Abstract An improved ferroelectric FET structure in which the ferroelectric layer is doped to reduce retention loss. A ferroelectric FET according to the present invention includes a semiconductor layer having first and second contacts thereon, the first and second contacts being separated from one another. The ferroelectric FET also includes a bottom electrode and a ferroelectric layer which is sandwiched between the semiconductor layer and the bottom electrode. The ferroelectric layer is constructed from a perovskite structure of the chemical composition ABO 3 wherein the B site comprises first and second elements and a dopant element that has an oxidation state greater than +4 in sufficient concentration to impede shifts in the resistance measured between the first and second contacts with time. The ferroelectric FET structure preferably comprises Pb in the A-site. The first and second elements are preferably Zr and Ti, respectively. The preferred B-site dopants are Niobium, Tantalum, and Tungsten at concentrations between 1% and 8%.
An improved ferroelectric FET structure comprising: a semiconductor layer having first and second contacts thereon, said first and second contacts being separated from one another; a bottom electrode; and a ferroelectric layer sandwiched between said semiconductor layer and said bottom electrode, said ferroelectric layer comprising a perovskite structure having A and B sites and having a chemical composition ABO 3 wherein said B-sites are filled with a first element, a second element, or a dopant element that has an oxidation state greater than +4, said dopant element being present in said ferroelectric layer in sufficient concentration to impede shifts in the resistance measured between the first and second contacts with time, wherein said all of said first, second and dopant elements are present in said ferroelectric layer, wherein said ferroelectric comprises Pb in said A-site, and wherein said first and second elements are Zr and Ti, respectively.
Claim 2
Dependent Claim
147 words
An improved ferroelectric FET structure comprising: a semiconductor layer having first and second contacts thereon, said first and second contacts being separated from one another; a bottom electrode; and a ferroelectric layer sandwiched between said semiconductor layer and said bottom electrode, said ferroelectric layer comprising a perovskite structure having A and B sites and having a chemical composition ABO 3 wherein said B-sites are filled with a first element, a second element, or a dopant element that has an oxidation state greater than +4, said dopant element being present in said ferroelectric layer in sufficient concentration to impede shifts in the resistance measured between the first and second contacts with time, wherein said all of said first, second and dopant elements are present in said ferroelectric layer, wherein said ferroelectric comprises Pb in said A-site, and wherein said first and second elements are Zr and Ti, respectively.
Claim 3
Dependent Claim
22 words
The ferroelectric FET structure of claim 1 wherein said dopant element is chosen from the group consisting of Niobium, Tantalum, and Tungsten.
Claim 4
Dependent Claim
19 words
The ferroelectric FET structure of claim 1 wherein said dopant element occupies between 1% and 8% of said B-sites.