US4976930A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for inducing photochemical reaction
Assignee: Laserfront Technologies Inc
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Filing: 1989-08-03
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Granted: 1990-12-11
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Expires: 2009-08-03
Abstract
Abstract According to a method and apparatus for inducing a photochemical reaction, a substrate is placed in a closed cell with a window for transmitting an ultraviolet beam therethrough and is located to oppose the window, a gas is filled to cause the phtoochemical reaction upon irradiation of the ultraviolet beam into the cell, ultraviolet pulses are repetitively controlled to emit at a predetermined intensity, an ultraviolet beam size and shape are adjusted in accordance with a size and a shape of an irradiation portion of the substrate, the repetition frequency of the ultraviolet beam is adjusted and set to effectively cause the photochemical reaction on the substrate in accordance with the adjusted ultraviolet beam size and shape, and the ultraviolet beam having the set beam size and shape at the repetition frequency is irradiated through the window of the cell.
Inventors
- 👤 Shunji Kishida
- 👤 Hiroyuki Yokoyama
- 👤 Yukio Morishige
- 👤 Kunihiko Washio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 22:20
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/70808; C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/483; G03F7/004; G03F7/70858; G03F7/70866
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
180 words
A method of inducing a photochemical reaction to form a film in a micro-area on a substrate, comprising the steps of: placing said substrate in a closed cell with a window for transmitting an ultraviolet beam therethrough, said substrate being located to oppose said window; filling a chromium gas subjected to the photochemical reaction upon irradiation of the ultraviolet beam in said cell; emitting ultraviolet pulses with adjustable pulse repetition frequency of at least 400 hz at a predetermined intensity with a single laser; adjusting and setting an ultraviolet beam size and shape of at most 100 μm diameter in accordance with a size and shape of an irradiation portion of said substrate; adjusting and setting the repetition frequency of the ultraviolet beam so as to optimize a thickness of a gas adsorption layer formed in the micro- area immediately prior to a radiation of each of said ultraviolet pulses, for the adjusted ultraviolet beam size and shape; and radiating the ultraviolet beam having the set beam size and shape at the repetition frequency through said window of said cell.
Claim 2
Independent Claim
180 words
A method of inducing a photochemical reaction to form a film in a micro-area on a substrate, comprising the steps of: placing said substrate in a closed cell with a window for transmitting an ultraviolet beam therethrough, said substrate being located to oppose said window; filling a chromium gas subjected to the photochemical reaction upon irradiation of the ultraviolet beam in said cell; emitting ultraviolet pulses with adjustable pulse repetition frequency of at least 400 hz at a predetermined intensity with a single laser; adjusting and setting an ultraviolet beam size and shape of at most 100 μm diameter in accordance with a size and shape of an irradiation portion of said substrate; adjusting and setting the repetition frequency of the ultraviolet beam so as to optimize a thickness of a gas adsorption layer formed in the micro- area immediately prior to a radiation of each of said ultraviolet pulses, for the adjusted ultraviolet beam size and shape; and radiating the ultraviolet beam having the set beam size and shape at the repetition frequency through said window of said cell.
Claim 3
Dependent Claim
14 words
A method as in claim 1, wherein the photochemical reaction is photochemical vapor deposition.
Claim 4
Dependent Claim
15 words
A method as in claim 1, wherein the photochemical reaction is laser chemical vapor deposition.
Claim 5
Dependent Claim
18 words
A method according to claim 1, wherein the ultraviolet light source is a continuously excited Q-switch Nd:solid-state laser.
Claim 6
Independent Claim
214 words
An apparatus for inducing a photochemical reaction to form a film in a micro-area on a substrate, comprising: a cell having a window for transmitting an ultraviolet beam therethrough and a holding mechanism for holding said substrate; a gas supply system for supplying a chromium carbonyl gas subjected to the photochemical reaction upon radiation of the ultraviolet beam; a single continuously excited Q-switch Nd:solid-state laser having a repetition frequency which is adjustably set at at least 400 Hz by a laser control signal; an ultraviolet harmonic generator for receiving an output from said continuously excited Q-switch Nd:solid-state laser and generating ultraviolet harmonic pulses; an optical system for guiding the ultraviolet harmonic pulses from said ultraviolet harmonic generator onto said substrate through said window and adjustably setting an ultraviolet beam size and shape of at most 100 μm diameter in accordance with an irradiation area and a shape of said substrate; and a control unit for supplying an optical system control signal to said optical system and said laser control signal to said continuously excited Q-switch Nd:solid-state laser and controlling the beam size and the repetition frequency so as to optimize a thickness of a gas adsorption layer formed in the micro- area immediately prior to a radiation of each of said ultraviolet harmonic pulses.
Claim 7
Independent Claim
214 words
An apparatus for inducing a photochemical reaction to form a film in a micro-area on a substrate, comprising: a cell having a window for transmitting an ultraviolet beam therethrough and a holding mechanism for holding said substrate; a gas supply system for supplying a chromium carbonyl gas subjected to the photochemical reaction upon radiation of the ultraviolet beam; a single continuously excited Q-switch Nd:solid-state laser having a repetition frequency which is adjustably set at at least 400 Hz by a laser control signal; an ultraviolet harmonic generator for receiving an output from said continuously excited Q-switch Nd:solid-state laser and generating ultraviolet harmonic pulses; an optical system for guiding the ultraviolet harmonic pulses from said ultraviolet harmonic generator onto said substrate through said window and adjustably setting an ultraviolet beam size and shape of at most 100 μm diameter in accordance with an irradiation area and a shape of said substrate; and a control unit for supplying an optical system control signal to said optical system and said laser control signal to said continuously excited Q-switch Nd:solid-state laser and controlling the beam size and the repetition frequency so as to optimize a thickness of a gas adsorption layer formed in the micro- area immediately prior to a radiation of each of said ultraviolet harmonic pulses.
Claim 8
Dependent Claim
14 words
An apparatus as in claim 5, wherein the photochemical reaction is photochemical vapor deposition.
Claim 9
Dependent Claim
15 words
An apparatus as in claim 5, wherein the photochemical reaction is laser chemical vapor deposition.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-10 | 1994-06-11 | 1994-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-10 | 1998-06-11 | 1998-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-10 | 2002-06-11 | 2002-12-11 | $7700.00 | Window Closed / Lapsed |