US5547808A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resist composition having a siloxane-bond structure
Assignee: Panasonic Holdings Corp
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Filing: 1994-09-09
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Granted: 1996-08-20
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Expires: 2014-09-09
Abstract
Abstract The present invention provides a composition having sensitivity to light or radiation. The composition comprises a polymer having a siloxane-bond structure which undergoes polymerization reaction when irridiated with light or radiation, and a sensitizing agent. The present invention also provides a process for forming a pattern, preparing a photomask and a semiconductor device by using the composition of the present invention.
Inventors
- 👤 Hisashi Watanabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/0758; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/117; Y10S430/126; Y10S430/128
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
88 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group, wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; and a sensitizing agent; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 2
Dependent Claim
88 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group, wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; and a sensitizing agent; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 3
Dependent Claim
36 words
A composition having sensitivity to light or radiation according to claim 1, wherein said polymer having a siloxane-bond structure is a single chain-form polysiloxane, a ladder-form polysiloxane, or said polymer has a three-dimensional structure of polysiloxane.
Claim 4
Dependent Claim
36 words
A composition having sensitivity to light or radiation according to claim 2, wherein said polymer having a siloxane-bond structure is a polysilsesquioxane which contains an alkyl group or a phenyl group as said side chain group.
Claim 5
Dependent Claim
39 words
A composition having sensitivity to light or radiation according to claim 1, wherein at least one of the end groups or the side chains groups of said polymer is a hydroxyl group, an alkoxyl group, or a phenoxy group.
Claim 6
Dependent Claim
31 words
A composition having sensitivity to light or radiation according to claim 1, wherein said polymer having a siloxane-bond structure is contained in an amount of 10 percent by weight or more.
Claim 7
Dependent Claim
29 words
A composition having sensitivity to light or radiation according to claim 1, wherein said sensitizing agent producing an acid is an onium salt, a diazonium salt, or a sulfonate.
Claim 8
Dependent Claim
36 words
A composition having sensitivity to light or radiation according to claim 1, wherein said sensitizing agent is contained in an amount of 40 percent by weight or less based on the weight of said base polymer.
Claim 9
Dependent Claim
83 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least two end groups and a side chain group; and a sensitizing agent; wherein said polymer is polysilsesquioxane which contains hydroxyl groups and alkoxyl groups as said end groups in a ratio of 1 to 1; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end groups of said polymer.
Claim 10
Dependent Claim
83 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least two end groups and a side chain group; and a sensitizing agent; wherein said polymer is polysilsesquioxane which contains hydroxyl groups and alkoxyl groups as said end groups in a ratio of 1 to 1; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end groups of said polymer.
Claim 11
Dependent Claim
97 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group, wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; a sensitizing agent; and a dye having high solubility in a polar solvent; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 12
Dependent Claim
97 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group, wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; a sensitizing agent; and a dye having high solubility in a polar solvent; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 13
Dependent Claim
24 words
A composition having sensitivity to light or radiation according to claim 9, wherein said dye having high solubility in a polar solvent is phenothiazine.
Claim 14
Dependent Claim
103 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group; and a sensitizing agent; wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; wherein said functional group is a hydroxyl group, an alkoxyl group, or a phenoxy group; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 15
Dependent Claim
103 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group; and a sensitizing agent; wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; wherein said functional group is a hydroxyl group, an alkoxyl group, or a phenoxy group; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 16
Dependent Claim
36 words
A composition having sensitivity to light or radiation according to claim 11, wherein said polymer having a siloxane-bond structure is a single chain-form polysiloxane, a ladder-form polysiloxane, or said polymer has a three-dimensional structure of polysiloxane.
Claim 17
Dependent Claim
36 words
A composition having sensitivity to light or radiation according to claim 11, wherein said polymer having a siloxane-bond structure is a polysilsesquioxane which contains an alkyl group or a phenyl group as said side chain group.
Claim 18
Dependent Claim
112 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group; a sensitizing agent; and a dye having high solubility in a polar solvent; wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; wherein said functional group is a hydroxyl group, an alkoxyl group, or a phenoxy group; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 19
Dependent Claim
112 words
A composition having sensitivity to light or radiation, consisting essentially of: a polymer having a siloxane-bond structure and having at least one end group or a side chain group; a sensitizing agent; and a dye having high solubility in a polar solvent; wherein each of said end group and said side chain group is a functional group which causes condensation polymerization upon exposure to acid; wherein said functional group is a hydroxyl group, an alkoxyl group, or a phenoxy group; wherein said sensitizing agent produces an acid when irradiated with light or radiation; and wherein said acid causes condensation polymerization at said end group or said side chain group of said polymer.
Claim 20
Dependent Claim
23 words
A composition having sensitivity to light or radiation according to claim 14, wherein said dye having solubility in a polar solvent is phenothiazine.
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