US3816700A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for facilitating laser scribing
Assignee: Union Carbide Corp
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Filing: 1973-07-19
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Granted: 1974-06-11
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Expires: 1993-07-19
Abstract
Abstract A substrate alignment assembly station is provided next to a scribing assembly station for receiving a substrate from the alignment station after alignment for automatic scribing. By this arrangement, a single operator can align a substrate during the period of time a previous substrate is being scribed so that a stack of substrates may be scribed in rapid succession.
Inventors
- 👤 M Weiner
- 👤 F Pothoven
- 👤 C Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:53
CPC Classifications
B; B28; B28D; B28D5/00; B28D5/0058; B28D5/0082; B28D5/0094; B23; B23K; B23K26/00; B23K26/02; B23K26/04; B23K26/042; B23K26/36; B23K26/362; B23K26/364; B28D5/0005; B28D5/0011
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
276 words
An apparatus for laser scribing a stack of substrates in rapid succession comprising: an alignment assembly station including a first holding chuck; a first substrate mounting plate receivable in a given orientation in said first holding chuck; an alignment microscope in a fixed position relative to said first holding chuck for viewing and aligning a substrate positioned on said first mounting plate relative to reference lines in said microscope; securing means for holding said substrate in an adjusted position on said first substrate mounting plate after aligning the substrate; a scribing assembly station including a second holding chuck disposed adjacent to said first holding chuck and of the same configuration as said first holding chuck so as to hold said first mounting plate in said same given orientation it was held in said first holding chuck; means guiding said second holding chuck to a given initial set position; automatic laser beam scribing equipment having a predetermined relationship to said second holding chuck when in said set position so that when said first substrate mounting plate is transferred to said holding chuck, said substrate is correctly aligned for automatic scribing by said laser beam; and a second substrate mounting plate receivable in said first holding chuck in said given orientation for enabling another substrate to be aligned thereon during the period of time that said first substrate is being automatically scribed, whereby said first and second substrate mounting plates may be transferred between said first and second holding chucks to enable a single operator to scribe a stack of substrates in rapid succession, one substrate being aligned during the period that the preceeding substrate is being scribed.
Claim 2
Independent Claim
276 words
An apparatus for laser scribing a stack of substrates in rapid succession comprising: an alignment assembly station including a first holding chuck; a first substrate mounting plate receivable in a given orientation in said first holding chuck; an alignment microscope in a fixed position relative to said first holding chuck for viewing and aligning a substrate positioned on said first mounting plate relative to reference lines in said microscope; securing means for holding said substrate in an adjusted position on said first substrate mounting plate after aligning the substrate; a scribing assembly station including a second holding chuck disposed adjacent to said first holding chuck and of the same configuration as said first holding chuck so as to hold said first mounting plate in said same given orientation it was held in said first holding chuck; means guiding said second holding chuck to a given initial set position; automatic laser beam scribing equipment having a predetermined relationship to said second holding chuck when in said set position so that when said first substrate mounting plate is transferred to said holding chuck, said substrate is correctly aligned for automatic scribing by said laser beam; and a second substrate mounting plate receivable in said first holding chuck in said given orientation for enabling another substrate to be aligned thereon during the period of time that said first substrate is being automatically scribed, whereby said first and second substrate mounting plates may be transferred between said first and second holding chucks to enable a single operator to scribe a stack of substrates in rapid succession, one substrate being aligned during the period that the preceeding substrate is being scribed.
Claim 3
Dependent Claim
106 words
An apparatus according to claim 1, in which said first substrate mounting plate has on its underside three engaging points defining the vertices of a triangle, said first holding chuck including a kinematic mountinG means comprised of a one point contact for a first one of said points; a two point contact for a second one of said points; and a three point contact for the third of said points, said kinematic mount assuring exact orientation of said substrate mounting plate on said first holding chuck so that repeatable positioning is assured, said second substrate mounting plate and second holding chuck including identical kinematic mounting means.
Claim 4
Dependent Claim
103 words
An apparatus according to claim 2, in which said securing means is effected by vacuum sealing and in which said three engaging points constitute three rounded projections, said one point contact comprising a flat disc at a given level, said two point contact comprising a pair of parallel members, and said three point contact comprising three members disposed at the vertices of an equilateral triangle, said first substrate mounting plate also including at least one indexing pin adjacent to an edge and said first holding chuck also including an indexing hole receiving said pin when said first substrate holding plate is substantially oriented.
Claim 5
Dependent Claim
111 words
An apparatus according to claim 3, in which each of the first and second substrate mounting plates includes a hole passing from its underside to its top surface upon which a substrate is received, said vacuum sealing means communicating a reduced pressure through said hole to the underside of a substrate when said substrate mounting plate is received in the holding chuck; a check valve in said hole so that a vacuum is maintained while transferring the substrate mounting plate from said first holding chuck to said second holding chuck; and a vacuum release valve manually operable to permit removal of a substrate after scribing preparatory to receiving a next substrate.
References Cited (Backward Citations)
US3651401A
Cited
US3626141A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-06-10 | 1977-12-10 | 1978-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-06-10 | 1981-12-10 | 1982-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-06-10 | 1985-12-10 | 1986-06-11 | $7700.00 | Window Closed / Lapsed |