US5171972A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Heat treating furnace
Assignee: Tokyo Electron Ltd
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Filing: 1991-09-27
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Granted: 1992-12-15
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Expires: 2011-09-27
Abstract
Abstract A heat treating furnace has a reaction tube for accommodating an object to be treated, a heating device arranged to surround the reaction tube, a heat-insulating member arranged outside the heating device, a tubular member arranged outside the heat-insulating member, and a coolant circulating pipe arranged in a space between the tubular member and the heat-insulating member. According to the heat treating furnace of the present invention, a heat treatment can be performed while accurately performing temperature control.
Inventors
- 👤 Masaru Hidano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 12:46
CPC Classifications
F; F27; F27B; F27B17/00; F27B17/0016; F27B17/0025; H; H10; H10P; H10P95/00; H10P95/90; C; C30; C30B; C30B31/00; C30B31/06; C30B31/12
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
126 words
A heat processing furnace comprising: a vertical reaction tube for accommodating an object to be treated; heating means arranged to surround said vertical reaction tube; a heat-insulating member arranged outside said heating means; a first tubular member arranged outside said heat-insulating member; a second tubular member arranged outside said first tubular member; and a coolant circulating pipe arranged in a space between said first tubular member and said second tubular member; wherein: said coolant circulating pipe is bent in a zigzag fashion in a vertical direction of the vertical reaction tube and comprises bent portions, said bent portions of the coolant circulating pipe being located at upper and lower ends of the vertical reaction tube and arranged in a circumferential direction of the vertical reaction tube.
Claim 2
Dependent Claim
126 words
A heat processing furnace comprising: a vertical reaction tube for accommodating an object to be treated; heating means arranged to surround said vertical reaction tube; a heat-insulating member arranged outside said heating means; a first tubular member arranged outside said heat-insulating member; a second tubular member arranged outside said first tubular member; and a coolant circulating pipe arranged in a space between said first tubular member and said second tubular member; wherein: said coolant circulating pipe is bent in a zigzag fashion in a vertical direction of the vertical reaction tube and comprises bent portions, said bent portions of the coolant circulating pipe being located at upper and lower ends of the vertical reaction tube and arranged in a circumferential direction of the vertical reaction tube.
Claim 3
Dependent Claim
19 words
The furnace according to claim 1, wherein said coolant circulating pipe is arranged inside the second tubular member beforehand.
Claim 4
Dependent Claim
33 words
The furnace according to claim 1, wherein said second tubular member is discontinuous in the circumferential direction of the vertical reaction tube and comprises a gap which extends in the longitudinal direction thereof.
Claim 5
Dependent Claim
25 words
The furnace according to claim 1, wherein a box accommodating a temperature measuring terminal is mounted on an outer surface of said second tubular member.
Claim 6
Dependent Claim
20 words
The furnace according to claim 1, wherein said coolant circulating pipe is made of one of copper and stainless steel.
Claim 7
Dependent Claim
17 words
The furnace according to claim 1, wherein said coolant is water whose temperature is around 20° C.
Claim 8
Dependent Claim
25 words
The furnace according to claim 1, wherein said coolant circulating pipe is prefabricated in a zigzag fashion and provided inside the second tubular member beforehand.
Claim 9
Dependent Claim
114 words
A heat processing furnace comprising: a lateral reaction tube for accommodating an object to be treated; heating means arranged to surround said lateral reaction tube; a heat-insulating member arranged outside said heating means; a first tubular member arranged outside said heat-insulating member; a second tubular member arranged outside said first tubular member; and a coolant circulating pipe arranged in a space between said first tubular member and said second tubular member; wherein: said coolant circulating pipe is bent in a zigzag fashion in a circumferential direction of the lateral reaction tube and comprises bent portions, said bent portions of the coolant circulating pipe being arranged in a longitudinal direction of the lateral reaction tube.
Claim 10
Dependent Claim
114 words
A heat processing furnace comprising: a lateral reaction tube for accommodating an object to be treated; heating means arranged to surround said lateral reaction tube; a heat-insulating member arranged outside said heating means; a first tubular member arranged outside said heat-insulating member; a second tubular member arranged outside said first tubular member; and a coolant circulating pipe arranged in a space between said first tubular member and said second tubular member; wherein: said coolant circulating pipe is bent in a zigzag fashion in a circumferential direction of the lateral reaction tube and comprises bent portions, said bent portions of the coolant circulating pipe being arranged in a longitudinal direction of the lateral reaction tube.
Claim 11
Dependent Claim
19 words
The furnace according to claim 8, wherein said coolant circulating pipe is arranged inside the second tubular means beforehand.
Claim 12
Dependent Claim
33 words
The furnace according to claim 8, wherein said second tubular member is discontinuous in the circumferential direction of the lateral reaction tube and comprises a gap which extends in the longitudinal direction thereof.
Claim 13
Dependent Claim
25 words
The furnace according to claim 8, wherein a box housing a temperature measuring terminal is mounted on an outer surface of said second tubular member.
Claim 14
Dependent Claim
20 words
The furnace according to claim 8, wherein said coolant circulating pipe is made of one of copper and stainless steel.
Claim 15
Dependent Claim
17 words
The furnace according to claim 8, wherein said coolant is water whose temperature is around 20° C.
Claim 16
Dependent Claim
19 words
The furnace according to claim 8, wherein said coolant circulating pipe is provided with a plurality of cooling fins.
Claim 17
Dependent Claim
14 words
The furnace according to claim 14, wherein said cooling fins are made of aluminum.
Claim 18
Dependent Claim
25 words
The furnace according to claim 8, wherein said coolant circulating pipe is prefabricated in a zigzag fashion and provided inside the second tubular member beforehand.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-15 | 1996-06-15 | 1996-12-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-15 | 2000-06-15 | 2000-12-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-15 | 2004-06-15 | 2004-12-15 | $7700.00 | Window Closed / Lapsed |