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US5536606A
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Method for making self-aligned rim phase shifting masks for sub-micron lithography
Assignee: Micron Technology Inc
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Filing: 1995-05-30
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Granted: 1996-07-16
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Expires: 2015-05-30
Abstract
Abstract A method for making self aligned rim phase shifting masks for photolithography is provided. The method includes providing a transparent substrate (e.g., quartz) having a patterned opaque layer (e.g., chrome) and then forming phase shifters at the rim or edges of the features defined by the opaque layer. The phase shifters are formed by depositing two different layers of transparent material (e.g., Si 3 N 4 /SiO 2 ) over the substrate and opaque layer. The first layer of material is a spacer layer which accurately spaces the rim phase shifters from the feature. The second layer of material is a phase shifter layer that forms the bulk of the rim phase shifters. Following deposition both layers are planarized to expose the spacer layer. The spacer layer is then selectively etched with respect to the phase shifter layer. This is followed by another etch of the phase shifter layer to form the rim phase shifters.
Inventors
- 👤 Trung T. Doan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 11:08
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/29
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
144 words
A method for forming a rim phase shifting mask comprising: providing a transparent substrate; forming opaque light blockers with sidewalls and light transmission openings there between on the substrate; forming a first layer of material over the substrate, and over the light blockers and the sidewalls thereof, said first layer of material formed of a transparent material of a predetermined thickness; forming a second layer of material on the first layer of material said second layer of material formed of a transparent material; exposing the first layer of material on the sidewalls; etching the first layer selectively with respect to the second layer to remove the first layer of material from the sidewalls; and etching the second layer of material to form phase shifters spaced from the sidewalls by the thickness of the first layer of material and having a predetermined width and height.
Claim 2
Independent Claim
144 words
A method for forming a rim phase shifting mask comprising: providing a transparent substrate; forming opaque light blockers with sidewalls and light transmission openings there between on the substrate; forming a first layer of material over the substrate, and over the light blockers and the sidewalls thereof, said first layer of material formed of a transparent material of a predetermined thickness; forming a second layer of material on the first layer of material said second layer of material formed of a transparent material; exposing the first layer of material on the sidewalls; etching the first layer selectively with respect to the second layer to remove the first layer of material from the sidewalls; and etching the second layer of material to form phase shifters spaced from the sidewalls by the thickness of the first layer of material and having a predetermined width and height.
Claim 3
Dependent Claim
20 words
The method as recited in claim 1 and wherein the first and second layer are exposed using chemical mechanical polishing.
Claim 4
Dependent Claim
21 words
The method as recited in claim 1 and wherein the first and second layer are exposed using a dry etch process.
Claim 5
Dependent Claim
49 words
The method as recited in claim 1 and wherein the first layer is formed of a material selected from the group consisting of SiO 2 , Si 3 N 4 , AlO 2 , TiO 2 , tetraethylorthosilicate, doped glass, CaF 2 , MgF 2 , and polymethyl methacrylate.
Claim 6
Dependent Claim
49 words
The method as recited in claim 1 and wherein the second layer is formed of a material selected from the group consisting of SiO 2 , Si 3 N 4 , AlO 2 , TiO 2 , tetraethylorthosilicate, doped glass, CaF 2 , MgF 2 , and polymethyl methacrylate.
Claim 7
Dependent Claim
25 words
The method as recited in claim 1 and wherein the first layer is Si 3 N 4 and the second layer is SiO 2 .
Claim 8
Dependent Claim
30 words
The method as recited in claim 1 and further comprising etching the substrate to a predetermined depth to form vertical portions coplanar with the sidewalls of the opaque light blockers.
Claim 9
Independent Claim
169 words
A method for forming a rim phase shifting mask comprising: providing a transparent substrate; forming an opaque layer on the transparent substrate having opaque light blockers with sidewalls and light transmission openings there between; depositing a first layer of material over the substrate and the sidewalls of the opaque light blockers, said first layer of material formed of a transparent material having a predetermined thickness; depositing a second layer of material on the first layer of material, said second layer of material formed of a transparent material; planarizing the first and second layer of material to expose the first layer of material on the sidewalls; etching the first layer selectively with respect to the second layer to remove the first layer of material from the sidewalls and to form a gap between the sidewalls of the opaque layer and the second layer of material; and etching the second layer of material to form phase shifters spaced from the sidewalls by the gap and having a predetermined width and height.
Claim 10
Independent Claim
169 words
A method for forming a rim phase shifting mask comprising: providing a transparent substrate; forming an opaque layer on the transparent substrate having opaque light blockers with sidewalls and light transmission openings there between; depositing a first layer of material over the substrate and the sidewalls of the opaque light blockers, said first layer of material formed of a transparent material having a predetermined thickness; depositing a second layer of material on the first layer of material, said second layer of material formed of a transparent material; planarizing the first and second layer of material to expose the first layer of material on the sidewalls; etching the first layer selectively with respect to the second layer to remove the first layer of material from the sidewalls and to form a gap between the sidewalls of the opaque layer and the second layer of material; and etching the second layer of material to form phase shifters spaced from the sidewalls by the gap and having a predetermined width and height.
Claim 11
Dependent Claim
20 words
The method as recited in claim 8 and wherein the first and second layers are planarized using chemical mechanical polishing.
Claim 12
Dependent Claim
21 words
The method as recited in claim 8 and wherein the first and second layers are planarized using a dry etch process.
Claim 13
Dependent Claim
30 words
The method as recited in claim 8 and further comprising etching the substrate to a predetermined depth to form vertical portions coplanar with the sidewalls of the opaque light blockers.
Claim 14
Dependent Claim
48 words
The method as recited in claim 8 and wherein a total thickness of the phase shifters is selected to achieve a phase shift of π or odd multiple thereof for light passing through the phase shifters relative to light diffracted from the sidewalls of the opaque light blockers.
Claim 15
Dependent Claim
48 words
The method as recited in claim 8 and wherein a total height of the phase shifters is given by the formula t=iλ/2(n-1) where t=total height of phase shifters i=an odd integer λ=wavelength of exposure light n=refractive index of first and second layer of material at an exposure wavelength.
Claim 16
Independent Claim
172 words
A method for forming a rim phase shifting mask comprising: providing a transparent substrate; forming an opaque layer on the transparent substrate having opaque light blockers with sidewalls and light transmission openings there between; conformally depositing a spacer layer over the substrate and the sidewalls of the opaque light blockers, said spacer layer formed of a transparent material having a predetermined thickness; conformally depositing a phase shifter layer on the spacer layer, said phase shifter layer formed of a transparent material; planarizing the spacer layer and the phase shifter layer to expose the spacer layer on the sidewalls; etching the spacer layer selectively with respect to the phase shifter layer to remove the spacer layer from the sidewalls and form a gap between the sidewalls and phase shifter layer, said gap formed with a width equal to the predetermined thickness of the spacer layer; and etching the phase shifter layer to form rim phase shifters spaced from the sidewalls by the width of the gap and having a predetermined width and height.
Claim 17
Independent Claim
172 words
A method for forming a rim phase shifting mask comprising: providing a transparent substrate; forming an opaque layer on the transparent substrate having opaque light blockers with sidewalls and light transmission openings there between; conformally depositing a spacer layer over the substrate and the sidewalls of the opaque light blockers, said spacer layer formed of a transparent material having a predetermined thickness; conformally depositing a phase shifter layer on the spacer layer, said phase shifter layer formed of a transparent material; planarizing the spacer layer and the phase shifter layer to expose the spacer layer on the sidewalls; etching the spacer layer selectively with respect to the phase shifter layer to remove the spacer layer from the sidewalls and form a gap between the sidewalls and phase shifter layer, said gap formed with a width equal to the predetermined thickness of the spacer layer; and etching the phase shifter layer to form rim phase shifters spaced from the sidewalls by the width of the gap and having a predetermined width and height.
Claim 18
Dependent Claim
22 words
The method as recited in claim 14 and wherein planarizing the spacer layer and phase shifter layer is with chemical mechanical polishing.
Claim 19
Dependent Claim
21 words
The method as recited in claim 14 and wherein planarizing the spacer layer and phase shifter layer is with dry etching.
Claim 20
Dependent Claim
49 words
The method as recited in claim 14 and wherein the spacer layer is a material selected from the group of materials consisting of SiO 2 , Si 3 N 4 , AlO 2 , TiO 2 , tetraethylorthosilicate, doped glass, CaF 2 , MgF 2 , and polymethyl methacrylate.
Claim 21
Dependent Claim
48 words
The method as recited in claim 14 and wherein the phase shifting layer is selected from the group of materials consisting of SiO 2 , Si 3 N 4 , AlO 2 , TiO 2 , tetraethylorthosilicate, doped glass, CaF 2 , MgF 2 , and polymethyl methacrylate.
Claim 22
Dependent Claim
30 words
The method as recited in claim 14 and further comprising etching the substrate to a predetermined depth to form vertical portions coplanar with the sidewalls of the opaque light blockers.
Claim 23
Dependent Claim
12 words
A phase shift mask formed by the method recited in claim 14.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-16 | 2000-01-15 | 2000-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-16 | 2004-01-15 | 2004-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-16 | 2008-01-15 | 2008-07-16 | $7700.00 | Window Closed / Lapsed |