US5288364A
Expired / Lapsed
US
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Silicon epitaxial reactor and control method
Assignee: Motorola Solutions Inc
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Filing: 1992-08-20
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Granted: 1994-02-22
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Expires: 2012-08-20
Abstract
Abstract An epitaxial reactor (10) includes a bell jar (11) wherein epitaxial depositions are performed. During an epitaxial deposition cycle, the temperature of the bell jar (11) is monitored by an infrared detector (22). After the temperature reaches a predetermined value, initiation of further epitaxial deposition cycles is inhibited. The control method extends the useful lifetime of heating lamps (12) and bell jar seals thereby reducing the cost of semiconductor wafers (16).
Inventors
- 👤 Curtis L. Burt
- 👤 John W. Steele
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:46
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C30B25/16; Y; Y10; Y10S; Y10S117/00; Y10S117/90
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
125 words
A method of controlling a silicon epitaxial reactor comprising: providing a silicon epitaxial reactor having a quartz bell jar; positioning an infrared sensor near an external surface of the quartz bell jar; coupling an output of the infrared sensor to a controller that controls initiating an epitaxial deposition cycle within the silicon epitaxial reactor; monitoring a temperature of the quartz bell jar by using the infrared sensor for monitoring infrared radiation emitted from the quartz bell jar and from a silicon haze on an inside surface of the bell jar during an epitaxial deposition cycle; and inhibiting initiation of an epitaxial deposition cycle a first number of epitaxial deposition cycles after the temperature reaches a first value wherein the inhibiting is performed by the controller.
Claim 2
Independent Claim
125 words
A method of controlling a silicon epitaxial reactor comprising: providing a silicon epitaxial reactor having a quartz bell jar; positioning an infrared sensor near an external surface of the quartz bell jar; coupling an output of the infrared sensor to a controller that controls initiating an epitaxial deposition cycle within the silicon epitaxial reactor; monitoring a temperature of the quartz bell jar by using the infrared sensor for monitoring infrared radiation emitted from the quartz bell jar and from a silicon haze on an inside surface of the bell jar during an epitaxial deposition cycle; and inhibiting initiation of an epitaxial deposition cycle a first number of epitaxial deposition cycles after the temperature reaches a first value wherein the inhibiting is performed by the controller.
Claim 3
Dependent Claim
54 words
The method of claim 1 wherein positioning the infrared sensor near the external surface of the quartz bell jar includes positioning a first end of a fiber optic cable near the external surface of the bell jar, and attaching a second end of the fiber optic cable to an input of the infrared sensor.
Claim 4
Dependent Claim
34 words
The method of claim 1 wherein allowing the first number of epitaxial deposition cycles after the temperature reaches the first value includes allowing two epitaxial deposition cycles after the temperature reaches the first value.
Claim 5
Dependent Claim
62 words
The method of claim 1 wherein inhibiting initiation of the epitaxial deposition cycle the first number of epitaxial deposition cycles after the temperature reaches the first value includes inhibiting initiation of the epitaxial deposition cycle before the temperature reaches a value that indicates a high etch cycle will not remove the silicon haze from the inside surface of the quartz bell jar.
Claim 6
Dependent Claim
37 words
The method of claim 4 wherein inhibiting imitation of the epitaxial deposition cycle before the temperature reaches the value includes inhibiting imitation of the epitaxial deposition cycle before the temperature reaches approximately 625 to 630 degrees Celsius.
Claim 7
Independent Claim
54 words
A method of controlling an epitaxial reactor comprising: providing an epitaxial reactor having a bell jar; monitoring a temperature of the bell jar during an epitaxial deposition cycle; and inhibiting initiation of an epitaxial deposition cycle within the epitaxial reactor a first number of epitaxial deposition cycles after the temperature reaches a first value.
Claim 8
Independent Claim
54 words
A method of controlling an epitaxial reactor comprising: providing an epitaxial reactor having a bell jar; monitoring a temperature of the bell jar during an epitaxial deposition cycle; and inhibiting initiation of an epitaxial deposition cycle within the epitaxial reactor a first number of epitaxial deposition cycles after the temperature reaches a first value.
Claim 9
Dependent Claim
66 words
The method of claim 6 wherein monitoring the temperature includes monitoring infrared radiation emitted from the bell jar by positioning a first end of a fiber optic cable near an external surface of the bell jar for accepting the infrared radiation, coupling a second end of the fiber optic cable to an input of an infrared detector thereby coupling the infrared radiation to the infrared detector.
Claim 10
Dependent Claim
30 words
The method of claim 6 wherein inhibiting initiation of the epitaxial deposition cycle includes coupling an output of the infrared detector to a controller wherein the controller performs the inhibiting.
Claim 11
Dependent Claim
46 words
The method of claim 6 wherein inhibiting initiation of the epitaxial deposition cycle within the epitaxial reactor the first number of epitaxial deposition cycles after the temperature reaches the first value includes allowing at least two epitaxial deposition cycles after the temperature reaches the first value.
Claim 12
Dependent Claim
30 words
The method of claim 6 wherein inhibiting initiation of the epitaxial deposition cycle within the epitaxial reactor includes inhibiting initiation after the temperature reaches approximately 625 to 630 degrees Celsius.
Claim 13
Dependent Claim
23 words
The method of claim 6 further including performing a high etch cycle after the step of inhibiting initiation of the epitaxial deposition cycle.
Claim 14
Dependent Claim
57 words
An epitaxial reactor comprising: a bell jar; an infrared detector positioned to accept infrared radiation emitted by the bell jar, the infrared detector having an input and an output; and a controller having an input coupled to the output of the infrared detector wherein the controller controls initiation of an epitaxial deposition cycle within the epitaxial reactor.
Claim 15
Dependent Claim
57 words
An epitaxial reactor comprising: a bell jar; an infrared detector positioned to accept infrared radiation emitted by the bell jar, the infrared detector having an input and an output; and a controller having an input coupled to the output of the infrared detector wherein the controller controls initiation of an epitaxial deposition cycle within the epitaxial reactor.
Claim 16
Dependent Claim
51 words
The epitaxial reactor of claim 12 wherein the infrared detector positioned to accept infrared radiation emitted by the bell jar includes a fiber optic cable having a first end positioned near the bell jar thereby accepting the infrared radiation, and a second end coupled to the input of the infrared detector.
Claim 17
Dependent Claim
23 words
The silicon epitaxial reactor of claim 12 further including a containment chamber that is positioned between the bell jar and the infrared detector.
References Cited (Backward Citations)
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