Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers

Claim 2

A furnace comprising: a furnace tube encircling an inner space in a first direction and accommodating a plurality of semiconductor wafers moved into and out of said inner space in a second direction, said plurality of semiconductor wafers being substantially aligned with one another in said second direction so as to occupy a generally cylindrical sub-space in said inner space; a plurality of temperature sensor groups provided in said generally cylindrical sub-space and spaced apart from one another in said second direction, each of said temperature sensor groups having a plurality of temperature sensors angularly spaced from one another in said first direction adjacent outer peripheral portions of said plurality of semiconductor wafers for generating detecting signals indicative of actual temperatures in said generally cylindrical sub-space occupied by said plurality of semiconductor wafers; a plurality of heater groups provided outside of said furnace tube and spaced from one another in said second direction, each of said plurality of heater groups having a plurality of heater elements angularly spaced from one another in said first direction around said furnace tube for supplying heat through said furnace tube to said inner space; and a plurality of current controlling means associated with said respective plurality of heater groups and said respective plurality of temperature sensor groups, each of said plurality of current controller means having a plurality of current controlling sub-means respectively responsive to said detecting signals supplied from said plurality of temperature sensors of the associated temperature sensor groups so as to regulate electric currents respectively supplied to said plurality of heater elements of the associated heater group, thereby matching said actual temperatures to a target temperature for creating a uniform temperature distribution around said plurality of semiconductor wafers.

Claim 3

The furnace as set forth in claim 1, in which said furnace tube is placed substantially horizontally.

Claim 4

The furnace as set forth in claim 1, in which said heater elements of each of said plurality of heater groups supply heats mainly to zones respectively monitored by the temperature sensors of the associated temperature sensor group.

Claim 5

The furnace as set forth in claim 1, in which each of said plurality of current controlling sub-means includes a controlling unit for generating an instruction signal through a proportional band--integral time--derivative time and a power source unit responsive to said instruction signal for regulating said electric current supplied to the associated heater element.

Claim 6

A furnance comprising: a furnace tube encircling an inner space in a first direction and accommodating a plurality of semiconductor wafers moved into and out of said inner space in a second direction, said plurality of semiconductor wafers being substantially aligned with one another in said second direction so as to occupy a generally cylindrical sub-space in said inner space; a plurality of temperature sensor groups provided in said inner space and arranged in said second direction, each of said temperature sensor groups having a plurality of temperature sensors arranged in said first direction adjacent outer peripheral portions of said plurality of semiconductor wafers for generating detecting signals indicative of actual temperatures in said generally cylindrical space occupied by said plurality of semiconductor wafers; a plurality of heater groups provided outside of said furnace tube and arranged in said second direction, each of said plurality of heater groups having a plurality of heater elements arranged in said first direction around said furnace wall for supplying heat through said furnace tube to said inner space; and a plurality of current controlling means associated with said respective plurality of heater groups and said respective plurality of temperature sensor groups, each of said plurality of current controller means having a plurality of current controlling sub-means respectively responsive to said detecting signals supplied from said plurality of temperature sensors of the associated temperature sensor group so as to regulate electric currents respectively supplied to said plurality of heater elements of the associated heater group, thereby matching said actual temperatures to a target temperature for creating a uniform temperature distribution around said plurality of semiconductor wafers, and in which said plurality of semiconductor wafers are mounted on a boat, and said plurality of temperature sensor groups are respectively supported by a plurality of bracket members provided on said boat at intervals.

Claim 7

A furnance comprising: a furnace tube encircling an inner space in a first direction and accommodating a plurality of semiconductor wafers moved into and out of said inner space in a second direction, said plurality of semiconductor wafers being substantially aligned with one another in said second direction so as to occupy a generally cylindrical sub-space in said inner space; a plurality of temperature sensor groups provided in said inner space and arranged in said second direction, each of said temperature sensor groups having a plurality of temperature sensors arranged in said first direction adjacent outer peripheral portions of said plurality of semiconductor wafers for generating detecting signals indicative of actual temperatures in said generally cylindrical space occupied by said plurality of semiconductor wafers; a plurality of heater groups provided outside of said furnace tube and arranged in said second direction, each of said plurality of heater groups having a plurality of heater elements arranged in said first direction around said furnace wall for supplying heat through said furnace tube to said inner space; and a plurality of current controlling means associated with said respective plurality of heater groups and said respective plurality of temperature sensor groups, each of said plurality of current controller means having a plurality of current controlling sub-means respectively responsive to said detecting signals supplied from said plurality of temperature sensors of the associated temperature sensor group so as to regulate electric currents respectively supplied to said plurality of heater elements of the associated heater group, thereby matching said actual temperatures to a target temperature for creating a uniform temperature distribution around said plurality of semiconductor wafers, and in which said plurality of semiconductor wafers are mounted on a boat, and said plurality of temperature sensor groups are respectively supported by a plurality of bracket members provided on said boat at intervals.

Claim 8

The furnace as set forth in claim 5, in which at least one of said bracket members supports one of said plurality of temperature sensor groups in a zone of said inner space between two of said plurality of semiconductor wafers.

Claim 9

The furnace as set forth in claim 6, in which the temperature sensors of one of said plurality of temperature sensor groups are two sensors spaced apart from one another in a third direction perpendicular to said second direction, said heater elements of the associated heater group being spaced in said third direction so as to mainly heat two sub-zones of said zone, respectively.