US5248564A
Expired / Lapsed
US
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C-axis perovskite thin films grown on silicon dioxide
Assignee: University of Maryland, College Park
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Filing: 1992-12-09
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Granted: 1993-09-28
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Expires: 2012-12-09
Abstract
Abstract A method and resulting structure for growing a crystalline perovskite film (16) on a silicon dioxide layer (12) by means of an intermediate template layer (14) of a c-axis oriented layered perovskite, such as bismuth titanate. The perovskite film can be ferroelectric lead-lanthanum zirconate titanate or conductive cubic metal oxides used as electrodes for the ferroelectric.
Inventors
- 👤 Ramamoorthy Ramesh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 06:15
CPC Classifications
H; H10; H10B; H10B53/00; C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076; H10N30/079; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24926
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
44 words
A perovskite thin-film structure comprising: a substrate having a surface comprising silicon oxide; a substantially c-axis oriented template layer comprising a layered perovskite formed directly on said silicon oxide; and at least one perovskite layer formed crystallographically c-axis oriented sequentially over said template layer.
Claim 2
Dependent Claim
44 words
A perovskite thin-film structure comprising: a substrate having a surface comprising silicon oxide; a substantially c-axis oriented template layer comprising a layered perovskite formed directly on said silicon oxide; and at least one perovskite layer formed crystallographically c-axis oriented sequentially over said template layer.
Claim 3
Dependent Claim
16 words
A perovskite thin-film structure as recited in claim 1, wherein said layered perovskite comprises bismuth titanate.
Claim 4
Dependent Claim
16 words
A perovskite thin-film structure as recited in claim 1, wherein said layered perovskite comprises bismuth tungstate.
Claim 5
Dependent Claim
29 words
A perovskite thin-film structure as recited in claim 1, wherein said layered perovskite consists essentially of a chemical compound preferentially forming as said perovskite rather than as a silicate.
Claim 6
Dependent Claim
22 words
A perovskite thin-film structure as recited in claim 1, wherein said at least one crystallographically oriented perovskite layer comprises a ferroelectric layer.
Claim 7
Dependent Claim
35 words
A perovskite thin-film structure as recited in claim 1, wherein said at least one crystallographically oriented perovskite layer comprises two cubic metal oxide layers and an intermediate perovskite layer disposed between said metal oxide layers.
Claim 8
Dependent Claim
18 words
A perovskite thin-film structure as recited in claim 6, wherein said intermediate perovskite layer comprises a ferroelectric material.
Claim 9
Dependent Claim
28 words
A perovskite thin-film structure as recited in claim 1, wherein said substrate comprises crystalline silicon and wherein said silicon oxide comprises a film formed on said crystalline silicon.
Claim 10
Dependent Claim
57 words
A perovskite thin-film structure comprising: a substrate having a three-dimensionally random crystalline orientation; a substantially c-axis oriented template layer comprising a layered perovskite formed directly on said silicon oxide, said template layer perovskite being substantially chemically inert with respect to said substrate; and at least one perovskite layer formed crystallographically c-axis oriented sequentially over said template layer.
Claim 11
Dependent Claim
57 words
A perovskite thin-film structure comprising: a substrate having a three-dimensionally random crystalline orientation; a substantially c-axis oriented template layer comprising a layered perovskite formed directly on said silicon oxide, said template layer perovskite being substantially chemically inert with respect to said substrate; and at least one perovskite layer formed crystallographically c-axis oriented sequentially over said template layer.
Claim 12
Dependent Claim
14 words
A structure as recited in claim 9, wherein said substrate comprises a glassy surface.
Claim 13
Dependent Claim
16 words
A structure as recited in claim 10, wherein said glassy surface comprises a silicon oxide surface.
References Cited (Backward Citations)
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