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US5556734A Expired / Lapsed US ⏱️ 0.0 years remaining

Radiation sensitive resin composition comprising copolymer of isopropenylphenol and T-butyl(meth)acrylate

Assignee: JSR Corp
•
Filing: 1994-12-23
•
Granted: 1996-09-17
•
Expires: 2014-12-23
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Abstract

Abstract A radiation sensitive resin composition which comprises (A) a copolymer represented by the following general formula and (B) a radiation sensitive acid generator and, if necessary, (C) an alkali-soluble resin: ##STR1## wherein R represents a hydrogen atom or a methyl group and m and n are integers representing the numbers of the respective recurring units and satisfying the relations 0.1≧m/(m+n)<0.6 and 0.4<n/(m+n)≦0.9. Said radiation sensitive resin composition is excellent in resolution and pattern profile and also excellent in sensitivity and developability and is useful as a chemically amplified resist good in contrast and heat resistance.

Inventors

  • 👤 Mikio Yamachika
  • 👤 Eiichi Kobayashi
  • 👤 Toshiyuki Ota
  • 👤 Akira Tsuji

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 15:18
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/0045; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111; Y10S430/114; Y10S430/122

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 57 words
A radiation sensitive resin composition which comprises (A) a copolymer represented by the following general formula ( 1) and (B) a radiation sensitive acid generator: ##STR6## wherein R represents a hydrogen atom or a methyl group and m and n are integers representing the numbers of the respective recurring units and satisfying the relations 0.1≦m/(m+n)<0.5 and 0.5<n/(m+n)≦0.9.
Claim 2
Dependent Claim 57 words
A radiation sensitive resin composition which comprises (A) a copolymer represented by the following general formula ( 1) and (B) a radiation sensitive acid generator: ##STR6## wherein R represents a hydrogen atom or a methyl group and m and n are integers representing the numbers of the respective recurring units and satisfying the relations 0.1≦m/(m+n)<0.5 and 0.5<n/(m+n)≦0.9.
Claim 3
Dependent Claim 16 words
The radiation sensitive resin composition according to claim 1, which further contains (C) an alkali-soluble resin.
Claim 4
Dependent Claim 27 words
The radiation sensitive resin composition according to claim 1, wherein the copolymer (A) represented by the general formula (1) is a copolymer of isopropenylphenol and tert-butyl acrylate.
Claim 5
Dependent Claim 14 words
The radiation sensitive resin composition according to claim 3, wherein the isopropenylphenol is p-isopropenylphenol.
Claim 6
Dependent Claim 30 words
The radiation sensitive resin composition according to claim 1, wherein the copolymer (A) represented by the general formula (1) is a random copolymer, a block copolymer or a graft copolymer.
Claim 7
Dependent Claim 26 words
The radiation sensitive resin composition according to claim 1, wherein m and n in the general formula (1) are integers satisfying the relations 0.3≦m/(m+n)<0.5 and 0.5<n/(m+n)≦0.7.
Claim 8
Dependent Claim 25 words
The radiation sensitive resin composition according to claim 1, wherein the polystyrene-reduced weight average molecular weight (Mw) of the copolymer (A) is 3,000 to 60,000.
Claim 9
Dependent Claim 41 words
The radiation sensitive resin composition according to claim 1, wherein the ratio of the polystyrene-reduced weight average molecular weight (Mw) of the copolymer (A) to the polystyrene-reduced number average molecular weight (Mn) of the copolymer (A) (Mw/Mn) is 1 to 5.
Claim 10
Dependent Claim 41 words
The radiation sensitive resin composition according to claim 1, wherein the radiation sensitive acid generator (B) is at least one compound selected from the group consisting of onium salt compounds, halogen-containing compounds, sulfone compounds, sulfonic acid ester compounds and quinonediazide compounds.
Claim 11
Dependent Claim 36 words
The radiation sensitive resin composition according to claim 1, wherein the amount of the radiation sensitive acid generator (B) contained is 0.05 to 20 parts by weight per 100 parts by weight of the copolymer (A).
Claim 12
Dependent Claim 32 words
The radiation sensitive resin composition according to claim 2, wherein the alkali-soluble resin (C) is a resin which has at least one acidic functional group and is soluble in an alkali developer.
Claim 13
Dependent Claim 40 words
The radiation sensitive resin composition according to claim 2, wherein the alkali-soluble resin (C) is a resin selected from the group consisting of polyvinyl type resins having an acidic functional group and condensation type resins having an acidic functional group.
Claim 14
Dependent Claim 27 words
The radiation sensitive resin composition according to claim 12, wherein the content of the recurring unit having an acidic functional group is 15 to 100 mole %.
Claim 15
Dependent Claim 26 words
The radiation sensitive resin composition according to claim 2, wherein the alkali-soluble resin (C) has a polystyrene-reduced weight average molecular weight (Mw) of 1,000 to 150,000.
Claim 16
Dependent Claim 34 words
The radiation sensitive resin composition according to claim 2, wherein the amount of the alkali-soluble resin (C) contained is 0.1 to 1,000 parts by weight per 100 parts by weight of the copolymer (A).
Claim 17
Dependent Claim 42 words
The radiation sensitive resin composition according to claim 1 or 2, which further contains an acid-diffusion controller which controls the diffusion of the acid generated from the radiation sensitive acid generator (B) by exposure in a resist film formed from the composition.
Claim 18
Dependent Claim 28 words
The radiation sensitive resin composition according to claim 1 or 2, which further contains a dissolution controller which controls the dissolution of the composition in an alkali developer.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-09-17 2000-03-18 2000-09-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-09-17 2004-03-18 2004-09-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-09-17 2008-03-18 2008-09-17 $7700.00 Window Closed / Lapsed

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