11 wherein said dielectric filters comprise short pass filters.
Claim 21
Dependent Claim
13 words
The invention of claim 11 wherein said dielectric filters comprise narrow bandwidth filters.
Claim 22
Independent Claim
83 words
An apparatus for attenuating a laser beam having a selected wavelength and amount of polarization, said apparatus comprising: a plurality of selectively spaceable and rotatably positionable interference filters; means for positioning each of said filters within the path of an input laser beam at a selectable angle of incidence thereto, said filters being positioned to consecutively intercept said beam, to thereby attenuate said beam an amount functionally related to said angle of incidence and the amount of polarization of said input laser beam.
Claim 23
Independent Claim
83 words
An apparatus for attenuating a laser beam having a selected wavelength and amount of polarization, said apparatus comprising: a plurality of selectively spaceable and rotatably positionable interference filters; means for positioning each of said filters within the path of an input laser beam at a selectable angle of incidence thereto, said filters being positioned to consecutively intercept said beam, to thereby attenuate said beam an amount functionally related to said angle of incidence and the amount of polarization of said input laser beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-18 | 1992-04-18 | 1992-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-18 | 1996-04-18 | 1996-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-18 | 2000-04-18 | 2000-10-18 | $7700.00 | Window Closed / Lapsed |