Photosolubilizable composition

Claim 1

A photosolubilizable composition containing a first compound capable of producing an acid by irradiation in admixture with a second compound having at least one silyl ether or silyl ester group capable of being decomposed by an acid, said second compound being selected from a Compound (a) and Compound (b), said first compound being present in an amount sufficient to increase the solubility in a developing solution of said second compound upon producing said acid, with the ratio of said first compound to the second compound being from 0.001/1 to 2/1, wherein said Compound (a) is a compound including at least one silyl ether group represented by formula (Ib): ##STR11## wherein R 12 , R 13 and R 14 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, a halogen atom, or --OR 16 ; R 15 represents a divalent aliphatic or aromatic hydrocarbon residue; R 16 represents an alkyl group, an aryl group, or an aralkyl group; or R 15 and R 16 may combine with each other to form a part of an aliphatic or aromatic ring; n 1 represents a positive integer; and a 1 and b 1 each represents 0 to 1, and said Compound (b) is a compound including at least one silyl ester group represented by formula (IIb): ##STR12## wherein R 22 , R 23 and R 24 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, an alkoxy group, a halogen atom, or ##STR13## R 25 and R 26 each represents a divalent aliphatic or aromatic hydrocarbon residue; R 27 represents an alkyl group, an aryl group, or an aralkyl group; n 2 represents a positive integer; and a 2 and b 2 each represents 0 or 1.