Patent US5574279A successfully refreshed from Google Patents.
US5574279A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe with torsion lever structure, and scanning probe microscope and record/reproducing apparatus utilizing the same
Assignee: Canon Inc
•
Filing: 1995-09-20
•
Granted: 1996-11-12
•
Expires: 2015-09-20
Abstract
Abstract A probe of torsion lever structure is provided with a flat-plate driving unit formed on a substrate with a gap therebetween, two beams positioned along a straight line parallel to the substrate and rotatably supporting the flat plate-shaped driving unit relative to the substrate, a drive device for driving the flat plate-shaped driving unit, and a tip for information input/output provided at an end of the flat plate-shaped driving unit. The two beams are provided at a position between the end of the flat plate-shaped driving unit and the other end thereof, closer to the other end than the center between the end and the other end of the flat plate-shaped driving unit.
Inventors
- 👤 Tsutomu Ikeda
- 👤 Takehiko Kawasaki
- 👤 Yasuhiro Shimada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:57
CPC Classifications
G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; B; B82; B82Y; B82Y35/00; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G01Q60/24; G01Q60/38; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
109 words
A probe of torsion lever structure provided with a flat plate-shaped driving unit formed on a substrate with a gap therebetween, two beams positioned along a straight line parallel to said substrate and rotatably supporting said flat plate-shaped driving unit relative to said substrate, drive means for driving said flat plate-shaped driving unit, and a tip for information input/output provided at an end of said flat plate-shaped driving unit, wherein: said two beams are provided at a position, between said end of said flat plate-shaped driving unit and the other end thereof, closer to said the other end than the center between said end and said the other end.
Claim 2
Dependent Claim
109 words
A probe of torsion lever structure provided with a flat plate-shaped driving unit formed on a substrate with a gap therebetween, two beams positioned along a straight line parallel to said substrate and rotatably supporting said flat plate-shaped driving unit relative to said substrate, drive means for driving said flat plate-shaped driving unit, and a tip for information input/output provided at an end of said flat plate-shaped driving unit, wherein: said two beams are provided at a position, between said end of said flat plate-shaped driving unit and the other end thereof, closer to said the other end than the center between said end and said the other end.
Claim 3
Dependent Claim
60 words
A probe according to claim 1, satisfying a relation; weight of first area/weight of second area<1, wherein said first area is an area, having said tip, of two areas of said flat plate-shaped driving unit divided by the rotary axis passing through said two beams, and said second area is the other area, without said tip, of said two areas.
Claim 4
Dependent Claim
16 words
A probe according to claim 2, satisfying a relation: 0.5<weight of first area/weight of second area<1.
Claim 5
Dependent Claim
16 words
A probe according to claim 2, satisfying a relation: 0.8<weight of first area/weight of second area<1.
Claim 6
Dependent Claim
36 words
A probe according to claim 1, further comprising a hole in an area, without said tip, of the two areas of said flat plate-shaped driving unit divided by the straight line passing through said two beams.
Claim 7
Dependent Claim
32 words
A probe according to claim 1, wherein said drive means is a pair of electrodes which are respectively provided in mutually opposed positions of said substrate and said flat plate-shaped driving unit.
Claim 8
Dependent Claim
141 words
A scanning probe microscope comprising: a flat plate-shaped driving unit formed on a substrate with a gap therebetween; two beams positioned along a straight line parallel to said substrate and rotatably supporting said flat plate-shaped driving unit relative to said substrate; drive means for driving said flat plate-shaped driving unit; a tip for information input/output provided at an end of said flat plate-shaped driving unit; wherein said two beams are provided at a position, between said end of said flat plate-shaped driving unit and the other end thereof, closer to said the other end than the center between said end and said the other end; means for detecting a physical action taking place between said tip and a specimen to be observed; and means for generating surface information of said specimen based on the result of detection by said detection means.
Claim 9
Dependent Claim
141 words
A scanning probe microscope comprising: a flat plate-shaped driving unit formed on a substrate with a gap therebetween; two beams positioned along a straight line parallel to said substrate and rotatably supporting said flat plate-shaped driving unit relative to said substrate; drive means for driving said flat plate-shaped driving unit; a tip for information input/output provided at an end of said flat plate-shaped driving unit; wherein said two beams are provided at a position, between said end of said flat plate-shaped driving unit and the other end thereof, closer to said the other end than the center between said end and said the other end; means for detecting a physical action taking place between said tip and a specimen to be observed; and means for generating surface information of said specimen based on the result of detection by said detection means.
Claim 10
Dependent Claim
123 words
An information record/reproducing apparatus comprising: a flat plate-shaped driving unit formed on a substrate with a gap therebetween; two beams positioned along a straight line parallel to said substrate and rotatably supporting said flat plate-shaped driving unit relative to said substrate; drive means for driving said flat plate-shaped driving unit; a tip for information input/output provided at an end of said flat plate-shaped driving unit; wherein said two beams are provided at a position, between said end of said flat plate-shaped driving unit and the other end thereof, closer to said the other end than the center between said end and said the other end; and means for recording information on a recording medium and reproducing information therefrom, by means of said tip.
Claim 11
Dependent Claim
123 words
An information record/reproducing apparatus comprising: a flat plate-shaped driving unit formed on a substrate with a gap therebetween; two beams positioned along a straight line parallel to said substrate and rotatably supporting said flat plate-shaped driving unit relative to said substrate; drive means for driving said flat plate-shaped driving unit; a tip for information input/output provided at an end of said flat plate-shaped driving unit; wherein said two beams are provided at a position, between said end of said flat plate-shaped driving unit and the other end thereof, closer to said the other end than the center between said end and said the other end; and means for recording information on a recording medium and reproducing information therefrom, by means of said tip.
References Cited (Backward Citations)
US4668865A
Cited
JPS63161552A
Cited
JPS63161553A
Cited
US4906840A
Cited
JPH041948A
Cited
US5283437A
Cited
US5317152A
Cited
US5357108A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-12 | 2000-05-13 | 2000-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-12 | 2004-05-13 | 2004-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-12 | 2008-05-13 | 2008-11-12 | $7700.00 | Window Closed / Lapsed |