US3626141A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser scribing apparatus
Assignee: Quantronix Inc
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Filing: 1970-04-30
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Granted: 1971-12-07
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Expires: 1990-04-30
Abstract
Abstract Apparatus for scribing semiconductor wafers including a laser, focusing optics and a drive mechanism for moving the focal spot of the laser beam along a prescribed path on the surface of a semiconductor wafer. Globules of material ejected from the wafer by the action of the laser beam are prevented from falling back upon the surface of the semiconductor wafer or from depositing on the focusing optics by a vacuum device which draws in air from the region of the focal spot together with entrained globules of semiconductor material, or by a transparent film disposed parallel to and slightly spaced apart from the surface of the semiconductor wafer to catch the molten globules of semiconductor material, or by coating the semiconductor wafer with a substance which prevents the ejected globules from sticking.
Inventors
- 👤 Richard T Daly
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 15:13
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/08; B23K26/083; B23K26/0853; B23K26/009; B23K26/14; B23K26/142; B23K26/16; B23K26/18
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
148 words
Scribing apparatus comprising: means for holding an object to be scribed; a laser device for producing a laser beam of sufficient energy to vaporize a portion of the object to be scribed; means for focusing said laser beam from said laser device on said object to be scribed; drive means for moving said focusing means relative to said object holding means to cause the focal spot of said laser beam to describe a continuous line on the surface of said object to be scribed; means for directing a stream of gas into thE region of said focal spot of said laser beam; and a vacuum inlet disposed adjacent the region of said focal spot of said laser beam for withdrawing gas from the region of said focal spot together with entrained globules of material ejected from said object to be scribed by the action of said laser beam.
Claim 2
Dependent Claim
148 words
Scribing apparatus comprising: means for holding an object to be scribed; a laser device for producing a laser beam of sufficient energy to vaporize a portion of the object to be scribed; means for focusing said laser beam from said laser device on said object to be scribed; drive means for moving said focusing means relative to said object holding means to cause the focal spot of said laser beam to describe a continuous line on the surface of said object to be scribed; means for directing a stream of gas into thE region of said focal spot of said laser beam; and a vacuum inlet disposed adjacent the region of said focal spot of said laser beam for withdrawing gas from the region of said focal spot together with entrained globules of material ejected from said object to be scribed by the action of said laser beam.
Claim 3
Dependent Claim
81 words
The apparatus of claim 1, wherein said means for directing a stream of gas comprises a first cylindrical shroud surrounding the region of said focal spot of said laser beam; and wherein said vacuum inlet comprises a second cylindrical shroud surrounding said first cylindrical shroud for withdrawing gas from the region of said focal spot on said laser beam with entrained globules of material ejected from the surface of said object to be scribed by the action of said laser beam
Claim 4
Dependent Claim
33 words
The scribing apparatus of claim 2, wherein the mouth of said second shroud is disposed substantially closer to the surface of said object to be scribed than the mouth of said first shroud.
Claim 5
Dependent Claim
33 words
The scribing apparatus of claim 1 wherein said focusing means produces a focal spot which is elongated in the direction of motion of said focal spot relative to said object to be scribed.
Claim 6
Dependent Claim
14 words
The scribing apparatus of claim 1 wherein said laser device comprises a Q-switched laser.
Claim 7
Dependent Claim
44 words
The scribing apparatus of claim 1 wherein said drive means moves said focusing means relative to said object-holding means at a rate so that the output pulses from said laser device will make a series of overlapping holes in said object to be scribed.
Claim 8
Dependent Claim
140 words
Scribing apparatus comprising: means for holding an object to be scribed; a laser device for producing a laser beam of sufficient energy to vaporize a portion of the object to be scribed; means for focusing said laser beam from said laser device on said object to be scribed; drive means for moving said focusing means relative to said object-holding means to cause the focal spot of said laser beam to describe a continuous line on the surface of said object to be scribed; a shroud surrounding the region of said focal spot of said laser beam; and a vacuum inlet connected to the interior of said shroud for withdrawing air from the region of said focal spot of said laser beam with entrained globules of material ejected from said object to be scribed by the action of said laser beam.
Claim 9
Dependent Claim
140 words
Scribing apparatus comprising: means for holding an object to be scribed; a laser device for producing a laser beam of sufficient energy to vaporize a portion of the object to be scribed; means for focusing said laser beam from said laser device on said object to be scribed; drive means for moving said focusing means relative to said object-holding means to cause the focal spot of said laser beam to describe a continuous line on the surface of said object to be scribed; a shroud surrounding the region of said focal spot of said laser beam; and a vacuum inlet connected to the interior of said shroud for withdrawing air from the region of said focal spot of said laser beam with entrained globules of material ejected from said object to be scribed by the action of said laser beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-06 | 1975-06-07 | 1975-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-06 | 1979-06-07 | 1979-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-06 | 1983-06-07 | 1983-12-07 | $7700.00 | Window Closed / Lapsed |