US5357108A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same
Assignee: Canon Inc
•
Filing: 1992-06-09
•
Granted: 1994-10-18
•
Expires: 2012-06-09
Abstract
Abstract A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Inventors
- 👤 Yoshio Suzuki
- 👤 Yutaka Hirai
- 👤 Osamu Takamatsu
- 👤 Masaru Nakayama
- 👤 Takayuki Yagi
- 👤 Yuji Kasanuki
- 👤 Keisuke Yamamoto
- 👤 Yasuhiro Shimada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 03:51
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; G11B9/1427; G11B9/1436; H; H10; H10N; H10N30/00; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042; H10N30/2045; H10N30/2046; B82Y10/00; G01Q80/00; Y; Y10; Y10S; Y10S977/00; Y10S977/70; Y10S977/832; Y10S977/837; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861; Y10S977/872; Y10S977/873
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
56 words
A cantilever type displacement element comprising a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Claim 2
Dependent Claim
56 words
A cantilever type displacement element comprising a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Claim 3
Dependent Claim
20 words
The displacement element of claim 1, wherein said electrode pair are provided on both the surfaces of said piezoelectric layer.
Claim 4
Dependent Claim
26 words
The displacement element of claim 1, wherein said piezoelectric layer has a two-layer laminate structure and another electrode different from the electrode pair is interposed therebetween.
Claim 5
Dependent Claim
15 words
The displacement element of claim 1, wherein said piezoelectric layer is made of zinc oxide.
Claim 6
Dependent Claim
16 words
The displacement element of claim 1, wherein said piezoelectric layer is made of a ferroelectric material.
Claim 7
Dependent Claim
71 words
A cantilever type displacement element comprising a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Claim 8
Dependent Claim
71 words
A cantilever type displacement element comprising a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Claim 9
Dependent Claim
19 words
The displacement element of claim 6, wherein said first and second electrode pairs are electrically insulated from each other.
Claim 10
Dependent Claim
15 words
The displacement element of claim 6, wherein said piezoelectric layers are made of zinc oxide.
Claim 11
Dependent Claim
16 words
The displacement element of claim 6, wherein said piezoelectric layers are made of a ferroelectric material.
Claim 12
Dependent Claim
16 words
The displacement element of claim 6, wherein said piezoelectric layers have been given a polarizing treatment.
Claim 13
Dependent Claim
21 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface.
Claim 14
Dependent Claim
38 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface and wherein said couple of electrode pairs are disposed symmetrically in the width direction of the element.
Claim 15
Dependent Claim
22 words
A displacement element as in any one of claims 1-10, wherein a probe and an outgoing electrode connected thereto are further provided.
Claim 16
Dependent Claim
23 words
A displacement element as in any one of claims 1-10 wherein a plural number of the displacement elements form a displacement element array.
Claim 17
Dependent Claim
19 words
A displacement element as in any one of claims 1-10, wherein said probe is made of an electrical conductor.
Claim 18
Dependent Claim
34 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface and wherein a probe and an outgoing electrode connected thereto are further provided.
Claim 19
Dependent Claim
50 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface, said couple of electrode pairs are disposed symmetrically in the width direction of the element and a probe and an outgoing electrode connected to the probe are further provided.
Claim 20
Dependent Claim
35 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface and wherein a plural number of the displacement elements form a displacement element array.
Claim 21
Dependent Claim
50 words
The displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface, said couple of electrode pairs are disposed symmetrically in the width direction of the element and wherein a plural number of the displacement elements form a displacement element array.
Claim 22
Dependent Claim
46 words
The displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface, a probe and an outgoing electrode connected thereto are further provided and wherein a plural number of the displacement elements form a displacement element array.
Claim 23
Dependent Claim
61 words
The displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface, said couple of electrode pairs are disposed symmetrically in the width direction of the element, a probe and an outgoing electrode connected thereto are further provided and wherein a plural number of the displacement elements form a displacement element array.
Claim 24
Dependent Claim
30 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface and said probe is made of an electrical conductor.
Claim 25
Dependent Claim
45 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface, said couple of electrode pairs are disposed symmetrically in the width direction of the element and said probe is made of an electrical conductor.
Claim 26
Dependent Claim
58 words
A displacement element as in any one of claims 1-10, wherein a couple of electrode pairs are provided on one surface, said couple of electrode pairs are disposed symmetrically in the width direction of the element, a probe and an outgoing electrode connected to the probe are further provided, and said probe is made of an electrical conductor.
Claim 27
Dependent Claim
134 words
A scanning tunneling microscope comprising: a cantilever type displacement element including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, and means for displaying/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 28
Dependent Claim
134 words
A scanning tunneling microscope comprising: a cantilever type displacement element including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, and means for displaying/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 29
Dependent Claim
17 words
A scanning tunneling microscope according to claim 25, wherein said probe is made of an electrical conductor.
Claim 30
Dependent Claim
121 words
An information processing apparatus comprising a cantilever type displacement element including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-toothed portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, means for displaying/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 31
Dependent Claim
121 words
An information processing apparatus comprising a cantilever type displacement element including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-toothed portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, means for displaying/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 32
Dependent Claim
17 words
An information processing apparatus according to claim 27, wherein said probe is made of an electrical conductor.
Claim 33
Dependent Claim
150 words
A scanning tunneling microscope comprising: a cantilever type displacement element including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, means for displacing/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in a close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 34
Dependent Claim
150 words
A scanning tunneling microscope comprising: a cantilever type displacement element including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, means for displacing/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in a close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 35
Dependent Claim
17 words
A scanning tunneling microscope according to claim 29, wherein said probe is made of an electrical conductor.
Claim 36
Dependent Claim
142 words
A scanning tunneling microscope comprising: a plural number of cantilever type displacement elements each including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 37
Dependent Claim
142 words
A scanning tunneling microscope comprising: a plural number of cantilever type displacement elements each including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 38
Dependent Claim
163 words
A scanning tunneling microscope comprising: a plural number of cantilever type displacement elements each including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe for each of said elements, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 39
Dependent Claim
163 words
A scanning tunneling microscope comprising: a plural number of cantilever type displacement elements each including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe for each of said elements, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
Claim 40
Dependent Claim
138 words
An information processing apparatus comprising a cantilever type displacement element including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, and means for displacing/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 41
Dependent Claim
138 words
An information processing apparatus comprising a cantilever type displacement element including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe, and means for displacing/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 42
Dependent Claim
17 words
An information processing apparatus according to claim 33, wherein said probe is made of an electrical conductor.
Claim 43
Dependent Claim
135 words
An information processing apparatus comprising a plural number of cantilever type displacement elements each including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe for each of the elements, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 44
Dependent Claim
135 words
An information processing apparatus comprising a plural number of cantilever type displacement elements each including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe for each of the elements, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 45
Dependent Claim
151 words
An information processing apparatus comprising a plural number of cantilever type displacement elements each including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe for each of the elements, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Claim 46
Dependent Claim
151 words
An information processing apparatus comprising a plural number of cantilever type displacement elements each including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever, a probe and an outgoing electrode connected to the probe for each of the elements, and means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements, said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
References Cited (Backward Citations)
US4672496A
Cited
US4628330A
Cited
US4638206A
Cited
US4906840A
Cited
EP0368579A2
Cited
US4998016A
Cited
US5117148A
Cited
US5126615A
Cited
EP0472342A2
Cited
EP0480645A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-17 | 1998-04-18 | 1998-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-17 | 2002-04-18 | 2002-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-17 | 2006-04-18 | 2006-10-18 | $7700.00 | Window Closed / Lapsed |