US4998016A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
Assignee: Canon Inc
•
Filing: 1990-06-28
•
Granted: 1991-03-05
•
Expires: 2010-06-28
Abstract
Abstract A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode.
Inventors
- 👤 Hiroyasu Nose
- 👤 Osamu Takamatsu
- 👤 Toshihiko Miyazaki
- 👤 Toshimitsu Kawase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:28
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; G01Q20/00; G01Q20/04; G01Q70/00; G01Q70/02; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G11B9/1418; B82Y10/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
46 words
A probe unit comprsing a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said probe unit further comprising a driving means for displacing the probe in a direction perpendicular to a face of the substrate.
Claim 2
Dependent Claim
46 words
A probe unit comprsing a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said probe unit further comprising a driving means for displacing the probe in a direction perpendicular to a face of the substrate.
Claim 3
Dependent Claim
68 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 4
Dependent Claim
68 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 5
Dependent Claim
87 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode being in opposition to each other with interposition of the piezoelectric layer.
Claim 6
Dependent Claim
87 words
A probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode being in opposition to each other with interposition of the piezoelectric layer.
Claim 7
Dependent Claim
63 words
A probe unit comprising a substrate, a bridge-shaped of flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 8
Dependent Claim
63 words
A probe unit comprising a substrate, a bridge-shaped of flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 9
Independent Claim
104 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, the flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by an electrostatic force caused by application of voltage between the first electrode and the second electrode layer.
Claim 10
Independent Claim
104 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed on the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member, the flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by an electrostatic force caused by application of voltage between the first electrode and the second electrode layer.
Claim 11
Independent Claim
123 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode layer being in opposition to each other with interposition of the piezoelectric layer; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode and the second electrode layer.
Claim 12
Independent Claim
123 words
A method for driving a probe unit comprising a substrate, a first electrode formed on the substrate, a piezoelectric layer formed on the first electrode, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe, and said first electrode and the second electrode layer being in opposition to each other with interposition of the piezoelectric layer; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode and the second electrode layer.
Claim 13
Independent Claim
99 words
A method for driving a probe unit comprising a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode layer and the second electrode layer.
Claim 14
Independent Claim
99 words
A method for driving a probe unit comprising a substrate, a bridge-shaped flexible member formed on the substrate, and a probe provided in contact with the flexible member, said flexible member being constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe; said method comprising displacing the probe in a direction perpendicular to the substrate face by piezoelectric effect caused by application of voltage between the first electrode layer and the second electrode layer.
Claim 15
Dependent Claim
73 words
A scanning type of tunnel current detecting device having a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; an adjusting means for adjusting the distance between the probe and a specimen to be observed; and a voltage applying means for applying a voltage between the probe and the specimen.
Claim 16
Dependent Claim
73 words
A scanning type of tunnel current detecting device having a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; an adjusting means for adjusting the distance between the probe and a specimen to be observed; and a voltage applying means for applying a voltage between the probe and the specimen.
Claim 17
Dependent Claim
21 words
The device of claim 8, wherein said device has a second driving means for moving the specimen relative to the probe.
Claim 18
Dependent Claim
53 words
The device of claim 8, wherein said probe unit has a first electrode on the substrate, said flexible member is insulated from the first electrode by a cavity and constituted of a laminate comprising a second electrode layer, an insulating layer and a third electrode layer for applying a voltage to the probe.
Claim 19
Dependent Claim
58 words
The device of claim 8, wherein said probe unit has a first electrode on the substrate, the first electrode is connected through a piezoelectric layer to the flexible member, and the flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 20
Dependent Claim
45 words
The device of claim 8, wherein said flexible member is constituted of a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer and a third electrode layer for applying a voltage to the probe.
Claim 21
Dependent Claim
69 words
A scanning tunnel microscope having: a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; an adjusting means for adjusting the distance between the probe and a specimen to be observed; and a voltage applying means for applying a voltage between the probe and the specimen.
Claim 22
Dependent Claim
69 words
A scanning tunnel microscope having: a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; an adjusting means for adjusting the distance between the probe and a specimen to be observed; and a voltage applying means for applying a voltage between the probe and the specimen.
Claim 23
Dependent Claim
23 words
The scanning tunnel microscope of claim 13, wherein said microscope has a second driving means for moving the specimen relative to the probe.
Claim 24
Dependent Claim
54 words
The scanning tunnel microscope of claim 13, wherein said probe unit has a first electrode on the substrate, said flexible member is insulated from the first electrode by a cavity and comprises a laminate comprising a second electrode layer, an insulating layer and a third electrode layer for applying a voltage to the probe.
Claim 25
Dependent Claim
58 words
The scanning tunnel microscope of claim 13, wherein said probe unit has a first electrode on the substrate, the first electrode is connected through a piezoelectric layer to the flexible member, and the flexible member comprises a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 26
Dependent Claim
44 words
The scanning tunnel microscope of claim 13, wherein said flexible member comprises a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer and a third electrode layer for applying a voltage the probe.
Claim 27
Dependent Claim
70 words
A recording-reproducing device having, a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; a recording medium; an adjusting means for adjusting the distance between the probe and the recording medium; and a voltage applying means for applying a voltage between the probe and the recording medium.
Claim 28
Dependent Claim
70 words
A recording-reproducing device having, a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate; a recording medium; an adjusting means for adjusting the distance between the probe and the recording medium; and a voltage applying means for applying a voltage between the probe and the recording medium.
Claim 29
Dependent Claim
23 words
The recording-reproducing device of claim 18, wherein said device comprises a second driving means for moving the recording medium relative to the probe.
Claim 30
Dependent Claim
53 words
The recording-reproducing device of claim 18, wherein said probe unit comprises a first electrode on the substrate, said flexible member is insulated from the first electrode by a cavity and comprises a laminate comprising a second electrode layer, an insulating layer and a third electrode layer for applying a voltage to the probe.
Claim 31
Dependent Claim
57 words
The recording-reproducing device of claim 18, wherein said probe unit has a first electrode on the substrate, the first electrode is connected through a piezoelectric layer to the flexible member, and the flexible member comprises a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage to the probe.
Claim 32
Dependent Claim
43 words
The recording-reproducing device of claim 18, wherein said flexible member comprises a laminate comprising a beam structure layer, a first electrode layer, a piezoelectric layer, a second electrode layer, an insulating layer and a third electrode layer for applying a voltage the probe.
Claim 33
Dependent Claim
15 words
The recording-reproducing device of claim 18, wherein said recording medium has an electric memory effect.
Claim 34
Dependent Claim
20 words
The recording-reproducing device of claim 18, wherein said recording medium comprises a base electrode and a recording layer provided thereon.
Claim 35
Dependent Claim
14 words
The recording-reproducing device of claim 24, wherein said recording medium comprises an organic compound.
Claim 36
Dependent Claim
23 words
The recording-reproducing device of claim 24, wherein said recording medium comprises a monomolecular film or a monomolecular built-up film of an organic compound.
Claim 37
Dependent Claim
65 words
A recording method employing a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate, said method comprising the steps of: allowing said probe to come close to a recording medium; and applying a pulse voltage between said probe and said recording medium.
Claim 38
Dependent Claim
65 words
A recording method employing a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate, said method comprising the steps of: allowing said probe to come close to a recording medium; and applying a pulse voltage between said probe and said recording medium.
Claim 39
Dependent Claim
15 words
The recording method of claim 27, wherein said recording medium has an electric memory effect.
Claim 40
Dependent Claim
20 words
The recording method of claim 27, wherein said recording medium comprises a base electrode and a recording layer provided thereon.
Claim 41
Dependent Claim
24 words
The recording method of claim 27, wherein said pulse voltage exceeds a threshold voltage at which the electroconductivity of said recording medium is changed.
Claim 42
Dependent Claim
77 words
A recording-reproducing method employing a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate, said method comprising the steps of: allowing said probe to come close to a recording medium; applying a pulse voltage between said probe and said recording medium to perform recording; and applying a bias voltage therebetween to reproduce a record.
Claim 43
Dependent Claim
77 words
A recording-reproducing method employing a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate, said method comprising the steps of: allowing said probe to come close to a recording medium; applying a pulse voltage between said probe and said recording medium to perform recording; and applying a bias voltage therebetween to reproduce a record.
Claim 44
Dependent Claim
15 words
The recording-reproducing method of claim 31, wherein said recording medium has an electric memory effect.
Claim 45
Dependent Claim
20 words
The recording-reproducing method of claim 31, wherein said recording medium comprises a base electrode and a recording layer provided thereon.
Claim 46
Dependent Claim
24 words
The recording-reproducing method of claim 31, wherein said pulse voltage exceeds a threshold voltage at which the electroconductivity of said recording medium is changed.
Claim 47
Dependent Claim
26 words
The recording-reproducing method of claim 31, wherein said bias voltage does not exceed a threshold voltage at which the electroconductivity of said recording medium is changed.
Claim 48
Dependent Claim
88 words
A recording-reproducing-eliminating method employing a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate, said method comprising the steps of: allowing said probe to come close to a recording medium; applying a first pulse voltage between said probe and said recording medium to perform recording; applying a bias voltage therebetween to reproduce a record; and applying a second pulse voltage therebetween to eliminate a record.
Claim 49
Dependent Claim
88 words
A recording-reproducing-eliminating method employing a probe unit comprising a substrate, a bridge-shaped flexible member provided on the substrate, a probe provided on the flexible member, and a driving means for displacing the probe relative to the substrate, said method comprising the steps of: allowing said probe to come close to a recording medium; applying a first pulse voltage between said probe and said recording medium to perform recording; applying a bias voltage therebetween to reproduce a record; and applying a second pulse voltage therebetween to eliminate a record.
Claim 50
Dependent Claim
15 words
The recording-reproducing-eliminating method of claim 36, wherein said recording medium has an electric memory effect.
Claim 51
Dependent Claim
20 words
The recording-reproducing-eliminating method of claim 36, wherein said recording medium comprises a base electrode and a recording layer provided thereon.
Claim 52
Dependent Claim
25 words
The recording-reproducing-eliminating method of claim 36, wherein said first pulse voltage exceeds a threshold voltage at which the electroconductivity of said recording medium is changed.
Claim 53
Dependent Claim
26 words
The recording-reproducing-eliminating method of claim 36, wherein said bias voltage does not exceed a threshold voltage at which the electroconductivity of said recording medium is changed.
Claim 54
Dependent Claim
25 words
The recording-reproducing-eliminating method of claim 36, wherein said second pulse voltage exceeds a threshold voltage at which the electroconductivity of said recording medium is changed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-03-04 | 1994-09-03 | 1995-03-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-04 | 1998-09-03 | 1999-03-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-04 | 2002-09-03 | 2003-03-05 | $7700.00 | Window Closed / Lapsed |