US4141456A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for aligning wafers
Assignee: RCA Corp
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Filing: 1976-08-30
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Granted: 1979-02-27
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Expires: 1996-08-30
Abstract
Abstract The device includes an alignment station at which an operator can align a wafer under a microscope. Once the wafer is properly aligned, a transfer chuck is brought into position above the wafer and aligned with alignment pins located in fixed positions at the alignment station. The wafer is then fixed to the transfer chuck and released from the alignment station. The transfer chuck is moved into proper alignment with alignment pins at a remote operation station, such as an automatic scribing station. The invention allows the operator to view the wafer with semiconductor devices facing the operator and provides for flipping the wafer over through the use of the transfer chuck so that the laser scriber can scribe the wafer on the side away from the semiconductor devices.
Inventors
- 👤 Lewis F. Hart
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:56
CPC Classifications
H; H05; H05K; H05K13/00; H05K13/0015; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49762; Y10T29/53; Y10T29/5313; Y10T29/53191; Y10T29/53261; Y10T29/53909; Y10T29/53913
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
136 words
An apparatus for aligning wafers comprising: (a) an alignment station including means for contacting and selectively holding a wafer in a fixed position; (b) a transfer chuck including means for contacting and selectively holding said wafer in a fixed position, said transfer chuck being separate and distinct from said alignment station; (c) means associated with said alignment station for receiving said transfer chuck in a predetermined orientation; (d) a microscope located in a fixed position relative to said alignment station in order that an operator will view and then align a wafer positioned at said alignment station relative to reference lines in said microscope; and (e) a remote operation station including means for contacting and selectively holding said wafer in a fixed position as well as means for receiving said transfer chuck in a predetermined orientation.
Claim 2
Independent Claim
136 words
An apparatus for aligning wafers comprising: (a) an alignment station including means for contacting and selectively holding a wafer in a fixed position; (b) a transfer chuck including means for contacting and selectively holding said wafer in a fixed position, said transfer chuck being separate and distinct from said alignment station; (c) means associated with said alignment station for receiving said transfer chuck in a predetermined orientation; (d) a microscope located in a fixed position relative to said alignment station in order that an operator will view and then align a wafer positioned at said alignment station relative to reference lines in said microscope; and (e) a remote operation station including means for contacting and selectively holding said wafer in a fixed position as well as means for receiving said transfer chuck in a predetermined orientation.
Claim 3
Dependent Claim
32 words
The apparatus of claim 1 in which said means for selectively holding a wafer at said alignment station comprises a compound capable of moving said wafer in the x and y directions.
Claim 4
Dependent Claim
28 words
The apparatus of claim 2 further comprising a wafer holder which fits into said compound and which may be rotated or removed in any direction on said compound.
Claim 5
Dependent Claim
20 words
The apparatus of claim 3 in which said wafer holder has a bevelled edge to facilitate movement by said operator.
Claim 6
Dependent Claim
39 words
The apparatus of claim 1 wherein said means for selectively holding a wafer includes means for selectively subjecting said wafer to a pressure less than atmospheric pressure whereby said wafer is held in a fixed position by atmospheric pressure.
Claim 7
Dependent Claim
48 words
The apparatus of claim 1 wherein said means for selectively holding said wafer included in said transfer chuck comprises means for subjecting said wafer to a pressure less than atmospheric pressure whereby said wafer will be held in a fixed position on said transfer chuck by atmospheric pressure.
Claim 8
Dependent Claim
32 words
The apparatus of claim 1 wherein said means associated with said alignment station for receiving said transfer chuck comprises a set of alignment pins which contact the edges of said transfer chuck.
Claim 9
Dependent Claim
44 words
The apparatus of claim 1 wherein said means for selectively holding said wafer at said remote operation station comprises means for subjecting said wafer to a pressure less than atmospheric pressure whereby said wafer will be held in a fixed position by atmospheric pressure.
Claim 10
Dependent Claim
37 words
The apparatus of claim 1 wherein said means for receiving said transfer chuck at said remote operation station includes alignment pins which contact the edge of said transfer chuck in a predetermined orientation of said transfer chuck.
Claim 11
Dependent Claim
13 words
The apparatus of claim 1 wherein said microscope is a split image microscope.
Claim 12
Independent Claim
200 words
A method of aligning a wafer comprising the steps of: (a) placing a wafer onto means for selectively holding said wafer at an alignment station where it can be viewed by an operator through a microscope having alignment indicia therein; (b) adjusting the position of said means for selectively holding said wafer to cause selected portions of said wafer to coincide with said indicia; (c) fixing the position of said means for selectively holding said wafer at said alignment station; (d) moving a transfer chuck into position over said wafer and in contact with alignment pins in fixed positions relative to said wafer; (e) lowering said transfer chuck onto said wafer while keeping said transfer chuck in contact with said alignment pins; (f) attaching said transfer chuck to said wafer; (g) releasing said wafer from said means for selectively holding said wafer at said alignment station; (h) moving said transfer chuck into position at a remote operation station and in contact with a set of alignment pins; (i) lowering said transfer chuck into position at a remote operation station while keeping said transfer chuck in contact with said alignment pins; (j) attaching said transfer chuck to said remote operation station.
Claim 13
Independent Claim
200 words
A method of aligning a wafer comprising the steps of: (a) placing a wafer onto means for selectively holding said wafer at an alignment station where it can be viewed by an operator through a microscope having alignment indicia therein; (b) adjusting the position of said means for selectively holding said wafer to cause selected portions of said wafer to coincide with said indicia; (c) fixing the position of said means for selectively holding said wafer at said alignment station; (d) moving a transfer chuck into position over said wafer and in contact with alignment pins in fixed positions relative to said wafer; (e) lowering said transfer chuck onto said wafer while keeping said transfer chuck in contact with said alignment pins; (f) attaching said transfer chuck to said wafer; (g) releasing said wafer from said means for selectively holding said wafer at said alignment station; (h) moving said transfer chuck into position at a remote operation station and in contact with a set of alignment pins; (i) lowering said transfer chuck into position at a remote operation station while keeping said transfer chuck in contact with said alignment pins; (j) attaching said transfer chuck to said remote operation station.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-02-26 | 1982-08-28 | 1983-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-02-26 | 1986-08-28 | 1987-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-02-26 | 1990-08-28 | 1991-02-27 | $7700.00 | Window Closed / Lapsed |