Photosolubilizable composition with silyl ether or silyl ester compound

Claim 1

A photosolubilizable composition consisting essentially of a first compound capable of producing an acid by irradiation in admixture with a second compound having at least one silyl ether or silyl ester group capable of being decomposed by an acid, said second compound being selected from a Compound (a) and a Compound (b), said first compound being present in an amount sufficient to increase the solubility in a developing solution of said second compound upon producing said acid, with the ratio of said first compound to the second compound being from 0.001/1 to 2/1, wherein said first compound is selected from a phosphonium, sulfonium or iodonium salt of BF 4 - , PF 6 - , SbF 6 - , SiF 6 - or ClO 4 - , an s-triazine which is substituted by a halomethyl group, and an oxadiazole which is substituted by a halomethyl group, Compound (a) is a compound including at least one silyl ether group represented by formula (Ia): ##STR10## wherein R 11 represents an m 1 -valent aliphatic or aromatic hydrocarbon residue; R 12 , R 13 , and R 14 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, a halogen atom, or --OR 16 ; R 16 represents an alkyl group, an aryl group, or an aralkyl group; and m 1 represents a positive integer; and said Compound (b) is a compound including at least one silyl ester group represented by formula (IIa): ##STR11## wherein R 21 represents an m 2 -valent aliphatic or aromatic hydrocarbon residue; R 22 , R 23 , and R 24 each represents a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, an aralkyl group, an alkoxy group, a hydrogen atom, or ##STR12## R 27 represents an alkyl group, an aryl group, or an aralkyl group; and m 2 represents a positive integer.