Photochemical surface treating apparatus

Abstract

Abstract PURPOSE:To prevent adverse influence to the human body by enhancing reaction efficiency, by performing the surface treatment of an object to be treated by activating predetermined gas while appropriately selecting the wavelength of light from a deuterium lamp. CONSTITUTION:A wavelength or wavelength band selecting means 3 such as a filter is provided to the light path 30 of the light from a deuterium lamp 1 equipped with a water cooling means 2 and having a continuous light emitting region of 160-400nm and the interior of a reaction chamber 6 is irradiated with light through an optical window 5. The reaction chamber 6 can be held under an air-tight state and a gas introducing system 9 and a gas exhaust system 10 are connected to said chamber 6 while an object 8 to be treated on a support table 7. By this mechanism, ultraviolet rays with an arbitrary wavelength and/or arbitrary wavelength band of 160-400nm can be utilized and predetermined gas is activated to make it possible to perform the surface treatment of a solid substance such as the fabrication of a membrane, etching, purification or surface modification.

Inventors

• 👤 Atsushi Sekiguchi
• 👤 敦 関口
• 👤 Takashi Hiraga
• 👤 隆 平賀
• 👤 Michio Nagasaka
• 👤 長坂　道雄

Bibliographic Details