EP0368579A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
Assignee: Canon Inc
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Filing: 1989-11-06
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Granted: —
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Expires: 2009-11-06
Abstract
Abstract A probe unit (Fig.1) is provided that is suitable for example for use in a scanning tunnel microscope or the like. The electrical probe contact (7) of this unit is centrally located and mounted upon a flexible member (4,5,6). The flexible member (4,5,6) is symmetrically supported (3) at its periphery and is constrained thus so that the electrical probe contact (7) can only move back and forth in a single direction. Flexure of the flexible member (4,5,6) may be driven by electrostatic or piezoelectric forces. Alternatively, the flexible member may include a layer of piezoelectric material, the elongation or contraction of which will cause flexure.
Inventors
- 👤 Hiroyasu Nose
- 👤 Osamu Takamatsu
- 👤 Toshihiko Miyazaki
- 👤 Toshimitsu Kawase
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 06:13
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q20/00; G01Q20/04; G01Q70/00; G01Q70/02; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; B82Y10/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
46 words
A probe unit comprising a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said probe unit further comprising a driving means for displacing the probe in a direction perpendicular to a face of the substrate.
Claim 2
Dependent Claim
46 words
A probe unit comprising a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said probe unit further comprising a driving means for displacing the probe in a direction perpendicular to a face of the substrate.
Claim 3
Dependent Claim
68 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 4
Dependent Claim
68 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 5
Dependent Claim
87 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode being in opposition to each other with interposition of the piezoelectric layer.
Claim 6
Dependent Claim
87 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode being in opposition to each other with interposition of the piezoelectric layer.
Claim 7
Dependent Claim
63 words
A probe unit comprising a substrate, a bridge-shaped of flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 8
Dependent Claim
63 words
A probe unit comprising a substrate, a bridge-shaped of flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 9
Independent Claim
104 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, the flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by an electrostatic force caused by application of voltage between the first electrode and the second electrode layer.
Claim 10
Independent Claim
104 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, the flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by an electrostatic force caused by application of voltage between the first electrode and the second electrode layer.
Claim 11
Independent Claim
122 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode being in opposition to each other with interposition of the piezoelectric layer; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode and the second electrode layer.
Claim 12
Independent Claim
122 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode being in opposition to each other with interposition of the piezoelectric layer; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode and the second electrode layer.
Claim 13
Independent Claim
99 words
A method for driving a probe unit comprising a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode layer and the second electrode layer.
Claim 14
Independent Claim
99 words
A method for driving a probe unit comprising a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode layer and the second electrode layer.
Claim 15
Dependent Claim
73 words
A scanning type of tunnel current detecting device having a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; an adjusting means for adjusting the distance between the probe and a specimen to be observed; and a voltage applying means for applying a voltage between the probe and the specimen.
Claim 16
Dependent Claim
73 words
A scanning type of tunnel current detecting device having a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; an adjusting means for adjusting the distance between the probe and a specimen to be observed; and a voltage applying means for applying a voltage between the probe and the specimen.
Claim 17
Dependent Claim
20 words
The device of Claim 8, wherein said device has a driving means for moving the specimen relative to the probe.
Claim 18
Dependent Claim
53 words
The device of Claim 8, wherein said probe unit has a first electrode on the substrate, said flexible member is insulated from the first electrode by a cavity and constituted of a laminate comprising a second electrode layer, an insulating layer and a third electrode layer for applying a voltage to the probe.
Claim 19
Dependent Claim
57 words
The device of Claim 8, wherein said probe unit has a first electrode on the substrate, the first electrode is connected through a piezoelectric layer to the flexible member, the flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 20
Dependent Claim
44 words
The device of Claim 8, wherein said flexible member is constituted of a laminate comprising a beam structure layer, a first electrode, a piezoelectric layer, a second electrode layer, an insulating layer and a third electrode layer for applying a voltage to the probe.
Claim 21
Dependent Claim
60 words
A probe unit comprising: a flexible member; a probe contact centrally located and mounted on said flexible member; driving means arranged for distorting said flexible member; and constraint means arranged in symmetrical relationship with said flexible member so as to constrain flexure thereof and to ensure thus the probe contact is displaceable back and forth in a singular direction only.
Claim 22
Dependent Claim
60 words
A probe unit comprising: a flexible member; a probe contact centrally located and mounted on said flexible member; driving means arranged for distorting said flexible member; and constraint means arranged in symmetrical relationship with said flexible member so as to constrain flexure thereof and to ensure thus the probe contact is displaceable back and forth in a singular direction only.
References Cited (Backward Citations)
No citation records indexed.
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