Al-based contact formation process using Ti glue layer to prevent nodule-induced bridging

Claim 1

A method for forming a planarized aluminum contact metallization in a MOS structure on a silicon substrate, the method comprising the steps of: (a) forming a contact opening in a pre-metal dielectric which has previously been formed on said substrate; (b) depositing a Ti metal layer in said contact opening and in contact with said substrate by sputtering in a first chamber; (c) depositing a TiN barrier metal layer on said first Ti metal layer by sputtering in said first chamber; (d) depositing a Ti glue layer over said TiN barrier metal layer by sputtering in said first chamber; (e) depositing a first aluminum based layer on said Ti glue layer by sputtering in a second chamber, said steps (b), (c), (d) and (e) taking place sequentially without breaking a vacuum maintained in said first and second chambers, said first aluminum based layer being formed at a sufficiently elevated temperature so that said aluminum layer substantially fills said contact opening and is planarized, said TiN barrier layer resisting the diffusion of aluminum into said substrate while said aluminum based layer is being deposited at said elevated temperature, and said Ti glue layer being sufficient to prevent formation of precipitates in and on said first aluminum based layer by reacting with said first aluminum based layer to form TiAl 3 which dissolves said precipitates; (f) forming a first TiN antireflection coating layer on said first aluminum based layer; (g) depositing an intermetal dielectric layer over said antireflection coating layer; (h) etching an opening for a via in said intermetal dielectric layer; (i) depositing a second Ti glue layer in said via opening; (j) depositing a second aluminum based layer over said second Ti glue layer in said via, said second aluminum based layer being deposited at a sufficiently elevated temperature so that said via opening is filled and said second aluminum based layer is planarized; and (k) forming a second TiN antireflection coating layer on said second aluminum based layer.

Claim 2

A method for forming a planarized aluminum contact metallization in a MOS structure on a silicon substrate, the method comprising the steps of: (a) forming a contact opening in a pre-metal dielectric which has previously been formed on said substrate; (b) depositing a Ti metal layer in said contact opening and in contact with said substrate by sputtering in a first chamber; (c) depositing a TiN barrier metal layer on said first Ti metal layer by sputtering in said first chamber; (d) depositing a Ti glue layer over said TiN barrier metal layer by sputtering in said first chamber; (e) depositing a first aluminum based layer on said Ti glue layer by sputtering in a second chamber, said steps (b), (c), (d) and (e) taking place sequentially without breaking a vacuum maintained in said first and second chambers, said first aluminum based layer being formed at a sufficiently elevated temperature so that said aluminum layer substantially fills said contact opening and is planarized, said TiN barrier layer resisting the diffusion of aluminum into said substrate while said aluminum based layer is being deposited at said elevated temperature, and said Ti glue layer being sufficient to prevent formation of precipitates in and on said first aluminum based layer by reacting with said first aluminum based layer to form TiAl 3 which dissolves said precipitates; (f) forming a first TiN antireflection coating layer on said first aluminum based layer; (g) depositing an intermetal dielectric layer over said antireflection coating layer; (h) etching an opening for a via in said intermetal dielectric layer; (i) depositing a second Ti glue layer in said via opening; (j) depositing a second aluminum based layer over said second Ti glue layer in said via, said second aluminum based layer being deposited at a sufficiently elevated temperature so that said via opening is filled and said second aluminum based layer is planarized; and (k) forming a second TiN antireflection coating layer on said second aluminum based layer.