US5281500A
Expired / Lapsed
US
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Method of preventing null formation in phase shifted photomasks
Assignee: Micron Technology Inc
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Filing: 1991-09-04
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Granted: 1994-01-25
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Expires: 2011-09-04
Abstract
Abstract A method of preventing null formation is performed on a phase shifted photomask including a clear quartz substrate, dark chrome feature features, and alternating clear phase shifters raised from the substrate. The phase shifter features are terminated in a transmissive, optically clear edge. To prevent null formation and consequent formation of stringers on the surface of the integrated circuit, the substantially vertical edge of the optically clear end of the phase shifter is tapered. The slope at any point along the tapered edge between the photomask substrate and the phase shifter is set to an angle, typically less than forty-five degrees, shallow enough that the point spread function does not produce an image. The point spread function of the imaging system spreads out the null, which is therefore not printed into the photoresist layer on the integrated circuit. The tapered edge of the phase shifter is created by either discrete or continuous etching methods. Both methods create the phase shifter and tapered edges simultaneously and are compatible with photomasks having either additive or subtractive type phase shifters.
Inventors
- 👤 David A. Cathey
- 👤 Brett Rolfson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:32
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/30
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
125 words
A method of preventing null information in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; providing a plurality of clear phase shifting features raised from the substrate; terminating an end of at least one of the phase shifting features in an optically clear edge; tapering the optically clear edge of the phase shifting feature to form a tapered edge; and exposing the photoresist layer through the phase shifted photomask; the tapered edge being formed such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 2
Independent Claim
125 words
A method of preventing null information in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; providing a plurality of clear phase shifting features raised from the substrate; terminating an end of at least one of the phase shifting features in an optically clear edge; tapering the optically clear edge of the phase shifting feature to form a tapered edge; and exposing the photoresist layer through the phase shifted photomask; the tapered edge being formed such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 3
Dependent Claim
48 words
The method of claim 1 in which the tapering step comprises tapering the optically clear edge of the phase shifting feature such that the slope at any point along the tapered edge between the photomask substrate and the phase shifting feature is less than a predetermined printing angle.
Claim 4
Dependent Claim
15 words
The method of claim 2 in which the printing angle is equal to forty-five degrees.
Claim 5
Dependent Claim
57 words
The method of claim 1 in which the tapering step comprises the steps of: covering the phase shifting feature with a layer of photoresist; isotropically etching the photoresist layer to expose a portion of the surface of the phase shifting feature; and simultaneously etching the exposed surface of the phase shifting feature to create the tapered edge.
Claim 6
Dependent Claim
85 words
The method of claim 1 in which the tapering step comprises the steps of: covering the phase shifting feature with a layer of photoresist; isotropically etching the photoresist layer to expose a portion of the surface of the phase shifting feature; etching the exposed surface of the phase shifting feature to create a stairstep; and repeating the steps of isotropically etching the photoresist layer and etching the exposed surface of the phase shifting feature to create a plurality of successive stairsteps approximating a tapered edge.
Claim 7
Dependent Claim
26 words
The method of claim 1 in which the step of providing phase shifted features and the step of tapering the optically clear edge are performed simultaneously.
Claim 8
Dependent Claim
27 words
The method of claim 1 in which the step of providing phase shifting features comprises adding material to the substrate to create the raised phase shifting features.
Claim 9
Dependent Claim
27 words
The method of claim 1 in which the step of providing phase shifting features comprises removing material from the substrate to create the raised phase shifting features.
Claim 10
Independent Claim
145 words
A method of preventing null formation in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; etching portions of the substrate to lower the surface of the substrate and create a plurality of clear phase shifting features raised from the substrate having at least one optically opaque edge and at least one optically clear edge; preserving the optically opaque edges of the phase shifting features; tapering the optically clear edges of the phase shifting feature to form a tapered edge; and exposing the photoresist layer through the phase shifted photomask; the tapered edge being formed such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 11
Independent Claim
145 words
A method of preventing null formation in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; etching portions of the substrate to lower the surface of the substrate and create a plurality of clear phase shifting features raised from the substrate having at least one optically opaque edge and at least one optically clear edge; preserving the optically opaque edges of the phase shifting features; tapering the optically clear edges of the phase shifting feature to form a tapered edge; and exposing the photoresist layer through the phase shifted photomask; the tapered edge being formed such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 12
Dependent Claim
48 words
The method of claim 9 in which the tapering step comprises tapering the optically clear edge of the phase shifting feature such that the slope at any point along the tapered edge between the photomask substrate and the phase shifting feature is less than a predetermined printing angle.
Claim 13
Dependent Claim
16 words
The method of claim 10 in which the printing angle is equal to forty five degrees.
Claim 14
Dependent Claim
57 words
The method of claim 9 in which the tapering step comprises the steps of: covering the phase shifting feature with a layer of photoresist; isotropically etching the photoresist layer to expose a portion of the surface of the phase shifting feature; and simultaneously etching the exposed surface of the phase shifting feature to create the tapered edge.
Claim 15
Dependent Claim
85 words
The method of claim 9 in which the tapering step comprises the steps of: covering the phase shifting feature with a layer of photoresist; isotropically etching the photoresist layer to expose a portion of the surface of the phase shifting feature; etching the exposed surface of the phase shifting feature to create a stairstep; and repeating the steps of isotropically etching the photoresist layer and etching the exposed surface of the phase shifting feature to create a plurality of successive stairsteps approximating a tapered edge.
Claim 16
Dependent Claim
27 words
The method of claim 9 in which the step of etching portions of the substrate and the step of tapering the optically clear edge are performed simultaneously.
Claim 17
Independent Claim
107 words
A method of preventing null formation in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; adding a plurality of clear phase shifting features to the surface of the substrate; tapering the edges of the phase shifting features to form tapered edges; and exposing the photoresist layer through the phase shifted photomask; the tapered edge being formed such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 18
Independent Claim
107 words
A method of preventing null formation in a photoresist layer on an integrated circuit substrate caused by optically clear edges in a phase shifted photomask, the method comprising the steps of: providing a photomask having a clear substrate and a plurality of dark features; adding a plurality of clear phase shifting features to the surface of the substrate; tapering the edges of the phase shifting features to form tapered edges; and exposing the photoresist layer through the phase shifted photomask; the tapered edge being formed such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 19
Dependent Claim
48 words
The method of claim 15 in which the tapering step comprises tapering the optically clear edge of the phase shifting feature such that the slope at any point along the tapered edge between the photomask substrate and the phase shifting feature is less than a predetermined printing angle.
Claim 20
Dependent Claim
15 words
The method of claim 16 in which the printing angle is equal to forty-five degrees.
Claim 21
Dependent Claim
17 words
The method of claim 15 in which the adding step and the tapering step are performed simultaneously.
Claim 22
Dependent Claim
67 words
The method of claim 18 in which the simultaneous adding and tapering step comprises the steps of: covering the entire surface of the photomask with a phase shifting layer; covering the phase shifting layer with a patterned layer of photoresist; isotropically etching the photoresist layer; and simultaneously etching the entire exposed surface of the phase shifting layer to create the clear phase shifting features having tapered edges.
Claim 23
Dependent Claim
103 words
The method of claim 18 in which the simultaneous adding and tapering step comprises the steps of: covering the entire surface of the photomask with a phase shifting layer; covering the phase shifting feature with a patterned layer of photoresist; isotropically etching the photoresist layer to expose a portion of the surface of the phase shifting layer; etching the entire exposed surface of the phase shifting layer to create a stairstep; and repeating the steps of isotropically etching the photoresist layer and etching the entire exposed surface of the phase shifting layer to create a plurality of successive stairsteps approximating a tapered edge.
Claim 24
Dependent Claim
75 words
A phase shifted photomask for selectively exposing a photoresist layer on an integrated circuit substrate comprising: a photomask having a clear substrate and a plurality of dark features; and a plurality of clear phase shifting features raised from the substrate having at least one optically clear edge; the optically clear edge being tapered such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 25
Dependent Claim
75 words
A phase shifted photomask for selectively exposing a photoresist layer on an integrated circuit substrate comprising: a photomask having a clear substrate and a plurality of dark features; and a plurality of clear phase shifting features raised from the substrate having at least one optically clear edge; the optically clear edge being tapered such that a null formed by the optically clear edge is spread out and is therefore not printed into the photoresist layer.
Claim 26
Dependent Claim
42 words
The photomask of claim 21 in which the tapered edge of the phase shifting feature comprises a curve between the photomask substrate and the phase shifting feature having a slope at any point along the curve less than a predetermined printing angle.
Claim 27
Dependent Claim
16 words
The photomask of claim 22 in which the predetermined printing angle is equal to forty-five degrees.
Claim 28
Dependent Claim
30 words
The photomask of claim 21 in which the clear photomask substrate is comprised of a material selected from the group consisting of SiO 2 and Si 3 N 4 .
Claim 29
Dependent Claim
28 words
The photomask of claim 21 in which the dark features are comprised of a material selected from the group consisting of chrome, aluminum, iron oxide, tungsten, and gold.
Claim 30
Dependent Claim
31 words
The photomask of claim 21 in which the clear phase shifting features are comprised of a material selected from the group consisting of SiO 2 and Si 3 N 4 .
References Cited (Backward Citations)
US4935334A
Cited
US5045417A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-01-24 | 1997-07-26 | 1998-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-01-24 | 2001-07-26 | 2002-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-01-24 | 2005-07-26 | 2006-01-25 | $7700.00 | Window Closed / Lapsed |