EP0076656A2
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EP
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Solvent-soluble organopolysilsesquioxanes, processes for producing the same, and compositions and semiconductor devices using the same
Assignee: JSR Corp
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Filing: 1982-09-30
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Granted: —
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Expires: 2002-09-30
Abstract
Abstract An organopolysilsesquioxane having lower alkyl groups and alkenyl groups and, if necessary, aryl groups and/or hydrogen atoms bonded as the side chains can be produced by adding water to a solution of a lower-alkyltrihalosilane, an alkenyltrihalosilane, and, if necessary, an aryltrihalosilane and/or a trihalosilane in an organic solvent, and heating the resulting mixture. The aforesaid organopolysilsesquioxane can be used for forming a patterned surface-protecting layer or insulating layer for a semiconductor device, optionally in the form of a mixture with a compound which generates a crosslinking-reaction-active species upon irradiation with light or ionizing radiation.
Inventors
- 👤 Ikuo Nozue
- 👤 Osahiko Tomomitsu
- 👤 Yoshiji Yumoto
- 👤 Yoshio Matsumura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 02:28
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6926; C; C08; C08G; C08G77/00; C08G77/04; C08G77/06; C08G77/20; C08K; C08K5/00; C08K5/0008; C08K5/0025; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/46; H01B3/465; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6536
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
76 words
A solvent-soluble organopolysilsesquioxane represented by the formula (I): wherein R and R', which may be the same or different, represent hydrogen atoms or organic groups, and n is degree of polymerization, characterized in that some of the groups represented by R and R' are C 1 -C 8 alkyl groups, some of the groups represented by R and/or R' are alkenyl groups and, optionally some of R and/or R 1 represent aryl groups and/or hydrogen atoms.
Claim 2
Dependent Claim
76 words
A solvent-soluble organopolysilsesquioxane represented by the formula (I): wherein R and R', which may be the same or different, represent hydrogen atoms or organic groups, and n is degree of polymerization, characterized in that some of the groups represented by R and R' are C 1 -C 8 alkyl groups, some of the groups represented by R and/or R' are alkenyl groups and, optionally some of R and/or R 1 represent aryl groups and/or hydrogen atoms.
Claim 3
Dependent Claim
37 words
An organopolysilsesquioxane according to Claim 1, wherein said alkyl groups have from 1 to 5 carbon atoms; said alkenyl groups have from 2 to 5 carbon atoms; and said aryl groups have 6 to 10 carbon atoms.
Claim 4
Dependent Claim
20 words
An organopolysilsesquioxane according to Claim 1, wherein said alkyl groups are methyl groups and said alkenyl groups are vinyl groups.
Claim 5
Dependent Claim
51 words
An organopolysilsesquioxane according to any one of the preceding Claims, wherein the proportions of said alkyl groups, alkenyl groups, aryl groups and hydrogen atoms bonded as side chains are from 50 to 99, from 1 to 50, from 0 to 49 and from 0 to 49, respectively, per 100 side chains.
Claim 6
Dependent Claim
27 words
An organopolysilsesquioxane according to any one of the preceding Claims, wherein n has a value corresponding to a polystyrene-reduced number average molecular weight of 3,000 to 200,000.
Claim 7
Dependent Claim
45 words
A process for producing an organopolysilsesquioxane as claimed in any one of the preceding Claims, wherein water is added to a solution of an alkyltrihalosilane, an alkenyltrihalosilane and, if necessary, an aryltrihalosilane and/or a trihalosilane in an organic solvent, and the resulting solution is heated.
Claim 8
Dependent Claim
47 words
A process according to Claim 6, wherein said alkyltrihalosilane has from 1 to 5 carbon atoms in its alkyl group; said alkenyltrihalosilane has from 2 to 5 carbon atoms in its alkenyl group; and said aryltrihalosilane has from 6 to 10 carbon atoms in its aryl group.
Claim 9
Dependent Claim
16 words
A process according to Claim 7, wherein said alkyltrihalosilane is methyltrichlorosilane and said alkenyltrihalosilane is vinyltrichlorosilane.
Claim 10
Dependent Claim
58 words
A process according to any one of Claims 6 to 8, wherein the amounts of said alkyltrihalosilane, said alkenyltrihalosilane, said aryltrihalosilane and said trihalosilane used are from 50 to 99 mole %, from 1 to 50 mole %, from 0 to 49 mole % and from 0 to 49 mole %, respectively, the sum being 100 mole %.
Claim 11
Dependent Claim
29 words
A process according to any one of Claims 6 to 9, wherein the organic solvent contains at least 40 mole % of a ketone or an ether or both.
Claim 12
Dependent Claim
45 words
A process according to any one of Claims 6 to 10, wherein the amount of the organic solvent used is from 4 to 20 parts by volume per part by volume of the total sun of said alkyltrihalosilane, said alkenyltrihalosilane, said aryltrihalosilane and said trihalosilane.
Claim 13
Dependent Claim
28 words
A process according to any one of Claims 6 to 11, wherein the water is gradually added to the solution at a temperature of from 10° to 50°C.
Claim 14
Dependent Claim
38 words
A process according to any one of Claims 6 to 12, wherein the amount of water used is from 3 to 30 moles per mole of the sum of said alkyltrihalosilane, said alkenyltrihalosilane, said aryltrihalosilane and said trihalosilane.
Claim 15
Dependent Claim
24 words
A process according to any one of Claims 6 to 13, wherein, after addition of water, said solution is heated to 130°C or less.
Claim 16
Dependent Claim
25 words
A process according to any one of Claims 6 to 13, wherein, after addition of water, said solution is heated to from 70° to 110°C.
Claim 17
Dependent Claim
22 words
A process according to any one of Claims 6 to 15, wherein the water is added in the presence of an amine.
Claim 18
Dependent Claim
37 words
A process according to Claim 16, wherein the amount of the amine used is 3 moles or less per mole of the sum of said alkyltrihalosilane, said alkenyltrihalosilane, said aryl trihal osil ane and said trihal osilane.
Claim 19
Dependent Claim
53 words
A process for producing an organopolysilsesquioxane as claimed in any one of Claims 1 to 5, wherein water is added, in the presence of an organic amine, to a solution of an alkyltrialkoxysilane, an alkenyltrialkoxysilane and, if necessary, an aryltrialkoxysilane and/or a trialkoxysilane in an organic solvent, and the resulting mixture is heated.
Claim 20
Dependent Claim
47 words
A process according to Claim 18, wherein said alkyltrialkoxysilane has from 1 to 5 carbon atoms in its alkyl group; said alkenyltrialkoxysilane has from 2 to 5 carbon atoms in its alkenyl group; and said aryltrialkoxysilane has from 6 to 10 carbon atoms in its aryl group.
Claim 21
Dependent Claim
56 words
A process according to Claim 18 or Claim 19, wherein the amounts of said alkyltrialkoxysilane, said alkenyltrialkoxysilane, said aryltrialkoxysilane and said trialkoxysilane used are from 50 to 99 mole %, from 1 to 50 mole %, from 0 to 49 mole % and from 0 to 49 mole %, respectively, the sum being 100 mole %.
Claim 22
Dependent Claim
38 words
A process according to any one of Claims 18 to 20, wherein the amount of water used is from 3 to 30 moles per mole of the sum of said alkyltrialkoxysilane, said alkenyltrialkoxysilane, said aryltrialkoxysilane and said trialkoxysilane.
Claim 23
Dependent Claim
24 words
A process according to any one of Claims 18 to 21, wherein, after addition of water, said mixture is heated to 130°C or less.
Claim 24
Dependent Claim
25 words
A process according to any one of Claims 18 to 21, wherein, after addition of water, said mixture is heated to from 60° to 120°C.
Claim 25
Dependent Claim
40 words
A process according to any one of Claims 18 to 23, wherein the amount of amine used is from 0.05 to 3 moles per mole of the sum of said alkyltrialkoxysilane, said alkenyltrialkoxysilane, said aryltrialkoxysilane and said trialkoxy- sil ane.
Claim 26
Dependent Claim
30 words
A composition comprising an organopolysilsesquioxane as claimed in any one of Claims 1 to 5 and a compound which generates a cross-linking-reaction-active species upon irradiation with light or ionizing radiation.
Claim 27
Dependent Claim
32 words
A composition according to Claim 25, wherein said compound is an azido compound, a carbonyl compound, an aromatic hydrocarbon, a nitro compound, a nitrogen compound, a sulphur compound, or an azo compound.
Claim 28
Dependent Claim
36 words
A composition according to Claim 25 or Claim 26, wherein the amount of said compound is from 0.1 to 10 parts by weight per 10 parts by weight per 100 parts by weight of said organopolysilsesquioxane.
Claim 29
Dependent Claim
34 words
A semiconductor device having a patterned surface-protecting layer or electrically insulating layer which is an organopolysilsesquioxane as claimed in any one of Claims 1 to 5 cross-linked by irradiation with light or ionizing radiation.
Claim 30
Dependent Claim
87 words
A process for producing a semiconductor device, comprising (a) forming a layer of an organopolysilsesquioxane as claimed in any one of Claims 1 to 5 or a composition as claimed in any one of Claims 25 to 27 on the surface of a material for a semiconductor device on which a patterned surface-protecting layer or electrically insulating layer is to be formed, and (b) irradiating a part of the aforesaid layer with light or ionizing radiation to cross-link the irradiated portions, and (c) removing the unirradiated portions.
References Cited (Backward Citations)
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