US5164808A
Expired / Lapsed
US
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Platinum electrode structure for use in conjunction with ferroelectric materials
Assignee: RADIANT TECHNOLOGIES A NM Corp
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Filing: 1991-08-09
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Granted: 1992-11-17
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Expires: 2011-08-09
Abstract
Abstract An improved ferroelectric structure and the method for making the same is disclosed. The improved structure reduces the fatigue problems encountered in ferroelectric capacitors while providing avoiding problems in depositing the ferroelectric material which have prevented other solutions to the fatigue problem from being effective. The improved ferroelectric structure also provides improved adhesion to the underlying substrate. The ferroelectric structure has a bottom electrode comprising a layer of PtO 2 which is generated by depositing a layer of Platinum on a suitable substrate and then exposing the Platinum layer to an Oxygen plasma. The ferroelectric material is then deposited on the PtO 2 layer.
Inventors
- 👤 Joseph T. Evans, Jr.
- 👤 Jeff A. Bullington
- 👤 Carl E. Montross, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:10
CPC Classifications
H; H10; H10B; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
70 words
An improved ferroelectric/electrode structure comprising: a platinum layer having top and bottom surfaces; a layer of PtO 2 having top and bottom surfaces, said bottom surface of said PtO 2 layer being bonded to said top surface of said Platinum layer; and a layer of ferroelectric material having top and bottom surfaces, said bottom surface of said ferroelectric material being bonded to said top surface of said PtO 2 layer.
Claim 2
Dependent Claim
70 words
An improved ferroelectric/electrode structure comprising: a platinum layer having top and bottom surfaces; a layer of PtO 2 having top and bottom surfaces, said bottom surface of said PtO 2 layer being bonded to said top surface of said Platinum layer; and a layer of ferroelectric material having top and bottom surfaces, said bottom surface of said ferroelectric material being bonded to said top surface of said PtO 2 layer.
Claim 3
Dependent Claim
11 words
The structure of claim 1 wherein said ferroelectric material is PLZT.
Claim 4
Dependent Claim
12 words
The structure of claim 1 wherein said ferroelectric material is Bismuth Titanate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-17 | 1996-05-18 | 1996-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-17 | 2000-05-18 | 2000-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-17 | 2004-05-18 | 2004-11-17 | $7700.00 | Window Closed / Lapsed |