Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer

Claim 2

A spatial light modulation device said device comprising: a base layer; a beam layer; a beam support post; a hinge supported by said base layer and connected to said rotatable layer by said beam support post wherein said hinge allows said rotatable area to move within a defined motion with respect to said base layer, said hinge lying in a plane separate from the plane of said rotatable layer; a hinge gap between said base layer and said hinge allowing for movement of said hinge; and a beam gap between said hinge and said beam layer allowing for movement of said beam layer.

Claim 3

The device set forth in claim 1 wherein said base layer includes discrete areas for providing signals for controlling said rotation of said rotatable layer.

Claim 4

The device set forth in claim 2 wherein said discrete areas include address electrodes.

Claim 5

The device set forth in claim 3 wherein said discrete areas further include address circuitry.

Claim 6

The device set forth in claim 2 further including a substrate layer containing control circuitry; and interconnection structure for communicating signals from said control circuitry to said discrete areas.

Claim 7

The device set forth in claim 5 wherein said control circuitry is constructed using CMOS technology.

Claim 8

The device set forth in claim 1, wherein said hinge gap is an air gap.

Claim 9

The device set forth in claim 1, wherein said beam gap is an air gap.

Claim 10

An array of pixels, each pixel individually rotatable into at least two states, said array comprising: a base structure for supporting all of said pixels of said array, said array being maintained in a plane separate from the plane of said base; each said pixel defining a surface area, each said pixel being connected to an end of a beam support post and an intermediate portion which is supported by said base structure and connected to each said pixel through an opposite end of said beam support post, said intermediate portion is separated from said base structure by a hinge gap and from each said pixel by a beam gap and positioned therebetween for connecting said base structure to each said pixel by allowing each said pixel to deform with respect to said base.

Claim 11

An array of pixels, each pixel individually rotatable into at least two states, said array comprising: a base structure for supporting all of said pixels of said array, said array being maintained in a plane separate from the plane of said base; each said pixel defining a surface area, each said pixel being connected to an end of a beam support post and an intermediate portion which is supported by said base structure and connected to each said pixel through an opposite end of said beam support post, said intermediate portion is separated from said base structure by a hinge gap and from each said pixel by a beam gap and positioned therebetween for connecting said base structure to each said pixel by allowing each said pixel to deform with respect to said base.

Claim 12

The device set forth in claim 9 further comprising a HDTV system and wherein said array is the visual display of a high density television receiver.

Claim 13

The device set forth in claim 9 wherein said base structure includes discrete areas for providing signals for controlling said rotation of said pixels.

Claim 14

The device set forth in claim 11 wherein said discrete areas include address electrodes.

Claim 15

The device set forth in claim 12 wherein said discrete areas further include address circuitry.

Claim 16

The device set forth in claim 12 further including a substrate layer containing control circuitry; and interconnection structure for communicating signals from said control circuitry to said discrete areas.

Claim 17

The device set forth in claim 14 wherein said control circuitry is constructed using CMOS technology.

Claim 18

The device set forth in claim 9 further comprising a display system wherein said array is a portion of a visual display of said system.

Claim 19

The device set forth in claim 9 further comprising a printer system wherein said array is a portion of an imaging system of said printer system.

Claim 20

The device set forth in claim 7, wherein said hinge gap is an air gap.

Claim 21

The device set forth in claim 7, wherein said beam gap is an air gap.