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US5545353A
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US
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Non-corrosive photoresist stripper composition
Assignee: Olin Microelectronic Chemicals Inc
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Filing: 1995-05-08
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Granted: 1996-08-13
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Expires: 2015-05-08
Abstract
Abstract A non-corrosive photoresist composition containing: (a) 20-70% by weight of an organic polar solvent having a dipole moment of more than 3.5; (b) 70-20% by weight of selected amine compounds; (c) 0.1-10% by weight of (2-benzothiozolylthio)succinic acid.
Inventors
- 👤 Kenji Honda
- 👤 Taishih Maw
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:29
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; C; C11; C11D; C11D7/00; C11D7/50; C11D7/5004; C11D7/5009; G03F7/42; G03F7/422; G03F7/425; C11D7/22; C11D7/32; C11D7/3209; C11D7/3218; C11D7/3227; C11D7/34
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
111 words
A photoresist stripper composition comprising: (a) from about 20 to about 70% by weight of an organic polar solvent having a dipole moment of more than 3.5; (b) from about 70 to about 20% by weight of an amine compound selected from the group consisting of an alkanolamine compound within the formula (I): ##STR3## wherein n and m are each independently an integer ranging from 0-5, inclusive; X is hydrogen, alkyl, or alkoxy group; Y is either --O-- or --NH--; and Z is hydrogen, --OH, or --NH 2 ; (c) from about 0.1 to about 10% by weight of (2-benzothiozolylthio)succinic acid; all percents based on the weight of the stripper composition.
Claim 2
Dependent Claim
111 words
A photoresist stripper composition comprising: (a) from about 20 to about 70% by weight of an organic polar solvent having a dipole moment of more than 3.5; (b) from about 70 to about 20% by weight of an amine compound selected from the group consisting of an alkanolamine compound within the formula (I): ##STR3## wherein n and m are each independently an integer ranging from 0-5, inclusive; X is hydrogen, alkyl, or alkoxy group; Y is either --O-- or --NH--; and Z is hydrogen, --OH, or --NH 2 ; (c) from about 0.1 to about 10% by weight of (2-benzothiozolylthio)succinic acid; all percents based on the weight of the stripper composition.
Claim 3
Dependent Claim
14 words
The stripper composition of claim 1 wherein said solvent (a) is a cyclic amide.
Claim 4
Dependent Claim
21 words
The stripper composition of claim 2 wherein said cyclic amide is selected from the group consisting of N-alkyl-2-pyrrolidone, N-hydroxyalkyl-2-pyrrolidone, and 1,3-dialkyl-2-imidazolidinone.
Claim 5
Dependent Claim
23 words
The stripper composition of claim 1 wherein said alkanolamine is selected from the group consisting of monoethanolamine, 2-(2-aminoethoxy)ethanol and 2-(2-aminoethylamino)ethanol, diethanolamine, and triethanolamine.
Claim 6
Dependent Claim
22 words
The stripper composition of claim 2 wherein said alkanolamine is selected from the group consisting of monoethanolamine, 2-(2-aminoethoxy) ethanol, diethanolamine, and triethanolamine.
Claim 7
Dependent Claim
22 words
The stripper composition of claim 3 wherein said alkanolamine is selected from the group consisting of monoethanolamine, 2-(2-aminoethoxy) ethanol, diethanolamine and triethanolamine.
Claim 8
Dependent Claim
11 words
The stripper composition of claim 3 wherein said N-alkyl-2-pyrrolidone is N-methyl-2-pyrrolidone.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-13 | 2000-02-12 | 2000-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-13 | 2004-02-12 | 2004-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-13 | 2008-02-12 | 2008-08-13 | $7700.00 | Window Closed / Lapsed |