Multi-layer wiring structure in semiconductor device and method for manufacturing the same

Claim 1

A method of manufacturing a semiconductor device comprising: depositing an interlayer insulating film to completely cover a lower level wiring conductor of a desired pattern on a substrate, and planarizing the deposited interlayer insulating film; forming a first conducting film and a first insulating film on the planarized interlayer insulating film in the named order; forming a through hole by selectively removing said first insulating film, said first conducting film and said interlayer insulating film at a position where an upper surface of said lower level wiring conductor is exposed within said through hole so that it may be connected to a possible upper level wiring conductor; forming a second conducting film and a second insulating film, in the named order, to cover said first insulating film and an inner surface of said through hole including said exposed upper surface of said lower level wiring conductor so that said first conducting film is electrically connected to said lower level wiring conductor through said second conducting film thus formed; etching back said second insulating film and said second conducting film so that said second insulating film and said second conducting film remain on only a side wall surface of said through hole; performing an electroplating process by supplying an electric current through said first conducting film and said second conducting film remaining on said side wall of said through hole to said lower level wiring conductor, so that an electrically conductive metallic material is grown by electroplating onto said exposed upper surface of said lower level wiring conductor until said electrically conducting metallic material fills the inside of said through hole to substantially the same height as a level of said first conducting film; etching back said first insulating film and a portion of said second conducting film and said second insulating film remaining on said side wall of said through hole until a surface of said first conducting film is exposed, so that a planarized surface is formed of said first conducting film, upper end portions of said second conducting film and said second insulating film remaining on said side wall of said through hole, and an upper surface of said electrically conducting material filled in said through hole; locating a photoresist on said planarized surface at a location other than at a place where a possible upper level wiring conductor is to be formed; performing an electroplating process by supplying an electric current through said first conducting film, said second conducting film remaining on said side wall of said through hole, and said lower level wiring conductor to said electrically conducting metallic material filled in said through hole, so that an upper level wiring conductor is grown by electroplating on at least said electrically conducting material filled in said through hole and a portion said first conducting film not covered by said photoresist; and removing said photoresist and said first conducting film other than a portion on which said upper level wiring conductor was formed.

Claim 2

A method of manufacturing a semiconductor device comprising: depositing an interlayer insulating film to completely cover a lower level wiring conductor of a desired pattern on a substrate, and planarizing the deposited interlayer insulating film; forming a first conducting film and a first insulating film on the planarized interlayer insulating film in the named order; forming a through hole by selectively removing said first insulating film, said first conducting film and said interlayer insulating film at a position where an upper surface of said lower level wiring conductor is exposed within said through hole so that it may be connected to a possible upper level wiring conductor; forming a second conducting film and a second insulating film, in the named order, to cover said first insulating film and an inner surface of said through hole including said exposed upper surface of said lower level wiring conductor so that said first conducting film is electrically connected to said lower level wiring conductor through said second conducting film thus formed; etching back said second insulating film and said second conducting film so that said second insulating film and said second conducting film remain on only a side wall surface of said through hole; performing an electroplating process by supplying an electric current through said first conducting film and said second conducting film remaining on said side wall of said through hole to said lower level wiring conductor, so that an electrically conductive metallic material is grown by electroplating onto said exposed upper surface of said lower level wiring conductor until said electrically conducting metallic material fills the inside of said through hole to substantially the same height as a level of said first conducting film; etching back said first insulating film and a portion of said second conducting film and said second insulating film remaining on said side wall of said through hole until a surface of said first conducting film is exposed, so that a planarized surface is formed of said first conducting film, upper end portions of said second conducting film and said second insulating film remaining on said side wall of said through hole, and an upper surface of said electrically conducting material filled in said through hole; locating a photoresist on said planarized surface at a location other than at a place where a possible upper level wiring conductor is to be formed; performing an electroplating process by supplying an electric current through said first conducting film, said second conducting film remaining on said side wall of said through hole, and said lower level wiring conductor to said electrically conducting metallic material filled in said through hole, so that an upper level wiring conductor is grown by electroplating on at least said electrically conducting material filled in said through hole and a portion said first conducting film not covered by said photoresist; and removing said photoresist and said first conducting film other than a portion on which said upper level wiring conductor was formed.

Claim 8

A method of manufacturing a multi-layer wiring structure in a semiconductor device, comprising the steps of: forming a lower level wiring conductor of a desired pattern on a semiconductor substrate; forming an interlayer insulating film on said substrate, said interlayer insulating film completely covering said lower level wiring conductor with a film thickness which is more than the thickness of said lower level wiring conductor; forming a through hole in said interlayer insulating film, said through hole reaching an upper surface of said lower level wiring conductor so that an electrical connection may be made to said upper surface via said through hole; coating a side wall surface of said through hole with a first conducting film, said coating having a portion extending horizontally inwardly along a bottom surface of said through hole; coating said first conducting film with a vertical insulating film, said vertical insulating film coating having an inside surface which is coplanar with an end surface of said horizontal inwardly extending portion of said first conducting film so that a single planar inside surface is formed by said horizontal inwardly extending portion of said first conducting film and said vertical insulating film; coating a second conducting film on said interlayer insulating film and surrounding an upper end portion of said first conducting film and filling in said through hole with an electric conductor by an electroplating process, said electroplating process occurring in response to a supplying of an electrical current through said first conducting film, said second conducting film remaining on said side wall of said through hole and extending to said lower level wiring conductor so that an electrically conductive metallic material is grown by said electroplating process until said metallic material fills the inside of said through hole to a level which is substantially the same height as a level of said first conductive film, one planar surface being formed on an upper surface of said second conducting film, an upper end surface of said first conducting film, an upper end surface of said vertical insulating film, and an upper surface of said metallic material which fills in said through hole; and forming an upper level wiring conductor on said planar surface so that said upper level wiring conductor is electrically connected to said lower level wiring conductor by said electric conductor filling said through hole.

Claim 9

A method of manufacturing a multi-layer wiring structure in a semiconductor device, comprising the steps of: forming a lower level wiring conductor of a desired pattern on a semiconductor substrate; forming an interlayer insulating film on said substrate, said interlayer insulating film completely covering said lower level wiring conductor with a film thickness which is more than the thickness of said lower level wiring conductor; forming a through hole in said interlayer insulating film, said through hole reaching an upper surface of said lower level wiring conductor so that an electrical connection may be made to said upper surface via said through hole; coating a side wall surface of said through hole with a first conducting film, said coating having a portion extending horizontally inwardly along a bottom surface of said through hole; coating said first conducting film with a vertical insulating film, said vertical insulating film coating having an inside surface which is coplanar with an end surface of said horizontal inwardly extending portion of said first conducting film so that a single planar inside surface is formed by said horizontal inwardly extending portion of said first conducting film and said vertical insulating film; coating a second conducting film on said interlayer insulating film and surrounding an upper end portion of said first conducting film and filling in said through hole with an electric conductor by an electroplating process, said electroplating process occurring in response to a supplying of an electrical current through said first conducting film, said second conducting film remaining on said side wall of said through hole and extending to said lower level wiring conductor so that an electrically conductive metallic material is grown by said electroplating process until said metallic material fills the inside of said through hole to a level which is substantially the same height as a level of said first conductive film, one planar surface being formed on an upper surface of said second conducting film, an upper end surface of said first conducting film, an upper end surface of said vertical insulating film, and an upper surface of said metallic material which fills in said through hole; and forming an upper level wiring conductor on said planar surface so that said upper level wiring conductor is electrically connected to said lower level wiring conductor by said electric conductor filling said through hole.