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US5519724A Expired / Lapsed US ⏱️ 0.0 years remaining

Multiwavelength and multibeam diffractive optics system for material processing

Assignee: Panasonic Corp of North America
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Filing: 1994-08-02
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Granted: 1996-05-21
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Expires: 2014-08-02
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Abstract

Abstract A laser apparatus having a laser that generates at least one laser beam of a fundamental wavelength, a diffractive optical element that converts the laser beam into a plurality of light beams at the fundamental wavelength, and a harmonic crystal that converts the plurality of light beams at the fundamental wavelength into respective light beams having respective wavelengths which are harmonically related to the fundamental wavelength. By splitting the laser beam into a plurality of beams before converting to harmonic wavelengths using the harmonic crystal, the crystal volume is more efficiently used and the thermal stress on the crystal is reduced. In an alternative embodiment, the invention provides for the use of a plurality of harmonic crystals in series to convert the wavelength to shorter harmonics. The apparatus employs a method of generating a plurality of laser light beams at a plurality of wavelengths comprising by generating at least one laser light beam at a fundamental wavelength, converting that laser light beam into a plurality of light beams at the fundamental wavelength using a diffractive optical element, and converting the plurality of light beams at the fundamental wavelength into a plurality of light beams which are harmonically related to the fundamental wavelength using a harmonic crystal.

Inventors

  • 👤 Abdelkrim Tatah

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 23:51
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/067; B23K26/0673; B23K26/0604; B23K26/064; B23K26/0643; B23K26/0648; B23K26/0665; G; G02; G02F; G02F1/00; G02F1/35; G02F1/37; H; H01; H01S; H01S3/00; H01S3/005

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 119 words
A laser apparatus comprising; (a) means for generating at least one laser light beam at a fundamental wavelength; (b) diffractive means for converting said laser light beam into a plurality of light beams at the fundamental wavelength; and (c) harmonic generator means for converting said plurality of light beams at the fundamental wavelength into respective light beams having respective wavelengths which are harmonically related to the fundamental wavelength after said laser light beam has been converted into said plurality of light beams, whereby said plurality of light beams at the fundamental wavelength produce reduced thermal stress in said harmonic generator means, and more efficiently use harmonic generator means volume, than a single laser light beam at the fundamental wavelength.
Claim 2
Dependent Claim 119 words
A laser apparatus comprising; (a) means for generating at least one laser light beam at a fundamental wavelength; (b) diffractive means for converting said laser light beam into a plurality of light beams at the fundamental wavelength; and (c) harmonic generator means for converting said plurality of light beams at the fundamental wavelength into respective light beams having respective wavelengths which are harmonically related to the fundamental wavelength after said laser light beam has been converted into said plurality of light beams, whereby said plurality of light beams at the fundamental wavelength produce reduced thermal stress in said harmonic generator means, and more efficiently use harmonic generator means volume, than a single laser light beam at the fundamental wavelength.
Claim 3
Dependent Claim 33 words
A laser apparatus as claimed in claim 1 wherein said means for converting said laser light beam into a plurality of light beams at the fundamental wavelength is a fan-out diffractive optical mask.
Claim 4
Dependent Claim 35 words
A laser apparatus as claimed in claim 1 wherein said means for converting said plurality of light beams at the fundamental wavelength into a plurality of light beams of harmonic wavelengths comprises a harmonic crystal.
Claim 5
Dependent Claim 111 words
Apparatus for generating multiple light beams having a predetermined wavelength comprising: a coherent light source which provides a light beam having a fundamental wavelength; diffractive means for separating the light beam into multiple coherent light beams; and a harmonic generator crystal, configured to receive each of the multiple coherent light beams at respectively different locations, to provide the multiple light beams having the predetermined wavelength after said diffractive means separates said light beam into said multiple coherent light beams, whereby the multiple coherent light beams produce reduced thermal stress in the harmonic generator crystal, and more efficiently use harmonic generator crystal volume, than a single light beam at the fundamental wavelength.
Claim 6
Dependent Claim 111 words
Apparatus for generating multiple light beams having a predetermined wavelength comprising: a coherent light source which provides a light beam having a fundamental wavelength; diffractive means for separating the light beam into multiple coherent light beams; and a harmonic generator crystal, configured to receive each of the multiple coherent light beams at respectively different locations, to provide the multiple light beams having the predetermined wavelength after said diffractive means separates said light beam into said multiple coherent light beams, whereby the multiple coherent light beams produce reduced thermal stress in the harmonic generator crystal, and more efficiently use harmonic generator crystal volume, than a single light beam at the fundamental wavelength.
Claim 7
Dependent Claim 70 words
The apparatus of claim 4 wherein the means for separating the light beam provided by the light source into multiple light beams comprises: a beam expander-collimator which receives the light beam and provides an expanded light beam having a wider cross-section than the light beam provided by the light source; and a diffractive optical element having predetermined etched patterns which transform the expanded light beam into the multiple light beams.
Claim 8
Independent Claim 116 words
A method of generating a plurality of laser light beams at a plurality of wavelengths comprising; (a) generating at least one laser light beam at a fundamental wavelength; (b) converting said laser light beam at the fundamental wavelength into a plurality of light beams at the fundamental wavelength; and then (c) converting said plurality of light beams at the fundamental wavelength into a plurality of light beams at wavelengths which are harmonically related to the fundamental wavelength using a harmonic generator, whereby said plurality of light beams at the fundamental wavelength produce reduced thermal stress in said harmonic generator, and more efficiently use harmonic generator volume, than a single laser light beam at the fundamental wavelength.
Claim 9
Independent Claim 116 words
A method of generating a plurality of laser light beams at a plurality of wavelengths comprising; (a) generating at least one laser light beam at a fundamental wavelength; (b) converting said laser light beam at the fundamental wavelength into a plurality of light beams at the fundamental wavelength; and then (c) converting said plurality of light beams at the fundamental wavelength into a plurality of light beams at wavelengths which are harmonically related to the fundamental wavelength using a harmonic generator, whereby said plurality of light beams at the fundamental wavelength produce reduced thermal stress in said harmonic generator, and more efficiently use harmonic generator volume, than a single laser light beam at the fundamental wavelength.
Claim 10
Dependent Claim 59 words
The method of claim 6 wherein a diffractive optical element is used to convert said laser light beam into a plurality of laser light beams at fundamental wavelengths and a harmonic crystal is used to convert said plurality of light beams at the fundamental wavelength into said plurality of light beams which are harmonically related to the fundamental wavelength.
Claim 11
Dependent Claim 15 words
The method of claim 7 wherein a plurality of harmonic crystals are used in series.
Claim 12
Dependent Claim 29 words
The method of claim 6 wherein said plurality of light beams at the fundamental wavelength are simultaneously converted into light beams which are harmonically related to the fundamental wavelength.
Claim 13
Independent Claim 124 words
A method of treating a material that comprises the steps of: (a) generating at least one laser light beam; (b) converting said laser light beam at a fundamental wavelength into a plurality of light beams at the fundamental wavelength; (c) then converting said plurality of light beams at a fundamental wavelength into a plurality of beams which are harmonically related to the fundamental wavelength using a harmonic generator; and (d) directing said light beams at a fundamental wavelength and said light beams at a harmonic wavelength onto a material, whereby said plurality of light beams at the fundamental wavelength produce reduced thermal stress in said harmonic generator, and more efficiently use harmonic generator volume, than a single laser light beam at the fundamental wavelength.
Claim 14
Independent Claim 124 words
A method of treating a material that comprises the steps of: (a) generating at least one laser light beam; (b) converting said laser light beam at a fundamental wavelength into a plurality of light beams at the fundamental wavelength; (c) then converting said plurality of light beams at a fundamental wavelength into a plurality of beams which are harmonically related to the fundamental wavelength using a harmonic generator; and (d) directing said light beams at a fundamental wavelength and said light beams at a harmonic wavelength onto a material, whereby said plurality of light beams at the fundamental wavelength produce reduced thermal stress in said harmonic generator, and more efficiently use harmonic generator volume, than a single laser light beam at the fundamental wavelength.
Claim 15
Dependent Claim 59 words
A method for material treatment as claimed in claim 10 wherein said material has at least a first and a second layer and said step of directing comprises directing a light beam at a fundamental wavelength onto said first layer of said material and directing a light beam at a harmonic wavelength onto said second layer of said material.

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-05-21 1999-11-20 2000-05-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-05-21 2003-11-20 2004-05-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-05-21 2007-11-20 2008-05-21 $7700.00 Window Closed / Lapsed

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