Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
135 words
Vertical thermal processor comprising: a. framework means; b. base plate means supported by said framework means in a lower portion thereof; c. firing pedestal means supported on said base plate means; d. load cavity shroud means; e. furnace means coaxially positioned within said shroud means and adapted to coaxially position about said pedestal means; f. first pneumatic cylinder actuator means connected to said furnace means and said framework means for raising and lowering said furnace means relative to said base plate means; g. a process tube; h. process tube supporting ring; and, i. second pneumatic cylinder actuator means connected to said process tube support ring and shroud means for raising and lowering said process tube relative to base support plate whereby said furnace can be raised from said base plate independently of said process tube.
Claim 2
Dependent Claim
135 words
Vertical thermal processor comprising: a. framework means; b. base plate means supported by said framework means in a lower portion thereof; c. firing pedestal means supported on said base plate means; d. load cavity shroud means; e. furnace means coaxially positioned within said shroud means and adapted to coaxially position about said pedestal means; f. first pneumatic cylinder actuator means connected to said furnace means and said framework means for raising and lowering said furnace means relative to said base plate means; g. a process tube; h. process tube supporting ring; and, i. second pneumatic cylinder actuator means connected to said process tube support ring and shroud means for raising and lowering said process tube relative to base support plate whereby said furnace can be raised from said base plate independently of said process tube.
Claim 3
Dependent Claim
34 words
Vertical thermal processor of claim 1 including slidable frame means secured to a top of said framework means and said supporting means for slidable access of said furnace means, and said process tube means.
Claim 4
Dependent Claim
20 words
Vertical thermal processor of claim 1 including an access port in said framework for providing access to said pedestal means.
Claim 5
Dependent Claim
15 words
Vertical thermal processor of claim 1 including heat exchanger means in said base plate means.
Claim 6
Dependent Claim
17 words
Vertical thermal processor of claim 1 including heat exchanger means in a top of said framework means.
Claim 7
Dependent Claim
13 words
Vertical thermal processor of claim 1 including means for venting said process tube.
Claim 8
Dependent Claim
13 words
Vertical thermal processor of claim 1 including means for purging said process tube.
Claim 9
Dependent Claim
13 words
Vertical thermal processor of claim 1 including means for venting said furnace means.
Claim 10
Dependent Claim
22 words
Vertical thermal processor of claim 1 wherein said first pneumatic actuator means acts on opposing sides of said second pneumatic actuator means.
Claim 11
Dependent Claim
22 words
Vertical thermal processor of claim 1 including means for stopping said first and second pneumatic actuator means on loss of pneumatic power.
Claim 12
Dependent Claim
22 words
Vertical thermal processor of claim 1 including means for stopping said first and second pneumatic actuator means on loss of electrical power.
Claim 13
Dependent Claim
16 words
Vertical thermal processor of claim 1 including means for atmosphere control before, during and after heating.